去除雜質對MOCVD（Metal Organic Chemical Vapor Deposition）操作的安全及效能相當重要，而失誤鑑定則是用來找出任何製程中潛在的危害因子和操作問題的必要工作。受時間所限，在本論文中所提出之失誤鑑定技巧應用範圍僅及於CVD製程中的氣體純化系統。具體而言，我們提出了一個層級式系統化的建模步驟，可用以建立上述純化系統的派屈氏網路模型（Petri-Net Model），並依此模型模擬出給定的設備失誤和/或外界干擾對製程的影響以及詳細失誤傳遞的行為，最後根據完整模擬結果，我們還可進一步執行嚴謹的危害評估。

Reducing contamination level is of primary importance for the safety and efficiency of any MOCVD process. Fault identification is one of the basic tasks that must be performed to pinpoint its potential hazards and operational problems. The scope of present study is limited to the purge-gas purifiers in the CVD processes. In particular, a systematic step-by-step procedure is proposed in this study to construct Petri nets for modeling the purification system. Rigorous hazard assessment has been performed by simulating the fault propagation behaviors on the basis of the system model. A comprehensive list of identified fault origins is also presented to demonstrate the effectiveness and correctness of the proposed approach.

Alla, H., David, R., A modeling and analysis tool for discrete events systems: continuous Petri net. Perform. Evaluation. 33, 175, 1998.

Allen, D. J., Rao, M. S. M., New algorithms for the synthesis and analysis of fault trees. Ind. Eng. Chem. Funda. 19, 79, 1980.

Andrews, J. D., Morgan, J. M., Application of digraph method of fault tree construction to process plant. Reliab. Eng. 14, 85, 1986.

Balasubramanian, N., Chang, C. T., Wang, Y. F., Petri-net models for risk analysis of hazardous liquid loading operations. Ind. Eng. Chem. Res. 41, 4823-4836, 2002.

Cavalieri S., Mirabella, O., Marroccia, S., Improving flexible semiconductor manufacturing system performance by a coloured Petri net-based scheduling algorithm. IEEE 6th Int. Conf. on emerging technologies and factory automation proceedings, Los Angeles, CA, 369-74., 1997.

Chang, C. T., Hwang, H. C., New development of the digraph-based techniques for fault-tree synthesis. Ind. Eng. Chem. Res. 32, 1490, 1992.

Chang, C. T., Hwang, H. C., Studies on the digraph-based approach for fault-tree synthesis: 1, the ratio-control systems. Ind. Eng. Chem. Res. 33, 1520, 1994.

Chang, C. T., Hsu, D. S., Hwang, D. M., Studies on the digraph-based approach for fault-tree synthesis: 2, the trip systems. Ind. Eng. Chem. Res. 33, 1700, 1994.

David, R., Alla, H., Petri net for modeling of dynamic systems – a survey. Automatica. 30 (2), 175, 1994.

Drath, R., Hybrid object nets: An object oriented concept for modeling complex hybrid systems. Proc. 3rd Int. Conf. on automation of mixed processes: Hybrid dynamical systems, Reims, 1998.

Foulkes, N. R., Walton, M. J., Andow, P. K., Galluzzo, M., Computer-aided synthesis of complex pump and valve operations. Comput. Chem. Eng. 12:9/10, 1035, 1988.

Jones, A. C., O’Brien, P., CVD of compound semiconductors. VCH, Weinheim, 1996.

Kelly, B.E., Lees, F. P., The propagation of faults in process plants: 1, modeling of fault propagation. Reliab. Eng. 16, 3. 1986a.

Kelly, B.E., Lees, F. P., The propagation of faults in process plants: 2, fault tree synthesis. Reliab. Eng. 16, 39. 1986b.

Kim J., Desrochers AA., Modeling and analysis of semiconductor manufacturing plants using time Petri net models: COT business case study. IEEE Int. Conf. on systems, Man, and Cybernetics, Orlando, FL. Vol. 4, 3227-32, 1997.

Kumamoto, H., Henley, E. J., Safety and reliability synthesis of systems with control loops. Am. Inst. Chem. Eng. J. 20, 376, 1979.

Lapp, S. A., Powers, G. J., Computer-aided synthesis of fault-trees. IEEE Transm. Reliab. R-26, 2. 1977.

Newey, J., Gas purifiers earn their place in MOCVD material growth. Compd. Semicond. 12, 51-54. 2001.

Peterson, J. L., Petri net theory and the modeling of systems. Englewood Cliffs, NJ: Prentico-Hall, 1981.

Petri, C. A., Kommunikation mit Automaten. Ph. D. thesis, University of Bonn, Bonn, Germany, 1962.

Sangwal, K., Effects of impurities on crystal growth processes. Prog. Cryst. Growth Ch. 32, 3-43. 1996.

Srinivasan, R. and Venkatasubramanian, V., Automating HAZOP analysis of batch chemical plants: part I. the knowledge representation framework. Comput. Chem. Eng. 22 (9), 1345. 1998a.

Srinivasan, R. and Venkatasubramanian, V., Automating HAZOP analysis of batch chemical plants: part II. Algorithms and application. Comput. Chem. Eng. 22 (9), 1357. 1998b.

Stringfellow, G. B., Organometallic vapor-phase epitaxy. Academic Press, New York. 1989.

Stringfellow, G. B., Handbook of crystal growth, Elsevier Science, Amsterdam. Vol. 3B, Ch. 12. 1994.

Szucs, A., Gerzson, M., Hangos, K., An intelligent diagnostic system based on Petri nets. Comput. Chem. Eng. 22 (9), 1335. 1998.

Thompson, A. G.., MOCVD technology for semiconductors. Mater. Lett. 30, 255-263. 1997.

Thompson, A. G., Stall, R. A., Kroll, B., Semicond. Intern. 172. 1994.

Vaidhyanathan, R., Venkatasubramanian, V., Haxop expert: an expert system for automating HAZOP analysis. Process Saf. Prog. 15 (2). 80. 1996a.

Vaidhyanathan, R., Venkatasubramanian, V., A semi-quantitative reasoning methodology for filtering and ranking HAZOP results in HAZOP expert. Reliab. Eng. Syst. Safe. 53, 185. 1996b.

Veintemillas-Verdaguer, S., Chemical aspects of the effect of impurities in crystal growth. Prog. Cryst. Growth Ch. 32, 3-43. 1996.

Wang, Y. F., Chang, C. T., A hierarchical approach to construct Petri nets for modeling the fault propagation mechanisms in sequential operations. Comput. Chem. Eng. 27, 259-280. 2003.

Wang, Y. F., Chang, C. T., Petri-net-based deductive reasoning strategy for fault identification in batch processes. Ind. Eng. Chem. Res. 43, 2704-2720. 2004.

Wang, Y. F., Wu, J. Y., Chang, C. T., Automatic hazard analysis of batch operations with Petri nets. Reliab. Eng. Syst. Safe. 76, 91-104. 2002.
Watanabe, T., Funke, H. H., Torres, R., Raynor, M. W., Vininski, J., Houlding,

V. H., Contamination control in gas delivery systems for MOCVD. J. Cryst. Growth. 248, 67-71. 2003.