本文目標為建構一套影像伺服氣壓驅動微操作系統，此系統包含三個子系統及整合之控制介面。
第一部分，設計及建立氣壓微操作系統，因為空氣之可壓縮性，氣壓缸與滑軌之間的摩擦力及死區等非線性特性，為高度性系統，因此量測與繪製非線性特性，並設計模糊控制器及死區補償，改善微操作系統之定位精度，定位誤差能控制於±40nm內。
在第二部份，設計及建立氣壓力量控制系統，量測氣壓力量控制系統之特性如比例壓力控制閥，依照這些非線性特性，設計自調式模糊控制器結合死區補償，於改善氣壓力量控制系統之精度，力量誤差能控制於±1mN內。
在第三部份，建立顯微鏡系統，使用1/2吋CCD (Charge coupled device)攝影機擷取顯微鏡之影像，透過所設計之影像處理，影像追蹤及影像辨識，視覺影像使用於定義目標之空間位置，因此能計算目標位置與目標物之間距離。
最後，氣壓微操作系統，氣壓力量控制系統及顯微鏡系統整合於所設計之控制介面，使用Visual C++之MFC (Microsoft Foundation Classes)，完成控制介面包含影影像辨識及控制程序。從實驗結果微操作程序操作成功地執行。

The objective of this study is to establish a visual servo pneumatic of driven micromanipulation system. This system includes three subsystems and an integrating control interface.
The first section, a pneumatic micromanipulation system is designed and established. Because of the nonlinear characteristics of the compressibility of air, friction between the cylinder and linear guideways and dead zone, this is a highly nonlinear system. Therefore, nonlinear characteristics are measured and plotted. A fuzzy controller with a dead zone compensator is designed to improve the positioning precision of the micromanipulation system. The position error can be controlled within ±40nm.
In the second section, a pneumatic force control system is designed and established. The characteristics of the pneumatic force control system are measured as the proportional pressure control valve. In accordance with these nonlinear characteristics, a self tuning fuzzy controller with a dead zone compensator is designed to improve the precision of the pneumatic force control system. The force error can be controlled within ±1mN.
In the third section, the microscope system is set up. The images from the microscope are captured with a 1/2 type CCD(Charge coupled device) camera. Through the designed image processing, image tracking and recognition, a visual image is used to define the position of the object. Thus, the distance between the target position and the object can be calculated.
Finally, the pneumatic force control system, the microscope and the pneumatic micromanipulation system are integrated according to the designed control interface. MFC (Microsoft Foundation Classes) of Visual C++ is used to finish the control interface, which includes image recognition and control processing. From the experimental results, the micromanipulation process was successfully completed.

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