隨著科技發展，在製程與檢測方面應用的精密程度越來越高，如自動化光學檢測系統(AOI)。在自動化光學檢測系統的運作中，由於面板檢測器台上的顯微鏡組需要大量移動，且又是架設在高速移動的大型龍門上，在龍門停止時，機台晃動的時間需要盡可能縮短，否則會造成顯微鏡組與待檢測面板間的相對運動而影響到對位時的偏差量以及影像模糊等問題。本實驗室學長提出採用微米級精密定位平台透過主動式振動控制來抑制顯微鏡組所產生的晃動情形，但是在感測器與大型龍門機台間也會有相對運動情形的產生，故不能完全克服顯微鏡組的晃動情形。本文建立使用微機電加速規當作感測器，結合防漂移積分器與加速度回授控制的研究概念，來控制此微米級精密定位平台抑制顯微鏡組之晃動情形。但是目前為止，現有的微機電加速規的精度無法在微米級精密定位平台量測到有效的加速度訊號，故本文利用一振動量較大的雙鉗樑系統當作此研究概念的主要振動來源。而在加速度的積分過程中，常會有訊號漂移的現象產生，本文透過對硬體積分器建立等效模型以及結合高通濾波器等效模型的想法構成一防漂移積分器，並經實驗證明可有效抑制加速度積分成位移時的訊號漂移現象。在振動控制方面，我們透過加速度回授的方式設計了PI+V.F.控制器、PID控制器以及H∞控制器，透過步階響應、弦波路徑追蹤以及量測雜訊之強健性實驗，與位移回授的PID控制器與H∞控制器比較其性能。我們發現在暫態性能中，直接位移回授的控制器優於加速度回授的控制器，且H∞控制器優於PID控制器；在弦波路徑追蹤中，H∞控制器的等效頻寬優於PID控制器；強健性實驗方面，加速度回授的控制器較位移回授的控制器能抑制其雜訊量測對系統所造成的影響。本文對於應用加速規與加速度回授控制的研究已有初步的成果，希望未來能將此成果實際應用於微米級精密定位平台，甚至於AOI檢測機台上。

Automatic optical inspection (AOI) systems adapted on a movable gantry have been widely used in modern large area inspection tasks. The performance of motion control directly affects the accuracy and perhaps the yield of the entire process. To maximize process yield, the gantry should maneuver as fast as possible in order to maximize the throughput. However, this action will generate significant motion-induced vibration that excites the flexible modes of the systems, which may increase the settling time and reduce the inspection efficiency. As a result, a trade-off exists between the speed of movement and the achieved settling time. An alternative approach is to mount AOIs on a controllable stage and to eliminate the relative vibration between the AOI and the corresponding object to be inspected. By this approach, the effective bandwidth can be improved. However, to realize this concept, conventional position sensors cannot be used due to lacks of an absolute reference. An alternative solution is to use accelerometer for providing relative displacement by integrating the measurable accelerations. This solution brings potentially two problems: first, the possible drifting of low frequency signals and second, a re-design of feedback control scheme.
By experiments, we successfully develop the anti-drift integrator, which combines two second-order Sallen-Keys high-pass filters and original model of hardware integrator for enhancing the drifting rejection. Otherwise, three controllers of acceleration feedback was designed to enhance the vibration of double clam beam test platform, Nevertheless, through detail step and sinusoidal tests simulation and experimental correlations and interactions, these three controllers have been successfully implemented.In the study, we have realized the integration of acceleration feedback controller and the model of anti-drift integrator for suppressing low frequency drifting by combining of the models of the hardware integrator and two Sallen-Key high-pass filters.. Second, by both simulation and experimental investigation, the acceleration feedback controllers have gotten less effect than the displacement feedback controllers.
Although this study was motivated by the needs of AOI vibration control, it is not limited in this application only. The methodology proposed can be used in other applications related to precision positioning control using inertial sensor, such as active vibration control in precision semiconductor processing equipment.

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