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研究生： 施翔耀
Shr, Shian-Yau
論文名稱： 應用表面電漿結合基因演算法於量測雙折射薄膜參數之研究
A new method for measuring the axis direction and refraction index of birefringence thin film by SPR combined with Genetic Algorithm
指導教授： 羅裕龍
Lo, Yu-Lung
學位類別： 碩士
Master
系所名稱： 工學院 - 奈米科技暨微系統工程研究所
Institute of Nanotechnology and Microsystems Engineering
論文出版年： 2008
畢業學年度： 96
語文別： 英文
論文頁數： 82
中文關鍵詞： 雙折射率 、非等向性薄膜 、表面電漿 、方位角 、傾角
外文關鍵詞： azimuth angle, birefringence index, anisotropic thin film, tilt angle
相關次數： 點閱：113  下載：1 
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    • 在目前的表面電漿量測技術，都是以菱鏡或是半圓柱透鏡作為量測元件，以這種方式製作出來的量測系統有方位角的限制，只能在單一方位角做樣品量測，本研究用半球形的透鏡代替舊式的元件，突破方位角的限制，可以對待測樣品做全方位角與入射角的掃描，觀察其表面電漿共振的現象。利用這樣的設計，可以用來量測非等向性薄膜的表面參數，於不同角度量到的共振現象，搭配由理論建立起來的模擬資料庫，以基因演算法隨機產生範圍之內的參數與資料庫作比對，尋求出實驗值與理論質的最小誤差，進而反推出薄膜的表面參數，包含雙折射率、主軸傾角，與主軸方位角。

    A method for determining the birefringence index,azimuthal angle, and pretilt angle of an anisotropic thin film by measuring the surface plasmon resonance (SPR) device lens/Silver/SiO2 is proposed. In this paper, we use
    genetic algorithm method combine with curve fitting to develop an optical measurement method of thin film parameters in the SPR device to calculate the optical parameters at the states of 633nm He-Ne laser input light. After measuring the reflection intensity from 0 to 90 input light, we have the reflective intensity curve. By genetic algorithm method, the birefringence index, azimuthal angle, and pretilt angle of anisotropic thin film will be randomly produced. Then using curve fitting to get the minimum error between theoretical curve and measured curve, and calculate the optical parameters.
    Although it difficult to measure all the optical parameters of anisotropic thin film, but using the novel system of SPR device and genetic algorithm method combine with curve fitting, we can overcome the difficulty.

    Abstract .................................................1 Chapter 1 Introduction..............................................2 1.1 Preface...............................................2 1.2 esearchDestinationsandMotivations ....................2 1.3 Review of SPR Sensors.................................3 1.3.1 SPR sensors using ATR optical prism couplers: ......3 1.3.2 SPR sensors using optical waveguides : .............5 1.3.3 SPR sensor using grating couplers: .................6 1.4 History Review of SPR Measurement ....................6 Chapter 2 Birefringence Materials........................10 2.1 Review of Birefringence..............................10 2.2 The Optical Properties of Birefringence..............10 2.3 Optical Activity ....................................14 Chapter 3 Introduction of SPR and Fresnel Equations......22 3.1 Surface plasmon resonance method ....................22 3.2 Anisotropic thin film system.........................24 3.3 Fresnel Equations ...................................29 Chapter 4 Simulation.....................................35 4.1 Simulation SPR attenuated total reflection ..........35 4.2 Genetic Algorithm preliminaries and process..........38 4.2.1 Reproduction:......................................39 4.2.2 Crossover : .......................................41 4.2.3 Mutation:..........................................43 4.2.4 Error function of genetic algorithm method........ 44 4.3 Simulation and curve fitting ........................46 4.3.1 Simulation of the intensity curve and its differential curve...46 4.3.2 Simulation of multi‐angle measurement .............51 4.3.3 Simulation of multi‐wavelength measurement ........55 Chapter 5 Experimental Results ..........................59 5.1 Experiment setup ....................................59 5.2 Genetic algorithm and curve fitting result...........62 5.2.1 Measure the intensity curve and its differential curve ..........62 5.2.2 Multi‐angle measured result .......................67 5.2.3 Measured result of window-selection ...............74 Chapter 6 Conclusion ..............................................79 References...............................................80 Autobiography............................................82

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