數十年來，各種不同類型的氣體感測器已被廣泛的研究與開發。而自
蕭特基接觸式與電阻式為基礎的氣體感測器被提出之後，隨著半導體製程的進步，體積小、靈敏度高，可大量生產的半導體式氣體感測器已逐漸成為研究主流。
本論文中所提出的元件是以不同的觸媒材料，像鈀、鉑和氧化鋅製作
成積體式的氣體感測器，分別去量測不同的氣體，如氫氣、氨氣以及二氧化氮，並去研究其感測與響應特性。
首先，探討鈀/氮化鋁鎵/氮化鎵蕭特基二極體式感測器在不同溫度下的氫氣感測特性。此元件展現良好的感測性能，包含高相對靈敏度比、大電流變化量、寬廣的反向操作電壓區間及快速響應時間。
其次，探討鉑/氮化鋁鎵/氮化鎵蕭特基二極體式感測器在不同溫度下的氨氣感測特性，鉑金屬除了在氫氣上擁有感測特性外，還具備有偵測氨氣的能力。特別是在高溫時，此元件更擁有快速的響應時間。
第三，研究氧化鋅/氮化鋁鎵/氮化鎵電阻式感測器在不同溫度下的二氧化氮感測特性，因為二氧化氮是氧化性的氣體，會使得感測器的阻值上升。
對此我們製做了阻值較小的電阻式感測器，以便提升其靈敏度，而大的電流變化量也使得感測器較不容易受到雜訊的影響。
最後，由實驗結果我們可以得知，當感測氣體(氫氣、氨氣與二氧化氮)通入時，利用觸媒金屬對氣體選擇性的不同，可以得知通入的氣體為何者，而在未來此感測元件對於智慧型感測器及微機電系統應用具有良好之發展潛力。

Over the past decades, different types of gas sensors were developed. With the quick development of the fabrication technologies, semiconductor based gas sensors with small size and high sensitivity have become the mainstream of the research process.
The studied integrated sensors consisted of different catalytic metals such as Pd, Pt and ZnO. The studied devices are capable of monitoring different gases such as hydrogen, ammonia, and nitrogen dioxide. The AlGaN/GaN layer was used because of its advantages including large band gap (4.3eV), wide operation temperature region, good chemical stability, and high density of two-dimensional electron gas.
First, the hydrogen-detection characteristics of a Pd/AlGaN/GaN Schottky diode-type sensor were studied and demonstrated at different temperatures. This device exhibited good sensing performance including high relative sensitivity ratio, large current variation, widespread reverse voltage regime, and fast response time.
Second, the ammonia-detection characteristics of a Pt/AlGaN/GaN Schottky diode-type sensor were studied and demonstrated. Pt catalytic metal dissociates not only hydrogen molecules but also ammonia molecules. At high temperatures, the device exhibited fast transient response time.
Finally, the nitrogen dioxide-detection characteristics of a ZnO/AlGaN/GaN resistor-type sensor were studied and demonstrated. Based on the sensing mechanism of metal-oxide
material, the oxidizing property of nitrogen dioxide leads to the decrease of ZnO conductance.
In this research, the resistor-type sensor was fabricated with lower resistance to increase the sensitivity. Besides, sensors with large current variation exhibit larger margins to noise interference. Consequently, the integrated sensors show the promise for smart gas sensors and micro-electro-mechanical system (MEMS) application.

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