低溫共燒陶瓷技術的優點包括：易於製作三維微結構，可將電子電路，流體微流道系統簡易地相結合。其性質可耐受嚴苛的溫度及化學環境，且製程快速、容易。本研究旨在以低溫共燒陶瓷為材料，研製高效能電磁式微泵。此微泵由兩個泵體所組成，靠入出口處各有一對矩形截面的擴流器/噴嘴。兩組平行排列的泵體目的在提高微泵的流量，並且搭配上電磁致動膜片。微泵致動腔的直徑為九毫米，而擴流器/噴嘴的頸部尺寸為零點三乘以零點三毫米、擴張角為十度。則微泵系統在五十赫茲的響應頻率下可達到每分鐘一百點九微升。

　　There are some advantages of low temperature co-fired ceramics(LTCC). First of all, it is easy to construct the three-dimensional micro-structure. Secondly, electronic circuits and microfluidics components can easily be integrated. Thirdly, the fabrication processes of LTCC is simple and fast, after sintering, the devices can stand severe temperatures and chemical environment. The main point of this research is to use low temperature co-fired ceramics material to fabricate a high performance electromagnetic micropump. The pump consists of two pump chambers, each with two flow rectifying diffuser/nozzle elements with rectangular cross sections, one at the inlet and one at the outlet. The pump chambers are arranged in parallel for high pump flow. Each pump has two electromagnetically vibrated diaphragms. The pump chamber diameter is 9 mm and the diffuser/nozzle element neck dimensions are 0.3 × 0.3 mm with diffuser angle of 10 °. The pump capacity of about 100.9 µl/min with the pump diaphragm vibration frequency set to the pump resonance frequency of 50 Hz.

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