在本論文中，利用離子交換技術成功地製作可靠度高及造價相對低廉的積體光波導元件，並將其建構於矽酸鹽和磷酸鹽玻璃基板之中，相關元件的工作波段為632.8nm和1550nm。 首先，利用混合熔融鹽離子交換技術製作光波導於矽酸鹽玻璃(N-BK7)之中，透過完整且有系統性的分析，獲得離子交換過程後之波導折射率分佈符合高斯函數形式，從而建立波導特性與離子交換過程參數，如玻璃表層最大折射率改變量，以及鈉離子於玻璃中的擴散係數等等。利用此分析結果，於360°C和300分鐘條件之下製作直線型光波導，採用混合熔融鹽的配方是 AgNO3 : NaNO3 (摩爾比為0.02:1)。舉例來說，於製作過程中，擴散窗口寬度為2μm的單模波導，經由觀察和測試得到離子交換後波導的大小為8μm × 5μm，於1550nm工作波長，元件長度為1.5公分之條件下，存在約莫1 dB/cm的傳輸損耗。
接著，利用上述離子交換技術並搭配光束傳播法(BPM)的光學模擬方式，成功的製作出1 × 8 和 1 × 16多模干涉分光器，標準化的光相對強度分別約為0.85至1和0.79至1，而光功率強度分佈的均勻性分別為0.74和1.04dB。 另一種有效率的離子交換方式為利用電場輔助的電遷移乾式離子交換法，分別於不同組成成份的矽酸鹽玻璃基板(N-BK7和 Borofloat)，利用此方式成功地製作出如上述的1 × 8 和 1 × 16多模干涉分光器。相較於濕式熱擴散離子交換方式，乾式離子交換法需預先蒸鍍好金屬薄膜於玻璃表面，並提供一相對高的電場(∼715 V/mm)，因高溫高壓而離子化的金屬原子，受到電場驅動與玻璃之中的納離子產生離子交換反應，此種方式的最大好處是可以避免於離子交換過程中玻璃表面受到高溫混合熔融鹽的微侵蝕。
利用濕式離子交換技術製作光波導於共摻Er-Yb的磷酸鹽玻璃(IOG-1)之中，相關的光譜性質與插入損耗均完整的探討與量測。舉例來說，於製作過程中，擴散窗口寬度為3μm的光波導，經由觀察和測試得到離子交換後於1550nm工作波長，元件長度為1.2公分之條件下，存在約莫1.1 dB/cm的傳輸損耗。透過進一步的設計研究與製作，期許具備光訊號放大功能的光波導放大器於不久的將來實現。

In this thesis, ion-exchange technology in glass has been successfully used to realize dependable and low-cost integrated optic devices in silicate and phosphate glasses for λ = 632.8nm as well as for the optical telecommunication window at λ = 1550nm.
First of all, the waveguides are fabricated via a binary ion-exchange in silicate glass (N-BK7 form Schott Inc). A complete study of the silver ion diffusion in this glass matrix has been performed in order to determine silver and sodium ion diffusion coefficients as well as the maximum refractive index changes. Specifically, an ion-exchange process involving the use of AgNO3:NaNO3 molten salt with a mole ratio of 0.02:1 was conducted at a temperature of 360°C and with a duration of 300 min to realize the channel waveguides operating at λ = 1550 nm.

After ionic diffusion, the cross-sectional size of the waveguide has been measured to be 8μm × 5μm and with propagation loss of ~1 dB/cm for a 1.5 cm long device. Next, the integrated 1-to-8 and 1-to-16 multimode interference (MMI) power beam splitters were designed and fabricated based on the numerical simulation using beam propagation method (BPM). The normalized light intensities varied from ~0.85 to 1 and from ~0.79 to 1 for symmetrical 1 × 8 and 1 × 16 devices, corresponding to the maximum power imbalances of 0.74 and 1.04 dB, respectively. In addition, an efficient dry silver ion-exchange electromigration technique was developed to fabricate multimode interference (MMI) optical beam splitters in two different kinds of glass substrates (N-BK7 and Borofloat form Schott Inc). In contrast to an ion exchange process based on thermal diffusion as mentioned, a relatively high electric field (~715 V/mm) was applied to the glass to accelerate the field-driven ion exchange process by expeditiously replacing host sodium ions in the glass with silver ions. Wet Ag+-Na+ ion exchange process was also utilized to fabricate Er-Yb codoped waveguide amplifiers in phosphate glass (IOG-1 form Schott Inc). The spectroscopic properties and insertion losses were also characterized successfully. With a 3μm diffusion window width, a channel waveguide with propagation loss of ~1.1 dB/cm was obtained for a 1.2 cm long device operating at 1550nm. Relevant results obtained will be carrying over to the design and fabrication of waveguide amplifiers in a near future.

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