本論文討論雙軸雷射平臺加工時，在加減速區間所存在之雷射能量累積問題，並提出對伺服運動系統與雷射觸發系統，進行時間匹配設計達到所有加工區域中能量均勻分布。在伺服運動系統設計上，為了解決因裝配誤差或聯接軸承之剛性所造成的系統不確定性，本研究在設計速度控制器時，將基於 權重混合靈敏度設計問題，並結合迴路成形設計法的概念，使受控系統在不確性的影響下，仍可保持穩定並滿足設計者所需之響應規格。而針對位置輪廓控制策略，採取解耦合之控制架構，使各軸位置迴路符合鬆弛性能準則，即在各軸間有互相匹配的時間延遲，便可有效降低輪廓誤差。在雷射觸發系統設計上，若不希望雷射能量於加減速區有所累積，則輸出能量之大小須根據伺服移動速度作相對應的改變，同時利用伺服軸存在之延遲時間資訊作為調整雷射能量觸發之前置處理，便可使兩系統之響應進行匹配，以獲得良好的加工效果。

This thesis is aimed at solving the problem of laser energy accumulation happened in the operating region of acceleration or deceleration during the process of X-Y laser positioning, and the countermeasure of the time-based synchronous design between servo motion system and laser emission system is proposed. In the servo motion system design, the system uncertainty problem caused by assembly inaccuracy or stiffness of coupling is considered; thus, the design of velocity controller is based on weighted mixed sensitivity problem (WMS) and combined with the concept of loop shaping design problem (LSDP) to secure the performance of servo motion system under the effect of system uncertainty. For laser emission system, to avoid the laser energy accumulation phenomenon, the energy density is adjusted responding to the stage velocity. Meanwhile, according to the relaxed performance measure, the contouring error can be minimized when the delay times of two axes are the same. Further, the delay time of servo system was used to regulate the emission signal of laser system by feedforward control. Consequently, the response of these two systems is synchronous, and the better processing quality can be obtained.

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