利用大量感測節點組成的感測網路以及無線傳輸技術可對大尺度結構或環境進行監控，然而更換大量感測節點的化學電池所需的人力與其經濟效應將是一大問題，因此針對供應感測節點電能的問題提出一系列的探討與研究。希望藉由回收自然的能量轉換成電能，供應感測器永久性的電源，且在任何自然環境狀況中都可供應感測節點電能，故提出一初步設計的混合式獵能器回收自然中的能源，並由整合電路將收集到的直流與交流電儲存至蓄電電容。初步的系統中，包含了太陽能、熱電、壓電、電磁，評估可產生的輸出電壓與輸出功率。太陽能、熱電由現今已有的商用晶片即可直接利用，而此兩種機制可搭配進行能量回收。電磁獵能器則希望藉由標準製程降低生產成本，選用CIC委託台積電的0.18μm製程進行設計範例，由陣列式的設計，串並聯多個電磁微獵能器增加輸出電壓與降低內阻，評估陣列式電磁獵能器產生的輸出電壓為4.76mV，輸出功率密度4.02μW/cm2。藉由外加的結構與升壓電路增加輸出電壓。而壓電獵能器產生的電壓直接藉由倍壓電路即可生升壓。收集得的電能利用整合電路，將交流電升壓後進行整流，並與直流電儲存至蓄電電容，評估交流整流後的輸出與直流的輸出電壓大約均可達3V左右，此數量級的輸出電壓已可推動低驅動電壓的感測元件，輸出功率數量級約為0.1mW至數個mW。由於目前屬於初步設計與評估階段，尚未有實體元件，然而其中的研究在未來對於元件實體化與整合上有所助益。

We can monitor structures or environment by using wireless sensor network which consists of a lot of wireless sensor nodes and radio communication protocols. However replacing the power of those sensor nodes represents a series problem in both human operations and costs. Supplying power to sensor nodes by reclaiming energy from environmental wastes into electricity could be a feasible solution. In this thesis a conceptual design and initial layout of a hybrid micro power harvester including solar cell, thermoelectricity, piezoelectricity, and electromagnetic device, is proposed and analyzed. The electromagnetic power harvester model designed using the standard TSMC 1P6M 0.18μm process provided by the Chip Implementation Center(CIC). The main electromagnetic device is composed by numerous tiny electromagnetic power harvesters. By this approach, it is possible to design such a device with both sufficient power density and voltage output. Meanwhile, a marcoscale electromagnetic generator is designed and tested to validate the concept of vibration energy harvesting. On the other hand, solar cells and thermoelectricic devices are mainly designed for capturing additional thermal and solar energies by using wasted packaging areas to enhance the overall power densities of the hybrid energy harvester. Finally, possible circuit designs to further increase the voltage output and to integrate different power sources for battery charging. Although this work is still in its initial phase, the lesson and experience learned from this work are still invaluable for guiding the development of high efficient power harvesters in the future.

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