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研究生: 紀承濬
Chi, Cheng-Chun
論文名稱: Sb2Te3-Cr2Te3異質結構薄膜製程和費米能階調控之研究
Research on Sb2Te3-Cr2Te3 heterostructure thin film production processes and fermi level tuning
指導教授: 黃榮俊
Huang, Jung-Chung
學位類別: 碩士
Master
系所名稱: 理學院 - 物理學系
Department of Physics
論文出版年: 2024
畢業學年度: 113
語文別: 中文
論文頁數: 98
中文關鍵詞: 分子束磊晶異質結構拓撲絕緣體鐵磁二維材料Sb2Te3Cr2Te3
外文關鍵詞: Topological Insulator, Ferromagnetic 2D Materials, Sb₂Te₃, Cr₂Te₃
相關次數: 點閱:31下載:0
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  • 摘要i 目錄xii 表目錄xv 圖目錄xvi 第一章、 介紹1 1-1介紹1 1-1-1拓樸絕緣體1 1-1-2量子異常霍爾效應3 1-1-3二維磁性材料特性及研究發展5 1-2文獻回顧7 1-2-1文獻(一)7 1-2-2文獻(二)11 1-2-2文獻(三)14 1-3 實驗動機17 第二章、實驗原理18 2-1 薄膜成長理論18 2-2 材料磁性21 第三章、實驗儀器與製備流程25 3-1製程儀器與流程25 3-1-1 分子束磊晶系統25 3-1-2 薄膜製程步驟 29 3-2量測系統 30 3-2-1 X光繞射儀(X-ray diffractometer, XRD)30 3-2-2 X光射線光電子能譜 (X-ray Photoelectron Spectroscopy,XPS)31 3-2-3 原子力顯微鏡(Atomic force microscope,AFM)32 3-2-5 超導量子干涉震動儀(Superconducting Quantum Interference Device Vibrating Sample magnetometer,SQUID VSM)33 3-2-6 高解析穿透式電子顯微鏡(High Resolution Transmission electron microscope,HR-TEM)33 3-2-7角分析光電子能譜(Angle-resolved photoemission spectroscopy, ARPES)35 第四章、實驗結果與討論37 4-1 實驗流程大綱37 4-2 單層 Sb2Te3 和單層 Cr2Te338 4-3 成長溫度對Sb2Te3在Cr2Te3上的影響40 4-3-1 RHEED分析41 4-3-2 XRD 分析42 4-3-3 AFM分析43 4-3-3 HR-TEM及EDS 分析44 4-4 疊層薄膜之製程改良46 4-4-1 RHEED分析46 4-4-2 XRD 分析49 4-4-3 AFM分析52 4-4-4 HR-TEM及EDS 分析55 4-5 HAXPES分析57 4-6 SQUID分析59 4-7 ARPES分析60 第五章、 結論74 第六章、 參考文獻75

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