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研究生: 廖伯軒
Liao, Po-Hsuan
論文名稱: 二矽化鉬加熱元件的預測保養之案例研究
A case study of predictive maintenance for MoSi2 heating elements
指導教授: 吳煒
Wu, Wei
學位類別: 碩士
Master
系所名稱: 工學院 - 化學工程學系
Department of Chemical Engineering
論文出版年: 2023
畢業學年度: 111
語文別: 中文
論文頁數: 62
中文關鍵詞: 預測保養二矽化鉬生成對抗網路迴歸模型剩餘使用壽命
外文關鍵詞: predictive maintenance, molybdenum disilicide, generative adversarial network, regression model, remaining useful life
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  • 預測保養是基於人工智慧演算法去試圖預測設備可能發生故障的時間以便提前進行更換或維修。在國巨的積層陶瓷電容製程中會經過一道燒結程序,該程序所使用之推板式窯爐必須控制在恆溫使得陶瓷順利結晶,而當其中的二矽化鉬加熱元件無預警斷裂便會造成溫度驟降而影響成品率。本研究期望建立機器學習模型來預測加熱元件的剩餘使用壽命,找到最佳的修復時間。但是,預測保養應用於實際工廠中最大的挑戰就是資料收集不易,難以取得足夠的設備損壞資料供機器學習模型訓練,因此我們另外訓練生成對抗網路來學習生成大量類似於實際數據的合成數據,並以合成數據訓練長短期記憶模型及支持向量迴歸模型,兩模型的平均預測能力都很強,MAE皆趨近於0,但由RMSE及R2的結果顯示SVR的擬合效果更出色,R2可達0.634。根據此預測結果便能在加熱元件斷裂約20天前就進行維護工作,除了能避免無預警的斷裂,也免去定期更換而產生不必要的浪費。

    Predictive Maintenance (PdM) based on machine learning algorithm detects possible machine failure in advance to avoid sudden breakdown. This research is a case study for real-life industrial heating process. Molybdenum disilicide (MoSi2) is a common heating material used in a pusher kiln due to its high thermal resistance. Our purpose is to construct a machine learning model that can predict the remaining useful life of MoSi2 so that sudden breakdown of heating elements can be avoided. However, insufficient failure experience is a common challenge when dealing with predictive maintenance in real-life scenario. Therefore, Generative Adversarial Network (GAN) is applied to generate data which is similar to the real one but with enough failure experiences so that it is feasible to be used as training data. As for regression model, Long Short-term Memory (LSTM) and Support Vector Regression (SVR) are selected and compared the performance. Determine the best model for predicting remaining useful life of MoSi2.

    摘要 i Abstract ii 致謝 xx 目錄 xxii 表目錄 xxiv 圖目錄 xxv 第一章 緒論 1 1.1 前言 1 1.2 研究動機與目的 2 第二章 文獻回顧 4 2.1 預測保養架構 4 2.2 預測保養策略 5 第三章 理論與模型 8 3.1 推板式燒結爐 (Pusher kiln) 8 3.2 二矽化鉬加熱元件 (Molybdenum disilicide) 9 3.3 機器學習模型 12 3.3.1 激勵函數 (Activation function) 12 3.3.2 優化器 (Optimizer) 19 3.3.3 生成對抗網路 (Generative Adversarial Network) 22 3.3.4 長短期記憶網路 (Long Short-term Memory) 24 3.3.5 支持向量迴歸模型 (Support Vector Machine) 29 3.3.6 概率預測 (Probabilistic forecasting) 31 第四章 數據驅動模型建立 34 4.1 資料前處理 (Data Pre-processing) 34 4.1.1 狀態指標 (Health Indicator) 35 4.1.2 數據平滑 (Data Smoothing) 36 4.1.3 劣化曲線 (Degradation curve) 38 4.1.4 數據正規化 (Data Normalization) 39 4.2 生成對抗網路模型 41 4.3 長短期記憶網路模型 45 4.4 支持向量迴歸模型 47 4.5 迴歸模型測試與比較 (Regression Model Test and Comparison) 48 4.6 警示系統 (Warning System) 53 第五章 結論 57 第六章 未來研究方向 58 參考文獻 60

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