本研究針對本實驗室開發之原子序電子顯微術（atomic-number electron microscopy, ZEM），在掃描式電子顯微鏡（Scanning Electron Microscope, SEM）與掃描穿透式電子顯微鏡（Scanning Transmission Electron Microscope, STEM）上設計並建置一套可跨平台運作的外部掃描與同步擷取系統。
系統以LabVIEW 程式為核心產生 X／Y 掃描，結合多通道類比輸入同步讀取訊號，以量測樣品的電子束吸收電流（EBAC）、熱吸收、熱調制影像，並提供特定區域（Region of Interest, ROI）掃描、可調電子束駐留時間，以及快速／高精度擷取路徑與其混合策略，以兼顧同步性、解析度與成本。
在此基礎上展示三項應用：（一）結合雙電流計的三探針量測，即使 SEM 影像未見異常，仍可由沿線電阻 R(x) 的局部非單調起伏辨識高電阻區，作為失效前兆之電性指標；於此實驗中本研究觀測到異常 R(x) 曲線，因而進一步導入調制量測分析。（二）在電子束調制實驗中，以鎖相放大器量測 2ω／3ω 諧波並配合模擬比對，結果發現「能量逸出」為熱調制主要機制；並進一步用鎖相放大器量測 1ω 訊號，配合 Wiedemann–Franz 定律分析，顯示不帶電的熱逸散是調制訊號的主要來源。為了釐清調制實驗結果，使用 COMSOL 模擬元件於熱輻射條件下的熱調制背景值，結果顯示實驗量測並非可由傳統熱輻射現象單獨解釋。（三）在 STEM 熱吸收掃描中結合 Protochips 系統，發現 ZEM 訊號與高角度環形暗場成像（High-Angle Annular Dark-Field, HAADF）互補，且解析度可達 1 奈米以下；並比較鈀（palladium）於吸氫前後在相同像素的熱吸收變化，觀測到去氫後鈀的熱吸收高於吸氫後鈀，重現實驗室前人結果。
綜上，本研究提出一套可複製、可擴充的跨平台外部掃描與同步擷取架構，並以電子束吸收電流（EBAC）、熱吸收、熱調制三個應用中，分別發現異常 R(x) 曲線、釐清電子束之電與熱調制機制、驗證 ZEM 與 HAADF 的互補關係，以及呈現鈀在吸氫前後的熱吸收差異，為 ZEM 日後的潛在應用鋪路。

This work implements a cross-platform external scanning and synchronous acquisition system for our atomic-number electron microscopy (ZEM) on both scanning electron microscopes (SEM) and scanning transmission electron microscopes (STEM). A LabVIEW controller generates X/Y beam scans while multichannel analog inputs acquire signals concurrently, enabling e-beam absorbed current (EBAC), thermal absorbance, and modulation imaging. The system supports region-of-interest scans, adjustable dwell time, and interchangeable fast (DAQ) and high-precision (meter/GPIB) acquisition paths.
Three applications demonstrate its capability. First, a dual-ammeter three-probe method maps the along-track resistance R(x); even when SEM images show no defects, local non-monotonic features reveal high-resistance segments, prompting modulation analysis. Second, in e-beam modulation, lock-in measurements of 2ω/3ω harmonics combined with modeling indicate that an effective thermal radiation is the dominant mechanism. Additional 1ω measurements, interpreted via the Wiedemann–Franz relation, show that non-electron heat loss dominates the modulation signal, while COMSOL estimates of traditional thermal radiative backgrounds are too small to account for the observations. Third, STEM thermal-absorbance imaging with a Protochips platform shows ZEM contrast complementary to high-angle annular dark-field (HAADF) with sub-nanometer resolution. Comparing palladium before and after hydrogenation reveals higher thermal absorbance after dehydrogenation, consistent with our prior observations.
Overall, the system provides a reproducible, extensible route to align structural, electrical, and thermal readouts, enabling early defect indication via R(x), clarifying e-beam modulation mechanisms, and establishing complementary ZEM–HAADF contrast for various materials.

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