| 研究生: |
王俊傑 Wang, Chun-Chieh |
|---|---|
| 論文名稱: |
利用磁控濺鍍薄膜改善釹鐵硼磁石表面性質 The Improvements for Surface Properties of NdFeB Magnets by Pulse Magnetron Sputtering Thin Films |
| 指導教授: |
陳引幹
Chen, In-Gann |
| 學位類別: |
博士 Doctor |
| 系所名稱: |
工學院 - 材料科學及工程學系 Department of Materials Science and Engineering |
| 論文出版年: | 2017 |
| 畢業學年度: | 105 |
| 語文別: | 中文 |
| 論文頁數: | 104 |
| 中文關鍵詞: | 鉬 、鎳 、薄膜 、釹鐵硼磁石 、物理氣相沉積法 |
| 外文關鍵詞: | Molybdenum, Nickle, Thin film, Sintered NdFeB magnet, Physical vapor deposition (PVD) |
| 相關次數: | 點閱:99 下載:0 |
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NdFeB磁石具有體積小、重量輕和磁性強的特點,是迄今為止性能價格比最佳的磁石,為可實現環保節能的功能材料之一,其應用朝小型化、輕量化、高性能化和節能方向發展,項目包括電動汽機車、壓縮機、風力發電機等應用領域。燒結型NdFeB為最常使用磁石材料之一,由於磁石內含富釹相具高的電化學活性,極易氧化,且燒結磁石的結構疏鬆,存在大量孔隙,耐腐蝕性很差,這是大多數磁石應用中急需解決的問題。
本研究分別在燒結釹鐵硼 (NdFeB) 磁石表面上濺鍍鉬基薄膜 (MoN、Cu(MoN)及Ag(MoN)) 及鎳基薄膜 (NiCrAlV及NiCrAlVN),達到改善磁石表面性質之目的,鍍膜對於磁石表面改善機制探討以 (1). X射線繞射及穿透式電子顯微鏡做鍍膜成分及微結構分析;(2). 原子力顯微鏡分析薄膜表面形貌、奈米壓痕分析薄膜硬度及薄膜與基材間接合力;(3). 電化學阻抗頻譜分析儀分析抗腐蝕能力。
鉬基薄膜中以MoN薄膜為γ-Mo2N單一成分相,Cu及Ag摻雜後形成兩相混雜之薄膜;鎳基薄膜皆屬於非晶質薄膜。所製備薄膜與基材皆具有良好的附著特性,經刮痕測試觀察刮道內薄膜與基材分離特徵皆呈現碎裂模式 (Chipping mode)。保護NdFeB磁石最佳選擇為MoN薄膜,此薄膜具高強度奈米結構特性,包括平均表面粗糙度2.23 nm、晶粒大小約為17.9 nm及硬度為11.61 GPa;具單一γ-Mo2N薄膜為耐腐蝕能力最佳者,經由電化學測試結果顯示,其低頻阻抗相較於沒有鍍膜的NdFeB磁石提升了接近40倍。
Mo-based and Ni-based thin films were sputtered on the NdFeB magnet surfaces using pulse magnetron sputtering technique. The microstructures of thin films were examined by X-ray diffraction and transmission electron microscopy. The γ-Mo2N phase of fcc structure is a potential candidate for an ultra-incompressible and hard material. The composition of Mo-based films as well as the structures and properties depend on the sputtering parameters of the process used to deposit the films. The amorphous NiCrAlV and NiCrAlVN thin films exhibit a smooth surface with an average roughness of about 2 nm. Eventually, MoN and amorphous NiCrAlVN thin-film exhibit corrosion resistance in the NaCl and H2SO4 solutions.
1.Y. Yang, A. Walton,R. Sheridan,K. Güth, R. Gauß, O. Gutfleisch, M. Buchert, B.-M. Steenari, T. Van Gerven, and P. T. Jones, K. Binnemans, “REE Recovery from End-of-Life NdFeB Permanent Magnet Scrap: A Critical Review”, Journal of Sustainable Metallurgy, 3, p.122, 2017.
2.劉子衙、張文德、邱紹裕,“風力發電離岸系統之開發、應用及挑戰”,工業污染防治,138期,105頁,2016年。
3.G. Bai, R.W. Gao, Y. Sun, G.B. Han, and B. Wang, “Study of high-coercivity sintered NdFeB magnets”, Journal of Magnetism and Magnetic Materials, 308, p.20, 2007.
4.畢見強、孫康寧、尹衍升,“磁性材料的研究和發展趨勢”,山東大學學報(工學版),33卷,3期,225頁,2003年。
5.都有為,“磁性材料進展”,物理,29卷,6期,2000年。
6.M. Weickhmann, “Nd-Fe-B Magnets, Properties and Applications”, Vacuumschmelze GmbH & Co. KG: Hanau, Germany, 2009. http://www.vacuumschmelze.de/de/forschung-innovation/publikationen/anwendungen.html.
7.O. Gutfleisch, M. A. Willard, E. Brück, C. H. Chen, S. G. Sankar, and J. P. Liu, “Magnetic Materials and Devices for the 21st Century: Stronger, Lighter, and More Energy Efficient”, Advanced Materials, 23, p.821, 2011.
8.2017-2022年中國釹鐵硼市場深度調查及未來前景預測報告。
9.E. D. Dickens, Jr. and A. M. Mazany, “The corrosion and oxidation of Nd‐Fe‐B magnets”, Journal of Applied Physics, 67, p.4613, 1990.
10.G. W. Warren, G. Gao, and Q. Li, “Corrosion of NdFeB permanent magnet materials”, Journal of Applied Physics, 70, p.6609, 1991.
11. D. F. Cygan, and M. J. McNallan, “Corrosion of NdFeB permanent magnets in humid environments at temperatures up to 150°C”, Journal of Magnetism and Magnetic Materials, 139, p.131, 1995.
12.L. Schultz, A. M. El-Aziz, G. Barkleit, and K. Mummert, “Corrosion behaviour of Nd-Fe-B permanent magnetic alloys”, Materials Science and Engineering A, 267, p.307, 1999.
13.H. Bala, and S. Szymura, “An electrochemical investigation of dissolution of Nd-Fe-B magnets in acid solution under cathodic polarization”, Corrosion Science, 32, p.953, 1991.
14.A. A. El-Moneim, A. Gebert, F. Schneider, and O. Gutfleisch, L. Schultz, “Grain growth effects on the corrosion behavior of nanocrystalline NdFeB magnets”, Corrosion Science, 44, p.1097, 2002.
15.P. Tenaud, F. Vial, and M. Sagawa, “Improved corrosion and temperature behaviour of modified Nd-Fe-B magnets”, IEEE Transactions on Magnetics, 26, p.1930, 1990.
16.A. S. Kim, “Effect of oxygen on magnetic properties of Nd‐Fe‐B magnets”, Journal of Applied Physics, 64, p.5571, 1991.
17.B. E. Higgins and H. Oesterreicher, “Properties and stability of Nd2Fe14B particles”, IEEE Transactions on Magnetics, 23, p.92, 1987.
18.P. Mitchell, “Corrosion protection of NdFeB magnets”, IEEE Transactions on Magnetics, 26, p.1933, 1990.
19.T. S. Chin, R. T. Chang, W. T. Tsai, and M. P. Huang, “Electrochemical behavior of rare-earth magnet alloys in various solutions”, IEEE Transactions on Magnetics, 24, p.1927, 1988.
20.S. Hirosawa, S. Mino, and H. Tomizawa, “Improved corrosion resistance and magnetic properties of Nd‐Fe‐B‐type sintered magnets with Mo and Co”, Journal of Applied Physics, 69, p.5844, 1991.
21.C. J. Willman and K. S. V. L. Narasimhan, “Corrosion characteristics of RE‐Fe‐B permanent magnets”, Journal of Applied Physics, 61, p.3766, 1987.
22.W. Bloch, K. Grendel, and H. Staubach, Proceedings 11th International Workshop on Rare Earth Magnets and Their Applications, Pittsburgh, PA, p.1081, October, 1990.
23.K. Tokuhara and S. Hirosawa, “Corrosion resistance of Nd‐Fe‐B sintered magnets”, Journal of Applied Physics, 69, p.5521, 1991.
24.T. Minowa, M. Yoshikawa, and M. Honshima, “Improvement of the corrosion resistance on Nd-Fe-B magnet with nickel plating”, IEEE Transactions on Magnetics 25, p.3776, 1989.
25.H. Bala, G. Palowska, S. Szymura, V. V. Sergeev, and Y. M.Rabinovich, “Corrosion characteristics of Nd-Fe-B sintered magnets containing various alloying elements”, Journal of Magnetism and Magnetic Materials, 87, p.L255, 1990.
26.S. Steyaert, J-M Le Breton and J. Teillet , “Microstructure and corrosion resistance of Nd-Fe-B magnets containing additives”, Journal of Physics D: Applied Physics, 31, p.1534, 1998.
27.K. G. Knoch, B. Grieb, E. T. Henig, H. Kronmuller, and G. Petzow, “Upgraded Nd-Fe-B-AD (AD=Al,Ga) magnets: wettability and microstructure”, IEEE Transactions on Magnetics, 26, 1951, 1990.
28.W. Rodewald, and P. Schrey, “Microstructure and magnetic properties of sintered Nd12.2Dy2.9Fe71.8−xCo4.7WxB8.4 magnets”, Journal of Magnetism and Magnetic Materials, 83(1-3), p.206, 1990.
29.T. Minowa, M. Yoshikawa, and M. Honshima, “Improvement of the corrosion resistance on Nd-Fe-B magnet with nickel plating”, IEEE Transactions on Magnetics, 25, p.3776, 2002.
30.D. J. Blackwood, B. Balakrisnan, Y. Z. Huang, and C.K. Tan, “Influence of the chemical composition of the plating solution on the ability of nickel coatings to protect Nd2Fe14B magnets against corrosion”, Journal of Magnetism and Magnetic Materials, 223, p.103, 2001.
31.C. B. Ma, F. H. Cao, Z. Zhang, and J. Q. Zhang, “Electrodeposition of amorphous Ni–P coatings onto Nd–Fe–B permanent magnet substrates”, Applied Surface Science, 253, p.2251, 2006.
32.N. V. Khartchenko, and V. M. Kharchenko, Advanced Energy Systems, Second Edition, CRC Press, December 20, 2013.
33.張守民、歐陽砥、周永洽,“釹鐵硼磁體的有機溶液電鍍鋁研究”,材料工程,9期, 31頁,2000年。
34.F. T. Cheng, H. C. Man, W. M. Chan, et al., “Corrosion protection of Nd-Fe-B magnets by bismaleimide coating”, Journal of Applied Physics, 85, p.5690, 1999.
35.N. C. Ku, C. D. Qin, D. H. L. Ng, “Enhanced corrosion resistance of NdFeB type permanent magnet coated by a dual layer of either Ti/Al or Ni/Al intermetallics”, IEEE Transactions on Magnetics, 33, p.3913, 1997.
36.C.D. Qin, A. S. K. Li, and D. H. L. Ng, “The protective coatings of NdFeB magnets by Al and Al(Fe)”, Journal of Applied Physics, 79, p.4854, 1996.
37.N. C. Ku, C. D. Qin, C. C. Yu, and D. H. L. Ng, “Corrosion resistance of NdFeB magnets coated by Al”, IEEE Transactions on Magnetics, 32, p.4407, 1996.
38.張文成,“高性能稀土永久磁石之研究與發展”,物理雙月刊,22卷,6期,570頁,2000年。
39.Darja Kek Merl, Ingrid Milošev, Peter Panjan, and Franc Zupanič, “Morphology and corrosion properties PVD Cr-N coatings deposited on aluminium alloys”, Materials and Technology, 45, p.593, 2011.
40.A. Őztűrk, K.V. Ezirmik, K. Kazmanlı, M. Urgen, O.L. Eryılmaz, and A. Erdemir, “Comparative tribological behaviors of TiN-, CrN- and MoN-Cu nanocomposite coatings”, Tribology International, 41, p.49, 2008.
41. A. Erdemir, G. Ramirez, O. L. Eryilmaz, B. Narayanan, Y. Liao, G. Kamath, and S. K. R. S. Sankaranarayanan, “Carbon-based tribofilms from lubricating oils”, Nature, 536, p.67, 2016.
42. Bin Zhaoa, Kefei Sun, Zhenlun Song, and Junhe Yang, “Ultrathin Mo/MoN bilayer nanostructure for diffusion barrier application of advanced Cu metallization”, Applied Surface Science, 256, p.6003, 2010.
43.Risheng Magnets International Co., Ltd, www.rishengmagnets.com.
44.http://www.kobelcokaken.co.jp/target/chinese/index.html
45.U. Helmersson, M. Latteman, J. Bohlmark, A. P. Ehiasarian, J. T. Gudmundsson, “Ionized physical vapor deposition (IPVD): A review of technology and applications”, Thin Solid Films, 513, p.1-24, 2006.
46.V. P. M. Anitha, S. Chandrashekharam, and Mukesh D. Bhatnagar , “Deposition of molybdenum nitride thin films by r.f. reactive magnetron sputtering”, Surface and Coatings Technology, 79, p.50, 1996.
47.K. K. Shih, and D. B. Dove, “Properties of W-N and Mo-N films prepared by reactive sputtering”, Journal of Vacuum Science & Technology A: Vacuum, Surface, and Films, 8, p.1359, 1990.
48.K. -L. Lin, and Y. -J. Ho, “Deposition and properties of Mo-N films”, Journal of Vacuum Science & Technology A: Vacuum, Surface, and Films, 13, p.2872, 1995.
49.J. P. Chu, J. S. C. Jang, J. C. Huang, H. S. Chou, Y. Yang, J. C. Ye, Y. C. Wang, J. W. Lee, F. X. Liu, P. K. Liaw, Y. C. Chen, C. M. Lee, C. L. Li, C. Rullyani, “Thin film metallic glasses: Unique properties and potential applications”, Thin Solid Films, 520, p.5097-5122, 2012.
50.羅聖全,“掃瞄式電子顯微鏡 (SEM)”,科學研習,No. 52-5頁,2013年5月。
51.https://pharm.virginia.edu/files/2014/01/AFM2.jpg
52.Oliver, W.C., and Pharr, G.M., “An improved technique for determining hardness and elastic-modulus using load and displacement sensing indentation experiments”, Journal of Materials Research, 7, p.1564, 1992.
53.M.F. Doerner and W.D. Nix, “A method for interpreting the data from depth-sensing indentation instruments”, Journal of Materials Research, 1, p.601, 1986.
54.N. Vidakis, A. Antoniadis, and N. Bilalis, “The VDI 3198 indentation test evaluation of a reliable qualitative control for layered compounds”, Journal of Materials Processing Technology, 143-144, p.481-485, 2003.
55.ASTM C1624-05(2015) Standard Test Method for Adhesion Strength and Mechanical Failure Modes of Ceramic Coatings by Quantitative Single Point Scratch Testing, ASTM International, West Conshohocken, PA, 2015, https://doi.org/10.1520/C1624-05R15.
56.J. Volger, “Note on the Hall potential across an inhomogeneous conductor”, Physical Review, 79, p.1023-1024, 1950.
57.J. W. Zheng, L. Q. Jiang, and Q. L. Chen, “Electrochemical Corrosion Behavior of Nd-Fe-B Sintered Magnets in Different Acid Solutions”, Journal of Rare Earths, 24, p.218-222, 2006.
58.I. Costa, M.C.L. Oliveira, H.G. de Melo, and R.N. Faria, “The effect of the magnetic field on the corrosion behavior of Nd-Fe-B permanent magnets”, Journal of Magnetism and Magnetic Materials, 278, p.348, 2004.
59.Z. Gao, D. C. Jiles, D. J. Branagan, and R. W. McCallum, “Dependence of energy dissipation on annealing temperature of melt–spun NdFeB permanent magnet materials”, Journal of Applied Physics, 79, p.5510, 1996.
60.DeFord, and Donald D., “Electroanalysis and Coulometric Analysis”, Analytical Chemistry, 32, p.31-37, 1960.
61.田福助,電化學理論與應用,高立圖書有限公司出版,2004。
62.http://baike.baidu.com/item/%E6%81%92%E7%94%B5%E6%B5%81%E4%BB%AA
63.楊聰仁,材料基礎實驗(二)腐蝕電化學分析,逢甲大學材料工程系講義,2004。
64.吳成有,“超級電容器與空氣電極材料製備分析及其電化學性質研究”,國立交通大學材料科學與工程學系博士論文,2010。
65.楊昇晃,“微型燃料電池設計、製作與電化學阻抗量測分析”,國立中山大學機械與機電工程學系碩士論文,2005。
66.C. H. Lin, J. P. Chu, T. Mahalingam, T. N. Lin, and S. F. Wang, “Sputtered copper films with insoluble Mo for Cu metallization: A thermal annealing study”, Journal of Electronic Materials, 32, p.1235, 2003.
67.Y. He and J. Y. Feng, “Diffusion barrier performances of direct current sputter-deposited Mo and MoxN films between Cu and Si”, Journal of Crystal Growth, 263, p.203, 2004.
68.V. P. Anitha, S.Major, D. Chandrashekharam, and M. Bhatnagarc, “Deposition of molybdenum nitride thin films by r.f. reactive magnetron sputtering”, Surface and Coatings Technology, 79, p.50-54, 1996.
69.V. P. Anitha, S. Major, D. Chandrashekharam, and M. Bhatnagar, “Deposition of molybdenum nitride films by r.f. reactive magnetron sputtering”, Surface and Coatings Technology, 79, p.50–54, 1996.
70.Y. Wang and R. Y. Lin, “Amorphous molybdenum nitride thin films prepared by reactive sputter deposition”, Materials Science and Engineering: B, 112, p.42-49, 2004.
71.J. M. Ngaruiya, “Fundamental Process in Growth of Reactive DC Magnetron Sputtered thin films”, p.16, 2004.
72.A. I. Gusev, A. A. Rempel, and A. J. Magerl, “Disorder and Order in Strongly Nonstoichiometric Compounds”, New York: Springer-Verlag Berlin Heidelberg GmbH, 2001, pp.53.
73.Y. Wang and R. Y. Lin, “Amorphous molybdenum nitride thin films prepared by reactive sputter deposition”, Materials Science & Engineering B 112, p.42-49, 2004.
74.I. Jauberteau, A. Bessaudou, R. Mayet, J. Cornette, J. L. Jauberteau, P. Carles, and T. Merle-Méjean, “Molybdenum Nitride Films: Crystal Structures, Synthesis, Mechanical, Electrical and Some Other Properties”, Coatings, 5, p.656-687, 2015.
75.T. Suszko, W. Gulbiński, and J. Jagielski, “Mo2N/Cu thin films - the structure, mechanical and tribological properties”, Surface and Coatings Technology, 200, p.6288-6292, 2006.
76.K. H. Johnson and D. P. Clougherty, “Dynamic jahn-teller coupling, anharmonic oxygen vibrations and high-Tc superconductivity in oxides”, Modern Physics Letters B, 3, p.1367, 1989.
77.Y. N. Chiu and F. E. Wang, “Vibronic pairwise charge transfer in copper-oxide sheets: A possible approach to high temperature superconductivity theory”, Theoretica Chimica Acta, 90, p.205, 1995.
78.Y. Huang, H. Li, M. Zuo, L. Tao, W. Wang, J. Zhang, Q. Tang, and P. Bai, “Corrosion resistance of sintered NdFeB coated with SiC/Al bilayer thin films by magnetron sputtering”, Journal of Magnetism and Magnetic Materials, 409, p.39-44, 2016.
79.A. Saliba-Silva, R. N. Faria,M. A. Baker, and I. Costa, “Improving the corrosion resistance of NdFeB magnets: an electrochemical and surface analytical study”, Surface and Coatings Technology, 185, p. 321-328, 2004.
80.J. R. Hook and H. E. Hall, Solid State Physics, Wiley, New York, 1991.
81.C. W. Chu, Jason S. C.Jang, G. J.Chen, and S. M.Chiu, “Characteristic studies on the Zr-based metallic glass thin film fabricated by magnetron sputtering process”, Surface and Coatings Technology, 202, p.5564-5566, 2008.
82.N. M. Gparreia, “Mechanical evaluation of unbiased W-O-N coatings deposited by d.c. reactive magnetron sputtering”, Surface & Coatings Technology, 200, p.6511-6516, 2006.
校內:2021-08-22公開