簡易檢索 / 詳目顯示

回結果列表
研究生： 温智凱
Wen, Chih-Kai
論文名稱： 地震引致科技廠房意外停機與結構損傷防治之研究
Prevent Earthquake-Induced Unexpected Machine Shutdowns and Structure Damage of the High-Tech Facility
指導教授： 朱聖浩
Ju, Shen-Haw
學位類別： 碩士
Master
系所名稱： 工學院 - 土木工程學系
Department of Civil Engineering
論文出版年： 2023
畢業學年度： 111
語文別： 英文
論文頁數： 141
中文關鍵詞： 高科技廠房 、超低頻微震防治 、強烈地震防治
外文關鍵詞： High-tech factory, Ultra-low frequency wave blocked, Earthquake blocked
相關次數： 點閱：101  下載：14 
分享至:
查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報

    • 台灣地震頻繁，一年有上萬次的地震發生。以前研究都專注於大規模地震對建築物的損壞，未曾想到低頻無感地震竟也會對財產造成大量損失。低頻地震可分為兩種，第一種為自遠方(中國、日本、尼泊爾……)，震波傳遞至台灣時通常蘊含大量的低頻震動。第二種為來自台灣本島或東部外海，蘊含大量低頻震動成分的無感地震。這些低頻震動會造成高科技廠房中的掃描儀(scanner)中的主動控制失靈，進而產生無預警的停機，不僅造成產線停擺，晶圓良率下降等問題。工程師也必須耗費大量時間來調整修復機台。
    本論文主旨為減少低頻地震對於高科技廠房的影響。使用台灣某先進科技廠房之平面結構圖建立三維有限元素模型，並在時域中進行模擬。科技廠房放置於土壤模型上，使用台灣南部科學園區土壤參數。為了避免震波在有限尺寸的土壤模型中反射，加入吸收邊界在土壤模型四周和底部，以模擬真實地震波在土層平面無限空間的傳遞情況，土壤表面為自由表面。提出三種基礎形式，分析並討論其效果。發現大底板式基礎能夠有效抵擋低頻震動，震波會由大底板四周繞過去，大幅降低機台意外停機機率。此外，進行非線性耐震分析，分析在面對大地震時大底板式基礎的抗震效果。結果顯示，這種大底板式基礎能夠降低大地震下加速度的傳遞。
    大底板式基礎只要長寬都達到200 m以上，就能開始發揮效果。這種基礎非常適合科技廠房，只要將兩座廠房的地下室相連接，單邊寬度就超過200 m。能讓上方廠房抵抗低頻震動維持穩定生產、在強烈地震情況下保護廠房結構、避免晶圓掉落損壞，大幅降低損失。大底板式基礎更能夠設計成停車場或倉儲空間，可謂是保護廠房設施的一種極佳選擇。

    Taiwan experiences with tens of thousands occurring annually. Among them there are some low-frequency earthquakes will cause damage to the machine. These vibrations can lead to malfunctions in scanners used in high-tech factories, resulting in sudden shutdowns that not only halt production lines but also lead to decreased wafer yields. Consequently, engineers spend a significant amount of time adjusting and repairing the machines.
    The objective of this study is to mitigate the impact of low-frequency earthquakes on high-tech factories. By implementing a fundamental configuration that prevents ultra-low frequency seismic waves from entering the structure, the occurrence of unexpected machine shutdowns can be significantly reduced. A three-dimensional finite element model based on the floor plan of an advanced technology factory in Taiwan was constructed and simulated in the time domain. The factory model was placed on a soil model using the soil parameters from the Science Park in southern Taiwan. To accurately simulate the transmission of seismic waves in an infinite soil plane, an absorbing boundary was incorporated around the soil model and the bottom. On the top of the soil model is free surface. Three basic forms were proposed, and their effects were analyzed and discussed. The findings demonstrate that a large slab foundation effectively mitigates low-frequency vibrations, as waves are deflected around the slab, thereby minimizing their impact on the factory structure. Furthermore, nonlinear seismic analysis was conducted to assess the seismic effects on the large slab during major earthquakes. The results indicate that this large slab foundation reduces the transmission of acceleration, thereby safeguarding the factory building's structure.

    摘要 I Abstract II Acknowledgment III List of Tables VII List of Figures IX Chapter 1 Introduction 1 1.1 Background and purpose of the research 1 1.2 Literature Review 2 1.2.1 Research vibration screening of trenches 2 1.2.2Research on vibration reduction of the barriers 3 1.2.3Research on the vibration reduction of pile foundations 4 1.2.4Research on the vibration reduction of base isolation 6 1.2.5Research on the vibration reduction of structure 7 Chapter 2 Problems and research methods 9 2.1 Problem statement 9 2.1.1 Vibration-sensitive machines 9 2.1.2 Vibration specification of the scanner 11 2.1.3 High-tech building response to low frequency vibration 12 2.1.4 Summary of the issue 12 2.2 Wave Propagation in earth 14 2.2.1 Far-field earthquake 14 2.2.2 Near-field earthquake 14 2.3 Theory of SIMQKE 15 2.4 Theory of SHAKE91 17 2.5 Absorbing Boundary 21 2.6 Soil Rayleigh damping 23 2.7 Fluid-Structure interaction 25 2.8 Vibration analysis One-third band analysis 27 2.9 Low frequency acceleration specification for wafer scanner 28 2.10 Mohr-Coulomb yield criterion 29 Chapter 3 Programs for finite element analysis 30 3.1 Program usage flow chart 30 3.2 Introduce the program 31 3.3 The program AB.exe 31 3.4 The program AD.exe 32 3.5 The program show.exe 40 3.6 The program AE.exe 41 3.7 The program geb.exe 44 3.8 The program SIMQKE 51 3.9 The program VASJAPAN.exe 68 3.10 The program AN.exe 79 3.11 The program g.exe 79 3.12 The program gf.exe 84 Chapter 4 Simulation model 85 4.1 The high-tech factory model 85 4.2 Soil model 89 4.3 Slab model 92 4.4 Cross-shaped underground thin walls foundation 93 4.5 Water filled trench model 95 4.6 Seismic wave input 96 4.7 Absorbing boundary condition assigned 97 4.8 Input seismic acceleration at the bottom of the model 98 4.9 Output point on 1F and 3F 99 4.10 Output acceleration time history at 1F floor of the factory 101 Chapter5 Low-frequency vibration analysis of different foundation configurations 105 5.1 Machine shut down criterion 105 5.2 Underground cross-shape thin wall analysis 105 5.2.1 Accumulative PSD, input seismic force with T0 = 0.831 (s), Accmax = 5 (gal) 105 5.2.2 Summary of underground cross-shape thin wall analysis 106 5.3 Slab analysis109 5.3.1 Data of slab analysis 110 5.3.2 Summary of slab analysis 113 5.4 Water trench analysis 115 5.4.1 Accumulative PSD, input seismic force with T0 = 0.831 (s), Accmax = 5 (gal) 116 5.4.2 Accumulative PSD, input seismic force with T0 = 1.1 (s), Accmax = 5 (gal) 116 5.4.3 Summary of water trench analysis 117 Chapter 6 Nonlinear seismic analyze to the factory with slab 118 6.1 Mohr-Coulomb yield criterion 118 6.2 Input seismic force T0 = 0.831 (s), Accmax = 320 (gal) 120 6.3 Output time history data from 3F floor at node 91196 121 6.4 Summary of factory nonlinear seismic analysis 124 Chapter 7 Nonlinear seismic analyze to the building with slab 125 7.1 Mohr-Coulomb yield criterion125 7.2 RC building model 11 story 126 7.3 Steel building model 19 story 127 7.4 Steel building model 34 story 128 7.5 Maximum displacement and maximum acceleration at each floor 129 7.6 Summary of factory nonlinear seismic analysis 132 Chapter 8 Conclusions 133 Reference 135

    1. Ajel, H.A., H.S. Al-Jubair, and J.K. Ali, An experimental study on vibration isolation by open and in-filled trenches. Open Engineering.12(1): p. 555-569. 2022
    2. Álamo, G.M., et al., The effectiveness of a pile barrier for vibration transmission in a soil stratum over a rigid bedrock. Computers and Geotechnics. 110: p. 274-286. 2019
    3. Anderson, D.L., A. Ben-Menahem, and C.B. Archambeau, Attenuation of seismic energy in the upper mantle. Journal of Geophysical Research (1896-1977). 70(6): p. 1441-1448. 1965
    4. Bariker, P. and S. Kolathayar, Dynamic Soil Structure Interaction of a High-Rise Building Resting over a Finned Pile Mat. Infrastructures.7(10). 2022
    5. Cacciola, P., M.G. Espinosa, and A. Tombari, Vibration control of piled-structures through structure-soil-structure-interaction. Soil Dynamics and Earthquake Engineering. 77: p. 47-57. 2015
    6. Çelebi, E. and O. Kırtel, Non-linear 2-D FE modeling for prediction of screening performance of thin-walled trench barriers in mitigation of train-induced ground vibrations. Construction and Building Materials.42: p. 122-131. 2013
    7. Chen, Q., et al., New Technique for Ground Vibration Mitigation by Horizontally Buried Hollow Pipes. International Journal of Geomechanics. 21(7). 2021
    8. Cheng, Z. and Z. Shi, Novel composite periodic structures with attenuation zones. Engineering Structures. 56: p. 1271-1282. 2013
    9. Colombi, A., et al., Forests as a natural seismic metamaterial: Rayleigh wave bandgaps induced by local resonances. Sci Rep. 6: p. 19238. 2016
    10. Dario A. Gasparini, E.V., SIMQKE: A program for artificial motion generation. User's manual and documentation. M.I.T. Dept. of Civil Engineering Cambridge, MA 1976.
    11. Das, B., R. Saha, and S. Haldar, Effect of in-situ variability of soil on seismic design of piled raft supported structure incorporating dynamic soil-structure-interaction. Soil Dynamics and Earthquake Engineering. 13684: p. 251-268. 2016
    12. Ekanayake, S.D., D.S. Liyanapathirana, and C.J. Leo, Attenuation of ground vibrations using in-filled wave barriers. Soil Dynamics and Earthquake Engineering. 67: p. 290-300. 2014
    13. Feng, S.-J., et al., Effects of water table on ground-borne vibration screening effectiveness by using open trenches. Soil Dynamics and Earthquake Engineering. 131. 2020
    14. Gao, G., et al., Field measurement and FE prediction of vibration reduction due to pile-raft foundation for high-tech workshop. Soil Dynamics and Earthquake Engineering. 101: p. 264-268. 2017
    15. Gao, G., et al., 3D analysis of in-filled trench as passive barriers for ground vibration isolation. Science in China Series G: Physics, Mechanics and Astronomy. 51(10): p. 1573-1585. 2008
    16. Gao, L., et al., Surface wave attenuation by periodic hollow steel trenches with Bragg band gap and local resonance band gap.Construction and Building Materials. 356. 2022
    17. Ghimire, A., et al., Determination of Mohr–Coulomb failure envelope, mechanical properties and UPV of commercial cement-lime mortar.Materials and Structures. 55(4). 2022
    18. Gordon, C.G. Generic vibration criteria for vibration-sensitive equipment. in Optomechanical Engineering and Vibration Control. 1999.
    19. Higdon, R.L., Absorbing boundary conditions for acoustic and elastic waves in stratified media. Journal of Computational Physics. 101(2): p. 386-418. 1992
    20. Higdon, R.L., Numerical Absorbing Boundary Conditions for the Wave Equation. Mathematics of Computation. 49(179): p. 65-90. 1987
    21. Higdon, R.L., Radiation Boundary Conditions for Elastic Wave Propagation. SIAM Journal on Numerical Analysis. 27(4): p. 831-869. 1990
    22. Hong, X.-J., S. Zhu, and Y.-L. Xu, Three-dimensional vibration control of high-tech facilities against earthquakes and microvibration using hybrid platform. Earthquake Engineering & Structural Dynamics. p. n/a-n/a. 2009
    23. Huang, J., W. Liu, and Z. Shi, Surface-wave attenuation zone of layered 137periodic structures and feasible application in ground vibration reduction. Construction and Building Materials. 141: p. 1-11. 2017
    24. Huang, S.-K., et al., Extracting ground motion characteristics of distant earthquakes for mitigating displacement-sensitive equipment. Journal of Low Frequency Noise, Vibration and Active Control. 37(4): p. 859-880. 2018
    25. Idriss, I.M., et al., User's Manual for Shake91: A Computer Program for Conducting Equivalent Linear Seismic Response Analyses of Horizontally Layered Soil Deposits. Center for Geotechnical Modeling, Department of Civil and Environmental Engineering, University of California, Davis. 1992
    26. Ju, S.-H. and S.-H. Ni, Determining Rayleigh damping parameters of soils for finite element analysis. International Journal for Numerical and Analytical Methods in Geomechanics. 31(10): p. 1239-1255. 2007
    27. Ju, S.-H., C.-C. Yuantien, and W.-K. Hsieh, Study of Lead Rubber Bearings for Vibration Reduction in High-Tech Factories. Applied Sciences. 10(4). 2020
    28. Ju, S. and Y.-M. Wang, Time‐dependent absorbing boundary conditions for elastic wave propagation. International Journal for Numerical Methods in Engineering. 50: p. 2159-2174. 2001
    29. Ju, S.H., Finite element analysis of structure-borne vibration from high-speed train. Soil Dynamics and Earthquake Engineering. 27(3): p. 259-273. 2007
    30. Ju, S.H. and H.H. Kuo, Experimental and Numerical Study of WindInduced Vibration in High-Tech Factories. Journal of Performance of Constructed Facilities. 34(3). 2020
    31. Ju, S.H., et al., Investigation of vibration induced by moving cranes in high-tech factories. Journal of Low Frequency Noise Vibration and Active Control. 39(1): p. 84-97. 2020
    32. Ju, S.H. and H.C. Li, 3D Analyses of Open Trench Barriers Filled with Water. JOURNAL OF GEOTECHNICAL AND GEOENVIRONMENTAL ENGINEERING. 137(11): p. 1114-1120. 2011
    33. Ju, S.H. and H.T. Lin, Reduction of vibrations due to foundation slabs.Journal of Geotechnical and Geoenvironmental Engineering. 132(4): p. 138511-520. 2006
    34. Kim, H.-S. and J.-W. Kang, Smart platform for microvibration control of high-tech industry facilities. International Journal of Steel Structures. 17(1): p. 155-164. 2017
    35. Koketsu, K. and H. Miyake, A seismological overview of long-period ground motion. Journal of Seismology. 12(2): p. 133-143. 2008
    36. Kramer, S.L., Geotechnical Earthquake Engineering. Pearson. 2014
    37. Krylov, V.V., Control of Traffic-Induced Ground Vibrations by Placing Heavy Masses on the Ground Surface. Journal of Low Frequency Noise, Vibration and Active Control. 26(4): p. 311-321. 2007
    38. Løkke, A. and A.K. Chopra, Direct finite element method for nonlinear earthquake analysis of 3-dimensional semi-unbounded dam-waterfoundation rock systems. Earthquake Engineering & Structural Dynamics. 47(5): p. 1309-1328. 2018
    39. Lee, C.-L., Y.-P. Wang, and R.K.L. Su, A study on AGV-induced floor micro-vibration in TFT-LCD high-technology fabs. Structural Control and Health Monitoring. 19(3): p. 451-471. 2012
    40. Liyanapathirana, D.S. and S.D. Ekanayake, Application of EPS geofoam in attenuating ground vibrations during vibratory pile driving.Geotextiles and Geomembranes. 44(1): p. 59-69. 2016
    41. Majumder, M. and P. Ghosh, Intermittent geofoam in-filled trench for vibration screening considering soil non-linearity. KSCE Journal of Civil Engineering. 20(6): p. 2308-2318. 2015
    42. Mandal, P. and S.N. Somala, Functionally Graded Materials Pile Structure for Seismic Noise Cancellation. International Journal of Geomechanics. 22(10). 2022
    43. Miller, G.F. and H. Pursey, ON THE PARTITION OF ENERGY BETWEEN ELASTIC WAVES IN A SEMI-INFINITE SOLID.PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES. 233(1192): p. 55-69. 1955
    44. Motoyama, H., et al., Development of a general‐purpose parallel finite element method for analyzing earthquake engineering problems. Earthquake Engineering & Structural Dynamics. 50(15): p. 4180-4198. 2021
    45. Mousavi-Rahimi, M., J.A. Zakeri, and M. Esmaeili, Effect of Foundation Geometry and Structural Properties of Buildings on Railway-Induced Vibration: An Experimental Modeling. Buildings. 12(5). 2022
    46. Ni, A. and Z. Shi, Broadband wave attenuation and topological transport in novel periodic pile barriers. Engineering Structures. 262. 2022
    47. Pu, X. and Z. Shi, Periodic pile barriers for Rayleigh wave isolation in a poroelastic half-space. Soil Dynamics and Earthquake Engineering. 121: p. 75-86. 2019
    48. Pu, X., Z. Shi, and H. Xiang, Feasibility of ambient vibration screening by periodic geofoam-filled trenches. Soil Dynamics and Earthquake Engineering. 104: p. 228-235. 2018
    49. Schmidt, R.H., Ultra-precision engineering in lithographic exposure equipment for the semiconductor industry. Philos Trans A Math Phys Eng Sci. 370(1973): p. 3950-72. 2012
    50. Schnabel, P.B., SHAKE - A computer program for earthquake analysis of horizontally layered sites. Earthquake Engineering Research Center. Report No. EERC 72-12. 1972
    51. Shih, M.-H., W.-P. Sung, and C.-L. Chen, Vibration control and shock absorption techniques for Hi-Tech manufacturing plants. The Structural Design of Tall and Special Buildings. 21(7): p. 505-523. 2012
    52. Sitharam, T.G., R. Sebastian, and F. Fazil, Vibration isolation of buildings housed with sensitive equipment using open trenches – Case study and numerical simulations. Soil Dynamics and Earthquake Engineering. 115: p. 344-351. 2018
    53. Soyoz, S., et al., Ambient and Forced Vibration Testing of a Reinforced Concrete Building before and after Its Seismic Retrofitting. Journal of Structural Engineering. 139(10): p. 1741-1752. 2013
    54. Tombari, A., et al., Vibration control of a cluster of buildings through the Vibrating Barrier. Mechanical Systems and Signal Processing. 101: p. 219-236. 2018
    55. Toygar, O. and D. Ulgen, A full-scale field study on mitigation of environmental ground vibrations by using open trenches. Building and Environment. 203. 2021
    56. Turan, A., D. Hafez, and M.H. El Naggar, The performance of inclined secant micro-pile walls as active vibration barriers. Soil Dynamics and Earthquake Engineering. 55: p. 225-232. 2013
    57. Ulgen, D., O.L. Ertugrul, and M.Y. Ozkan, Measurement of ground borne vibrations for foundation design and vibration isolation of a high-precision instrument. Measurement. 93: p. 385-396. 2016
    58. Van Nguyen, Q., B. Fatahi, and A.S. Hokmabadi, Influence of Size and Load-Bearing Mechanism of Piles on Seismic Performance of Buildings Considering Soil–Pile–Structure Interaction. International Journal of Geomechanics. 17(7). 2017
    59. Venkateswarlu, H. and A. Hegde, Effect of Influencing Parameters on the Vibration Isolation Efficacy of Geocell Reinforced Soil Beds.International Journal of Geosynthetics and Ground Engineering. 6(2). 2020
    60. Vladimir, S., Numerical Estimation of Precision Equipment Vibration Isolation System. Procedia Engineering. 176: p. 363-370. 2017
    61. Wang, X., et al., Periodic in-filled pipes embedded in semi-infinite space as seismic metamaterials for filtering ultra-low-frequency surface waves. Construction and Building Materials. 313. 2021
    62. Wu, L. and Z. Shi, The effect of viscosity of saturated soil on the surface wave attenuation by periodic in-filled trench. Soil Dynamics and Earthquake Engineering. 156. 2022
    63. Xu, P., Analysis of Isolation Effectiveness of Shear Waves by a Row of Hollow Pipe Piles in Saturated Soils. Transport in Porous Media. 120(2): p. 415-432. 2017
    64. Xu, Y.L. and A.X. Guo, Microvibration control of coupled high tech equipment-building systems in vertical direction. International Journal of Solids and Structures. 43(21): p. 6521-6534. 2006
    65. Xu, Y.L. and B. Li, Hybrid platform for high-tech equipment protection against earthquake and microvibration. Earthquake Engineering & Structural Dynamics. 35(8): p. 943-967. 2006
    66. Xu, Y.L., H.J. Liu, and Z.C. Yang, Hybrid platform for vibration control of high-tech equipment in buildings subject to ground motion. Part 1: experiment. Earthquake Engineering & Structural Dynamics. 32(8): p. 1185-1200. 2003
    67. Xu, Y.L., et al., Microvibration control platform for high technology facilities subject to traffic-induced ground motion. Engineering Structures. 25(8): p. 1069-1082. 2003
    68. Yang, Z.C. and Y.L. Xu, Active Platform for Suppressing Train-Induced Microvibration of High Tech Facilities. Key Engineering Materials. 243-244: p. 123-128. 2003
    69. Yang, Z.C., et al., Hybrid platform for vibration control of high-tech equipment in buildings subject to ground motion. Part 2: analysis.Earthquake Engineering & Structural Dynamics. 32(8): p. 1201-1215. 2003
    70. Ye, L., et al., Distributed TLDs in RC floors and their vibration reduction efficiency. Earthquake Engineering and Engineering Vibration. 7(1): p. 107-112. 2008
    71. Yu, F., et al., A modified mix design method for pervious concrete based on Mohr-Coulomb failure criterion. Construction and Building Materials. 269. 2021
    72. Zhang, L., S.H. Goh, and H. Liu, Seismic response of pile-raft-clay system subjected to a long-duration earthquake: centrifuge test and finite element analysis. Soil Dynamics and Earthquake Engineering. 92: p. 488-502. 2017
    73. Zhao, C., et al., Theoretical and Numerical Study on the Pile Barrier in Attenuating Seismic Surface Waves. Buildings. 12(10). 2022
    74. 陳錦村, 低頻振動之頻譜分析及其對高科技廠房精密儀器之影響,土木工程學研究所. 國立臺灣大學. p. 1-118. 2020

    下載圖示 校內：立即公開
    校外：立即公開
    QR CODE