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研究生： 李俊逸
Li, Jyun-Yi
論文名稱： 以六元Fe-Ni-Mn-Cr-Mg-Cu尖晶石高熵氧化物為光吸收層製造超寬頻吸收(紫外光-可見光-近紅外光)之光電感測器
Ultra-broadband (UV-VIS-NIR) photodetector based on six-element spinel high entropy oxide absorber layer
指導教授： 丁志明
Ting, Jyh-Ming
學位類別： 碩士
Master
系所名稱： 工學院 - 材料科學及工程學系
Department of Materials Science and Engineering
論文出版年： 2023
畢業學年度： 111
語文別： 中文
論文頁數： 74
中文關鍵詞： 高熵氧化物 、多元素 、光電感測器 、寬帶 、紫外光-可見光-紅外光
外文關鍵詞： High entropy oxide, multi-elements, photodetector, broadband, UV-VIS-NIR
相關次數： 點閱：133  下載：0 
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    • 光電感測器是一種將光學訊號轉換為電訊號的光電元件，在日常生活中有十分廣泛的應用，如：通訊、衛星、遠端遙控、醫學技術等領域。光電感測器通常會因為特定的工作波段而應用在不同領域，從紫外光（10 nm至400 nm）、可見光（400 nm至760 nm）、紅外光（760 nm至1 mm）到太赫茲（terahertz, 0.1 THz至10THz）。傳統上光電感測器所使用的矽（Si）及砷化鎵銦（InGaAs）等材料除了工作波段的限制外，仍面臨繁雜工藝製程及常溫下之高雜訊暗電流等問題。因此，近年來有愈來愈多學者致力於研究寬頻帶光吸收層材料。若能開發新穎的寬頻帶光吸收層材料，以一種裝置取代先前必須以多個裝置才能達成的用途，將會對民生及工業應用產生尤為關鍵的影響。
    本研究中以水熱法合成新穎的高熵氧化物（High Entropy Oxide, HEO）光吸收材料。此 HEO 具有 Fe、Ni、Mn、Cr、Mg、Cu 六種金屬元素。合成所得之 HEO 光吸收材料已確認具有前所未有的寬帶吸收，吸收範圍為 310到1400 nm 。此外，對以此 HEO 組成 Ag/HEO/n-Si 結構的光電感測器的性能進行量測。在各種光波長的照射下，光電感測器表現出從 365到1050 nm 的顯著寬波長範圍之光響應，產生大約 1 mA/cm2 的寬光譜光電流密度，高達 3.5 A/W (850 nm) 之光響應，以及超過 700% (850 nm) 的外部量子效率（EQE），優於所有已被發表以氧化物為基底的光電感測器。此光電感測器的優異性能歸因於含有氧空位的 HEO 具有出色的吸光度和 EQE。此外，包含磨損測試、耐高溫性、耐酸鹼性和開關循環等在內的多項測試表明，此以HEO為基底的光電感測器具有優異的可靠性。

    Novel light absorber material of high entropy oxide (HEO) has been synthesized using hydrothermal method. The HEO has six metals of Fe, Ni, Mn, Cr, Mg, and Cu. The obtained HEO light absorber is demonstrated to show unprecedent broadband absorption, ranging from 310 to 1400 nm. Photodetector having a structure of Ag/HEO/n-Si has been evaluated for its performance. Under the illumination of various light wavelengths, the photodetector exhibits a remarkable wide range photoresponse from 365 to 1050 nm, giving wide-spectrum photocurrent densities in the order of 1 mA/cm2, a responsibility as high as 3.5 A/W (850 nm), and an external quantum efficiency (EQE) more than 700% (850 nm), outperforming all the reported oxide-based photodetectors. The superior device performance is attributed to the excellent light absorbance and EQE of the oxygen vacancy containing HEO. Moreover, a number of tests, including abrasion test, temperature endurance, acidic resistance, and on-off switching cycling, show the excellent reliability of the obtained HEO-based photodetector.

    摘要 I 總目錄 XVIII 圖目錄 XXI 表目錄 XXIV 第一章 緒論 1 1.1 前言 1 1.2 研究背景 2 1.3 研究動機與目的 5 第二章 理論基礎與文獻回顧 6 2.1 高熵氧化物的起源及光電應用 6 2.1.1 高熵特性 6 2.1.2 高熵氧化物 7 2.1.3 高熵氧化物之光學特性 9 2.2 光電感測器種類介紹 15 2.2.1 光電導體 15 2.2.2 P-N光電二極體 17 2.2.3 P-I-N光電二極體 19 2.2.4 累增光電二極體 20 2.3 光電感測器之效率指數 21 2.3.1 暗電流 21 2.3.2 開關電流比 21 2.3.3 光響應度 22 2.3.4 偵測率 22 2.3.5 外部量子效率 23 2.4 寬頻帶吸收之光電感測器設計 24 第三章 實驗流程與設備 28 3.1 實驗流程圖 28 3.2 實驗藥品及材料 29 3.3 實驗儀器 30 3.3.1 精密電子天秤 30 3.3.2 電磁加熱攪拌器 30 3.3.3 熱風循環烘箱 30 3.3.4 離心機 30 3.3.5 真空烘箱 30 3.3.6 箱型高溫爐 31 3.3.7 超音波震盪機 31 3.3.8 旋轉塗佈機 31 3.3.9 電子束蒸鍍系統 31 3.4 實驗步驟 32 3.4.1 高熵氧化物粉末製備 32 3.4.2 矽基板製備 33 3.4.3 玻璃基板製備 33 3.4.4 製備高熵氧化物薄膜 33 3.4.5 製備光電感測器元件 33 3.5 分析量測儀器 34 3.5.1 掃描式電子顯微鏡 34 3.5.2 感應耦合電漿質譜分析儀 34 3.5.3 X射線繞射儀 35 3.5.4 X射線光電子能譜儀 35 3.5.5 高解析穿透式電子顯微鏡 36 3.5.6 紫外光-可見光-近紅外光分光光譜儀 36 3.5.7 光電量子轉換效率 37 3.5.8 光電感測器表現量測桌上型電腦 37 第四章 結果與討論 38 4.1 材料性質分析 38 4.1.1 表面形貌與粒徑分布 38 4.1.2 不同元素之比例分析 40 4.1.3 晶體結構分析 42 4.1.4 XPS表面電化學分析 45 4.1.5 紫外光-可見光-近紅外光吸收光譜 49 4.2 光電感測器表現分析 51 4.2.1 外部量子效率 51 4.2.2 瞬時光響應電流 53 4.2.3 光響應冪定律 56 4.2.4 光電感測器效率指數 57 4.3 光電感測器元件可靠度測試 64 4.3.1 負重拖行 64 4.3.2 耐熱性測試 65 4.3.3 酸鹼度測試 66 4.3.4 長期瞬時開關循環 67 第五章 結論 68 參考文獻 69

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