由於具有極佳抗氧化性及抗黏著性，氮化鉻是一個重要保護層材料。然而，由於它硬度比較低所以限制了氮化鉻無法廣泛地使用在工業界應用上。Cr-Ag-N系及Cr-W-N系鍍膜利用封閉式非平衡磁控濺鍍法被覆於矽晶片、高速鋼及微鑽針上；探討不同銀含量及鎢含量對於氮化鉻鍍膜性質之影響。首先以微硬度機、刮痕試驗機、SRV磨耗試驗機及Pin-on-diak試驗機對於鍍膜之基本性質有所了解，再進一步實際利用印刷電路板鑽削來探討其磨潤行為。
實驗結果顯示：Cr-Ag-N系鍍膜隨著銀含量增加硬度值下降，Cr-W-N系鍍膜添加少量鎢時，硬度值急遽增加。而附著性Cr-Ag-N系改變不大，Cr-W-N系鍍膜隨著鎢含量增加而變差。在SRV磨耗試驗與Pin-on-disk磨耗試驗中，Cr-Ag-N系鍍膜以銀含量11.65at.%鍍膜耐磨性最好，而Cr-W-N系鍍膜則以鎢含量6.85at.%鍍膜最好。耐熱性方面，Cr-Ag-N系鍍膜400℃熱處理硬度值有些許提升，Cr-W-N系鍍膜硬度還是維持高硬度情形，但耐氧化性Cr-Ag-N系鍍膜較Cr-W-N系鍍膜差。
在PCB鑽削實驗中，Cr-Ag-N系鍍膜以Ag05鍍膜(銀含量11.65at.%)鑽針表現最好，可讓鑽針壽命提升五倍。Cr-W-N系鍍膜以W10鍍膜(鎢含量6.85at.%)鑽針表現最佳，可提升鑽針壽命四倍。在車削試驗結果顯示W10鍍膜(鎢含量6.85At.%)要比Ag05鍍膜(銀含量11.65at.%)較適用於車刀上。

Due to its excellent oxidation and adhesive resistance, CrN is a prominent material for protective coatings. Still, its comparatively low hardness prevents CrN from being widely used in industrial applications. The Cr-Ag-N coatings and Cr-W-N coatings were deposited on silicon, high speed steel substrates and micron drills by the closed field unbalances magnetron sputtering method. The effects of various tungsten and silver in CrN films were investigated. At first, in order to understand basic properties of the Cr-Ag-N coatings and Cr-W-N coatings, the experiments of micro-hardness tester, scratch tester, SRV apparatus and Pin-on-disk tester were employed. Finally, in field PCB through hole drilling was used to examine the tribological properties of the coated micron drills.
The experiment results are shown as following：The hardness of Cr-Ag-N coatings decreased with increasing silver contents. The Cr-W-N coatings show a steep increase in hardness with only small addition of tungsten. The adherences of the Cr-Ag-N coatings had no distinct changes, but the adherence of the Cr-W-N coatings become poor with increasing tungsten. Among the SRV tester and Pin-on-disk tester, the wear-resistance of the Cr-Ag-N coatings was the best when silver contents 11.65at.%. When tungsten contents were 6.85at.%, the coating had best tribological performance. In heat-resistance, the hardness of the Cr-Ag-N coatings at temperature of 400℃ had a little increase. The hardness of the Cr-W-N coatings keep high at temperature of 400℃.But the Cr-Ag-N coatings in oxidation resistance was poor when compared with that of the Cr-W-N coatings.
In the PCB drilling tests, Ag05 of the Cr-Ag-N coatings with 11.65at.% silver contents improved tool life 5 times than uncoated ones. W10 coating with 6.85at.% tungsten contents improved 4 times. In the turning test, W10 coating was more suitable for turning tool than Ag05 coating.

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