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研究生： 張沅翰
Jhang, Yuan-Han
論文名稱： 以碳化鎢底材被覆多層膜類鑽碳鍍層之磨潤性能研究
Tribological performance of multilayer DLC coatings deposited on tungsten carbide substrate
指導教授： 蘇演良
Su, Yean-Liang
學位類別： 碩士
Master
系所名稱： 工學院 - 機械工程學系
Department of Mechanical Engineering
論文出版年： 2012
畢業學年度： 100
語文別： 中文
論文頁數： 233
中文關鍵詞： 磨潤 、類鑽碳 、多層膜
外文關鍵詞： Tribological, Diamond Like Carbon, Multilayer
相關次數： 點閱：77  下載：3 
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    • 本實驗利用非平衡磁控濺鍍系統，濺鍍固體碳靶及鋯靶，被覆含鋯氫類鑽碳膜。實驗鍍膜被覆共分為三階段：第一階段，主要目的為探討改變鋯靶電流對於不同底材下的鍍層影響；第二階段，改變中介層層數來探討多層磨對於磨潤性和機械性質的影響，以掃瞄式電子顯微鏡(SEM)與能譜儀(EDS)對鍍層斷面及磨耗面分析；第三階段，主要目的是因第二階段硬度太低所做的調整爐次，設計爐次提高硬度與磨耗壽命。第一階段鍍膜被覆得知：鍍膜硬度會隨著靶電流的升高至0.4 A後而下降；隨著底材的不同，則會改變鍍膜的附著性與磨耗性質，經SRV磨耗試驗證電流為0.4 A時且沉積在碳化鎢底材下，鍍膜有最高的抗磨耗性。經第一階段鍍膜被覆我們得到靶電流在0.4 A時有較好的機械性質，第二階段以碳化鎢底材來被覆多層膜中介層，為了使之磨潤性更好，在第二階段濺鍍被覆，鍍膜電流皆固定0.4 A鍍膜參數值，段，改變中介層層數，分別被覆軟層與硬層，而在六層中介層有最好的磨潤性太多則不好，由於第二階段鍍層硬度因為中介層太多層而導致硬度下降，所以調整了幾個爐次為了提高硬度，而是每一層分層不在是以中介層分層為主，換過新靶材後硬度明顯提高，且隨著層數由兩層至四層到八層硬度持續增加，且在八層時有較低的拉曼積分值，表示其有最好的硬度值 。

    The main purpose of this study is to research the tribological properties and mechanical properties of a-C:H:Zr coatings prepared by sputtering graphite and Zirconium targets with unbalanced magnetron sputtering system (UBMS). It contains third stages of research in the study.The objective is influence of Zr target current on the properties of coatings in first stage. With the increase of the Zirconium targets current to get various Zirconium quantities of coatings in second and third stage, After SRV tribological test we verify that the coating prepared under the 0.4 A current has highest wear resistance and adherent properties.
    In second stage, we select to current of 0.4 A based on first stage. Thus, although a DLC has excellent properties a practical problem with them is that stress increases with the increase in hardness.When the adhesiveness between a film and a substrate is not so good, a film can partially ablate. An improvement of the adhesiveness with a substrate has been studied multilayer in the interlayer.we change the multilayer to interlayer,has one multilayer to four multilayer.It has been found two multilayer in the interlayer, improves the adhesion between the coating and substrate.
    Finally, we follow the second stage, discover the hardness also low. We have to improve the hardness, it design the multilayer films. It contain hard and soft layer in the multilayer films. It has been found eight multilayers, improves the hardness and a characteristic tribological.

    考試合格證明書 I 摘要 II Abstract III 誌謝 IV 總目錄 V 表目錄 VIII 圖目錄 IX 附錄 XIII 第一章 緒論 1 1-1 前言 1 1-2 研究動機 2 第二章 理論基礎與文獻回顧 4 2-1 類鑽碳基本性值 4 2-2 DLC膜製程方法 6 2-3 利用非平衡磁控濺鍍法製DLC膜的特性 7 2-4 奈米壓痕分析於薄膜上的應用 8 2-5 赫茲接觸應力在磨耗方面之應用 10 2-6 拉曼光譜分析在類鑽碳膜上的應用 12 2-7 XPS分析在類鑽碳膜上的應用 13 2-8 AES分析在類鑽碳膜上的應用 14 2-9 磨耗機構原理 16 第三章 實驗方法與步驟 19 3-1 實驗目的 19 3-2 實驗流程 19 3-3 鍍膜製作與實驗方法 20 3-3-1 濺鍍參數與鍍膜安排 20 3-3-2 濺鍍系統與靶材配置 20 3-3-3 鍍膜顯微結構分析 20 3-3-4 鍍膜成分與元素分佈分析 21 3-3-5 硬度實驗 22 3-3-5-1 微硬度試驗 22 3-3-5-2 奈米硬度試驗 22 3-3-6 附著性實驗 23 3-3-6-1壓痕實驗 23 3-3-6-2刮痕實驗 23 3-3-7 磨耗實驗 24 3-3-7-1 SRV往復式磨耗試驗 24 3-3-8 乾車削實驗 25 3-4 實驗設備 25 第四章 實驗結果與討論 28 4-1 第一階段鍍膜基本性質 28 4-1-1拉曼光譜分析、鍍層結晶構造 28 4-1-2壓痕量測試驗 30 4-1-2-1 努氏硬度 30 4-1-2-2 奈米硬度 31 4-1-3 第一階段鍍膜之附著性 32 4-1-3-1 壓痕試驗 32 4-1-3-2 刮痕試驗 32 4-1-4 第一階段鍍膜SRV磨潤性能測試 33 4-1-4-1 點磨耗試驗 33 4-1-4-2 點磨耗機構討論 34 4-1-4-3 線磨耗試驗 36 4-1-4-4 線磨耗機構討論 39 4-1-4-5 點磨耗破壞五階段 45 4-1-5第一階段鍍膜實驗結果整理與討論 47 4-2 第二階段鍍膜基本性質 49 4-2-1 第二階段組織微結構分析 49 4-2-1-1拉曼光譜分析 49 4-2-1-2薄膜X光繞射分析 50 4-2-2 第二階段壓痕量測試驗 50 4-2-2-1 努氏硬度 50 4-2-2-2 奈米硬度 50 4-2-3 薄膜附著性 51 4-2-3-1壓痕試驗 51 4-2-4 第二階段鍍層SRV試驗 51 4-2-4-1第二階段鍍層點磨耗試驗 51 4-2-4-2第二階段點磨耗機構討論 52 4-2-4-3第二階段鍍層線磨耗試驗 53 4-2-4-4第二階段線磨耗機構討論 54 4-2-5 第二階段鍍膜實驗結果整理與討論 58 4-3 第三階段鍍膜基本性質 59 4-3-1 第三階段組織微結構分析 59 4-3-1-1拉曼光譜分析 59 4-3-1-2薄膜X光繞射分析 60 4-3-2 第三階段壓痕量測試驗 60 4-3-2-1 努氏硬度 60 4-3-2-2 奈米硬度 60 4-3-3 薄膜附著性 61 4-3-3-1壓痕試驗 61 4-3-4 第三階段鍍層SRV試驗 61 4-3-4-1第三階段鍍層點磨耗試驗 61 4-3-4-2第三階段點磨耗機構討論 62 4-3-4-3第三階段鍍層線磨耗試驗 64 4-3-4-4第三階段線磨耗機構討論 65 4-3-5 第三階段鍍膜實驗結果整理與討論 68 4-4 各階段特性討論 70 4-4-1 附著性 70 4-4-1-1 硬度與楊氏膜數 70 4-4-1-2 NIT比較 71 4-4-1-3 赫茲應力 71 4-4-2 點磨與線磨差異 72 4-4-3 線磨耗荷重變化影響 73 4-4-4 鉻鋼球與氮化矽球差異 74 4-5 車削磨耗試驗 75 4-6 沖壓模具試驗 75 第五章 結論 78 5-1 結論 78 5-2 實驗心得與改進空間 79 第六章 參考文獻 80 自述 233

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