隨著攜帶式裝置於近年的蓬勃發展，越來越多電子產品需要小型馬達來運作。在小型化的裝置需求下，超音波馬達的重要性已與日俱增。本研究主要探討兩種以共振模式驅動的超音波馬達，分別為彎張式與蠕動式超音波馬達。彎張式超音波馬達為共振驅動馬達裡具最大出力與速度的類型，馬達以積層式壓電致動器運作，所以通常僅以低電壓驅動。若需提升馬達出力與速度，增加驅動電壓為常見的方式，然而對彎張式超音波馬達而言，加大電壓可能會導致積層式壓電致動器退極化。因此本研究提出星型彎張超音波馬達設計，可避免彎張超音波馬達由於提高驅動電壓導致壓電致動器退極化而損壞的問題。蠕動式超音波馬達為現有共振驅動馬達裡體積最小的類型，為了更容易內嵌於應用裝置內，除了馬達本體外，其驅動電路亦需要小型化。因此本研究提出可單相驅動的馬達設計，令驅動電路可進一步簡化，達到縮減體積的目的。為了降低馬達製作成本，本研究以常見的壓電陶瓷片製作單相驅動馬達，於是高驅動電壓是必需的。但驅動電路內使用高頻變壓器會令電路體積過大，故本研究以壓電式變壓器取代高頻變壓器，並成功驅動單相馬達。馬達以此驅動架構進行定位控制，藉由合適地設計比例控制器，馬達可控制定位的穩態誤差於6微米下。

This dissertation develops two types of novel piezoelectric vibrators for ultrasonic motors. The flextensional ultrasonic motors can provide high thrust force and speed, but there is a risk of internal multilayer piezoelectric ceramic depolarization when the higher voltage is applied. Thus the star-shaped flextensional stator is proposed to increase the operating voltage range of the flextensional ultrasonic motors. The squiggle ultrasonic motors have compact size in motor body, but the required two driving voltage sources causes their driving circuit larger compared with the motor body. For the purpose of reducing driving circuit volume, a single phase squiggle ultrasonic motor is proposed in this study.

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