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研究生: 林哲弘
Lin, Che-Hung
論文名稱: 高速記憶體晶圓測試之線路設計
High-Speed Trace Design for Memory Probing Applications
指導教授: 王永和
Wang, Yeong-Her
洪茂峰
Houng, Mau-Phon
劉安鴻
Liu, An-Hung
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 微電子工程研究所
Institute of Microelectronics
論文出版年: 2003
畢業學年度: 91
語文別: 中文
論文頁數: 63
中文關鍵詞: 串音聚亞醯胺
外文關鍵詞: polyimide, crosstalk
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  • 目前記憶體的工作時脈速度逐漸升高,以DDR400為例,已到達200MHz,所以製作晶圓測試探針卡公司,無不朝著高速高頻的方向去設計,但同時考量能平行測試晶片數目要越多越好的情況,需增加探針卡上的導線數目,使的探針卡操作在高速的時脈速度下,所帶來的訊號干擾更加嚴重。
    在本論文中,以500MHz的高速數位訊號為工作頻率,在矽基板上設計傳輸線,在控制訊號干擾的情況下,增加此線路晶片上的導線數目。製作過程先以軟體IE3D決定導線的規格,並模擬導線間的串音(Crosstalk)干擾,接著將結構製作在覆蓋以聚亞醯胺(polyimide)為介電層的矽(SiO2/Si)基板上,而後再將導線製作在聚亞醯胺(polyimide)上或嵌入其內的方式,並探討此設計的可行性。

    Presently, the clock rate of memory has gotten higher, for instance, that of DDR400 has reached 200MHz. As a result, all the companies that manufacture probe cards of wafer tests have made efforts to design new products which can be tasted under high speed and high frequency. However, a greater number of chips of parallel tests on the probe card might cause more serious interferences to the signals of traces at the same time.
    The thesis proposes the design of traces on silicon substrates, working on the digital signal of 500MHz. Then, in the condition of controlling signal interferences, we try to increase the number of traces in hopes of increasing the number of chips of parallel tests. During the process, firstly, the trace spec. are determined by IE3D. and further the cross talk between transmission lines is simulated. Moreover, the design is demonstrated on the silicon substrates covered with polyimide as dielectric layers, and then traces either processed or embedded the on polyimide. In the end, traces on this previous structure are measured with Time Domain Refectometry. By comparing measure results with simulations, we discuss the feasibility of the design.

    中文摘要…………………………………………………………I 英文摘要…………………………………………………………II 誌謝………………………………………………………………III 目錄………………………………………………………………IV 表目錄……………………………………………………………VI 圖目錄……………………………………………………………VI 目錄 第一章序論………………………………………………………1 1-1 研究背景……………………………………………………1 1-2 研究動機……………………………………………………7 第二章傳輸線基礎理論…………………………………………9 2-1傳輸線理論……………………………………………………9 2-2無損耗傳輸線…………………………………………………12 2-3低損耗傳輸線…………………………………………………13 2-4探針線路晶片傳輸信號線的結構……………………………15 2-5傳輸線的衰減…………………………………………………19 第三章探針線路晶片之傳輸線設計………………………………28 3-1 電磁模擬軟體IE3D……………………………………………28 3-2 矽基板上傳輸線………………………………………………28 3-3 阻抗匹配考量…………………………………………………30 3-4 串音干擾分析…………………………………………………33 第四章模擬結果……………………………………………………40 4-1 第一種結構導線模擬…………………………………………42 4-2 第二種結構導線模擬…………………………………………43 4-3 第二種結構導線模擬…………………………………………44 4-4 第二種結構導線模擬…………………………………………46 4-5 第二種結構導線模擬…………………………………………49 第五章製作過程……………………………………………………51 5-1 基板與光罩選擇………………………………………………51 5-2 製作過程………………………………………………………51 第六章結論…………………………………………………………61 參考文獻……………………………………………………………62

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