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研究生: 黃楷文
Huang, Kai-Wen
論文名稱: 研究氧化鉿鋯鐵電電容在低溫環境下喚醒效應和耐久性
Exploring the Wake-Up Effect and Endurance Characteristics of Ferroelectric Capacitors at Low Temperatures: Insights from HZO Materials
指導教授: 高國興
Kao, Kuo Hsing
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 奈米積體電路工程碩士博士學位學程
MS Degree/Ph.D. Program on Nano-Integrated-Circuit Engineering
論文出版年: 2023
畢業學年度: 112
語文別: 英文
論文頁數: 112
中文關鍵詞: 鐵電電容低溫操作可靠性wake-up 效應保持性耐久性2Pr2Vc
外文關鍵詞: ferroelectric capacitor, low-temperature operation, reliability, wake-up effect, retention, endurance, 2Pr, 2Vc
相關次數: 點閱:50下載:0
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  • 摘要 i Abstract ii Table of Contents iv List of Figures vi Chapter 1    Introduction 1 1-1. Memory Types and Application 1 1-2. Ferroelectric Materials 3 1-2-1. Ferroelectricity 3 1-2-2. Formation Mechanism of HfZrO2 Ferroelectrics 7 1-2-3. Hafnium Oxide (HfO2), Hafnium Zirconium Oxide (HZO) and Yttrium (Y) 10 1-2-4. Characterization of Fe Capacitor 13 1-3.      Research Motivation 15 Chapter 2    Ferroelectric Capacitor and Measurement Method 17 2-1. MFM Fe Capacitor Structures 17 2-1-1. Devices Comparison 17 2-1-2. Device Layer Stack (MFM) 18 2-1-3. Layout 18 2-2. Reliability Mechanisms in Ferroelectric 19 2-2-1. Wake-up Effect 19 2-2-2. Fatigue 21 2-2-3. Imprint 22 2-2-4. Endurance 24 2-2-5. Retention 25 2-3. Measurement Setup 26 2-4. Capacitors Measurement and Parameter Method 27 2-4-1. Ferroelectric Specific Measurements at Low Temperature 27 2-4-2. PUND Measurement 28 2-4-3. Cycling Pulse Test 30 2-4-4. I-T Curve Measurement 31 2-4-5. Data Extraction (Octave) 32 Chapter 3    Results and Discussion 35 3-1. Wake-up Effect with Different Conditions at Low Temperatures 35 3-2. Endurance Effect at Low Temperatures 41 3-3. 2Pr and 2Vc at Low Temperature 43 Conclusion and Future Work 46 4-1. Conclusion 46 4-2 Future Work 47 Reference 48

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