本論文主要研究Fe成長於Mo(001)階梯表面，藉由STM和RHEED研究其表面形貌和磊晶結構，且利用MOKE和VSM研究其磁異向性之特性。我們發現室溫成長Fe薄膜表面形貌為三維島嶼分佈，與RHEED繞射結果一致，且晶格不匹配度產生的應力使Fe薄膜成長為虛形貌；然而高溫成長Fe薄膜表面形貌為長方形島嶼堆疊，且產生錯位將應力釋放。在磁性方面，發現室溫成長系統有負殘磁的現象，且磁異向性受到階梯所引致的單軸異向性和應力所造成的雙軸異向性兩者的共同影響。高溫成長系統中，發現表面的錯位結構會影響其磁性行為，且應力因錯位結構的釋放，導致應力所引致的磁異向性消失，因此其磁異向性為階梯所引致的單軸磁異向性。

　　We present a combined study of the growth,structure ,and related magnetic anisotropies of epitaxial iron films deposited onto self-assemble stepped Mo(001) surface using reflection high energy electron diffraction, scanning tunneling microscope, magneto-optic kerr effect, and vibrational sample Magnetometer . The film growth of Fe films on Mo(001) at room temperature proceeds in pseudomorphical mode by the formation of three-dimensional partially strained Fe islands. By increasing the growth temperature to 300℃, the mobility of the deposited atoms is sufficient to form flat and rectangular islands. The in-plane magnetic anisotropy of room-temperature-grown films show coexistence of step-induced uniaxial magnetic anisotropy and strain induced biaxial magnetic anisotropy which leads to negative remanence behavior. However, strain induced biaxial magnetic anisotropy and negative remanence disappear for those of high-temperature-grown films due to relief strain by formation of dislocations.

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