| 研究生: |
張頌榮 Chang, Sung-Jung |
|---|---|
| 論文名稱: |
TFT-LCD面板之點線瑕疵自動化檢測系統 Automatic dot and line defects inspection system for TFT-LCD display panels |
| 指導教授: |
陳響亮
Chen, Shiang-Liang |
| 學位類別: |
碩士 Master |
| 系所名稱: |
電機資訊學院 - 製造工程研究所 Institute of Manufacturing Engineering |
| 論文出版年: | 2005 |
| 畢業學年度: | 93 |
| 語文別: | 中文 |
| 論文頁數: | 102 |
| 中文關鍵詞: | 灰階值比對 、面積判別 、點塊自動分析 、型態處理方式 、影像分割 、遮罩技術 、色彩影像處理 、LCM 、TFT-LCD |
| 外文關鍵詞: | Gray-level compare, Area Differentiate, Automatic Blobs Analysis, Morphology process, Image segmentation, Mask technology image, Color image process, LCM, TFT-LCD |
| 相關次數: | 點閱:103 下載:17 |
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現今大多數的面板廠對於後段LCM之TFT-LCD產品缺陷檢測還是依賴人工檢測的方式進行,檢測時會因作業人員的不同及精神狀態而對產品產生不同的判斷標準,而且未來面板尺寸大型化,解析度也漸漸提高,人工檢測勢必造成極大的挑戰。
本篇論文最主要在發展一套自動化瑕疵檢測系統於TFT-LCD面板之點、線瑕疵檢測,整合了色彩影像處理、遮罩技術、影像分割、影像分析及XY龍門型線馬移動平台,在檢測結果分析方面,利用型態處理方式把瑕疵特徵萃取出來,透過點塊自動分析找出其瑕疵位置,再利用面積判別計算其瑕疵大小,最後以灰階值比對的方法與原始圖示做比對驗證,目標以達成自動化檢測及辨識,透過本系統可用於檢測LCM產品出廠前的品質檢驗。
Nowadays, the majority TFT-LCD manufactories still depend on human eyes to inspect the defects in final test. The inspection standard may be changed by different inspectors or their mental conditions. Hence, it becomes a big problem because the future size of panels is going to be large and high resolution.
In this study, an automatic inspection system was developed to inspect dot and line defects. This system was composed of image processing, mask technology, image segmentation, image analysis and a XY table. In the case of final result, this study utilized Morphology process to extract defect features and to find out their location through automatic analysis, and then adopted Area Differentiate to determine the size of defects. Finally, the obtained defects would be contrasted with original pictures by Gray-level compare to achieve high speed inspection and automatic recognition. Hence, this system is suitable for quality testing on LCM products.
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