本文旨在設計與製作一新型三軸微型陀螺儀，藉由結構上的設計，可同時達到三軸向感測並消除耦合效應，且提升驅動頻率與感測模組之頻寬。 本研究利用拉格朗日方程式(Lagrange’s Equation)推導系統之動態方程式，並針對此系統幾項性能指標包括靈敏度(Sensitivity)、品質因子(Quality Factor)與解析度(Resolution)等做初步分析，且配合模擬軟體ANSYS 探討系統之模態，以控制可操作變數，維持陀螺儀於高性能下運作。 此外，配合面型加工技術，改善製程為單一光罩，避免因多次光罩對準而導致嚴重的結構誤差缺陷，以簡化製程並提高重現性，且降低量化生產成本。 最後，利用整合相關雙取樣電路與差動式電路並加以改良設計，以符合本文提出之三軸微型陀螺儀所需的感測電路。 同時在驅動電路方面，主要是利用自動增益控制迴路與鎖相迴路之組合。 並藉由電腦模擬以確認所設計電路之可行性，與討論不同角速度輸入時感測電路之特性。

The purpose of this thesis is to design and fabricate an innovative tri-axis micro-gyroscope. The proposed micro-gyroscope is capable to detect three-dimensional angular motions simultaneously, reduce coupling effect via novel mechanical design, and improve the bandwidth of sense modes. The dynamics of the tri-axis micro-gyroscope is developed by Lagrange’s equation. Several performance indices are discussed, such as sensitivity, quality factor, resolution etc. ANSYS simulation software is employed concurrently to analyze the mode shapes of the system. In addition, merely a single mask with surface micro-machining is utilized to fabricate the micro-structure so that the alignment errors and fabrication defects due to multiple masks can be reduced. Finally, the modification and combination of the correlation double sampling circuit and differential capacitance circuit are applied for sensing signal processing. On the other hand, the driving circuit composed of automatic gain control loop and phase lock loop is used to stabilize the driving force. The feasibility of the proposed circuit is verified by commercial software HSPICE. The efficacy for various angular rates detection is verified.

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