本研究針對三種不同氧化鋅奈米結構，分別為化學氣相沉積法
(CVD)成長之氧化鋅奈米線、化學氣相沉積法(CVD)成長之摻雜銦的
氧化鋅緞帶結構以及水熱法製程(Hydrothermal method)成長之氧化鋅
奈米線進行單根奈米線熱電性質分析，利用電子束微影技術，在電性
量測晶片上製作微加熱器以及特殊電極線路以進行單根奈米線
Seebeck 係數量測，並利用四點量測(four probe measurement)方式量測
單根奈米線之導電率而計算出奈米線之熱電功率因數(thermoelectric
power factor)。在結構分析上分別以掃描式電子顯微鏡(Scanning
Electron Microscopy, SEM)和穿透式電子顯微鏡(Transmission Electron Microscopy, TEM)分析三種氧化鋅奈米結構之表面形貌與微結構分析，並探討其微結構以及組成之差異、不同摻雜情形和載子濃度等對於熱
電性質之影響。本研究發現水熱法製程成長之氧化鋅奈米線擁有最大
之Seebeck 係數值，而化學氣相沉積法成長之摻雜銦的氧化鋅緞帶結
構擁有最大之power factor 之值，以及最大之導電率，因此可以利用
銦摻雜的方式改變奈米線之導電率以及提升其熱電性質。

This study is to investigate thermoelectric properties of individual ZnO nanostructures of three types, including un-doped ZnO nanowires and In doped ZnO nanobelts grown by chemical vapor deposition (CVD),and un-doped ZnO nanowires grown by hydrothermal method. To measure Seebeck coefficient, as-grown single nanowires were placed on a
device constituting of a pair of micro-heaters with a designed circuit for sensing the temperature difference between two ends of the nanowires. Combining Seebeck coefficient with electrical conductivity measured by
four probe measurement, thermoelectric power factor can be derived. The morphology and microstructure of the ZnO nanostructures were characterized by scanning electron microscopy and transmission electron microscopy. The influence of microstructure, chemical composition, and carrier concentration of the ZnO nanostructures on thermoelectric properties is discussed. From the results, the ZnO nanowires grown by hydrothermal method exhibits the largest Seebeck coefficient. While electrical conductivity
could be optimized by doping In into ZnO nanostrucutres,
thermoelectric power factor is also enhanced.

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