研究生: |
陳楷棋 Chen, Kai-Chi |
---|---|
論文名稱: |
不同摻雜濃度及汲極/源極厚度對無接面堆疊式反相器電壓轉換特性之影響 A Study of Vertically Stacked Junctionless Nanosheet Complementary Metal-Oxide-Semiconductor with Different Dopant Concentration and Raised Source/Drain |
指導教授: |
李文熙
Lee, Wen-Hsi |
學位類別: |
碩士 Master |
系所名稱: |
電機資訊學院 - 微電子工程研究所 Institute of Microelectronics |
論文出版年: | 2023 |
畢業學年度: | 111 |
語文別: | 中文 |
論文頁數: | 83 |
中文關鍵詞: | 抬升式源汲極 、奈米薄片 、環繞式閘極 、無接面式電晶體 、互補式金屬氧化物半導體 |
外文關鍵詞: | CFET, junctionless, vertically stacked, nanosheet, Gate-All-Around |
相關次數: | 點閱:73 下載:0 |
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4. Feng-Tso Chien, Member, IEEE, Chii-Wen Chen, Tien-Chun Lee, Chi-Ling Wang, Ching-Hwa Cheng, Tsung-Kuei Kang, and Hsien-Chin Chiu, “A Novel Self-Aligned Double-Channel Polysilicon Thin-Film Transistor” IEEE TRANSACTIONS ON ELECTRON DEVICES, VOL. 60, NO. 2, FEBRUARY 2013.
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