高科技電子製造屬高資本密集工業，以一座標準量產之12吋晶圓廠為例，建置成本已逾三十億美金，若加上製程研發資金、生產測試、材料開發與試營運的投資，成本更為驚人。然而，在投入龐大資金時的同時，也突顯企業可能面臨的天災人禍等不可預期風險。借鏡歷年有關高科技廠房火災事故，可發現到燃燒過程衍生的懸浮微粒會隨潔淨室(cleanroom)內部循環氣流擴散，導致製程設備、廠務設施與潔淨室環境受汙染，進而使生產線中斷，影響正常出貨能力，嚴重者甚至會造成市場供需失衡。因此就如何降低火災煙流對潔淨室的影響，已為企業亟欲克服的議題。
歷年有關高科技廠房排煙設計之文獻論著者，多從人員生命安全為基，優先評估煙層下降時間後，再計算最大容留人員安全避難所須時間，再據以論述煙控設計的成效；鮮少從營運持續面，探討煙損對高科技業廠房可能造成影響規模。本文應用火災模擬軟體FDS (Fire Dynamics Simulator)，針對高科技製程工廠之典型潔淨室執行火災煙氣熱流模擬，分析特定設計火源的煙損害程度。FDS模擬情境中火源設計，以潔淨室內高火載量區域與高風險性物質為主，包括晶舟盒儲區、聚氯乙烯布搭建的棚架與消耗低閃火點物質的製程設備等，據以評估潔淨室差壓煙控策略下的煙損害程度。業界採行的差壓煙控手段係透過FFU出口風速的調節，建構出差壓環境來侷限煙流後，再輔以排煙機於天花板處抽取煙氣，以達煙損防制目的。
部分的FDS模擬情境，吾人亦將撒水系統參數納入情境內模擬，藉以評估撒水系統對煙損害防制效益上的貢獻。經由FDS的模擬結果顯示，垂直層流式潔淨室採用FFU降速或停止運轉之環境差壓控制與上排煙系統，對熱釋放率達3MW規模以上的淡煙氣體流場所產生的抑制效果甚為有限；而撒水設備的防護作用對HRR 大於1.35MW儲區火災可適時提供保護作用，間接可創造較佳煙損防制效益。

This study assesses the smoke control system performance using computer simulation techniques for a down-flow ball room cleanroom. To evaluate the smoke damage impact from the potential fire events, some computational fluid dynamics analyses were performed by use of the NIST Fire Dynamics Simulator. In addition to the simulation, several fire tests were conducted to gather the heat release rate (HRR) and soot yield data in accordance with ISO 5660-1 test methods and 10MW full scale fire test method. The tests result show, the HRR and soot yield data from IPA combustion to be 0.81MW/m2 and 0.0016.
A mchanical equipment system was employed for the smoke control system in the cleanroom, such as fan filter units to develop pressure differences between smoke zones for restricting smoke migration, and used smoke exhaust fans to drawing airborne particles from ceiling. The results show that smoke particles could easily transport across several adjacent smoke zones and contaminate production tools in cases of fire scale over 3MW. On the other hand, the sprinkler system is performed very well to suppress fire within three minutes under the same conditions.

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