在本研究中，主要探討奈米鐵電管的電極化特性。我們分別利用草酸與磷酸當作電解液，在矽基板上自製兩種不同尺寸的多孔陽極氧化鋁(AAO)模板，孔洞半徑分別約在50~90 nm和110~180 nm之間，並利用多孔氧化鋁模板來合成合成鋯鈦酸鉛 (Pb(ZrTi)O3, PZT) 鐵電奈米管陣列。為了探討鐵電管陣列的奈米鐵電特性，本研究在陽極氧化鋁與矽基板之間鍍上Pt與Ti來作為電性量測的底電極。利用兩種不同尺寸模板合成的鐵電奈米管陣列均為多晶結構，奈米管直徑範圍分別約為45~75 nm與100~150 nm左右。在掃描探針顯微鏡直接的觀察下顯示，奈米管的幾何尺寸對鐵電性質的影響主要藉由局部晶相的改變。草酸AAO所製奈米管中，管直徑越小時極化強度越強，且單一管內晶軸方向偏離較小，電域分布單純，多為90度或180度的雙電域結構。磷酸AAO之鐵電奈米管直徑在100 nm以上時，管內為隨意多晶結構，電性與壓電特性受局部晶軸方向主導，c軸方向若垂直外加電場方向將使的極化量較小，矯頑場較大且局部壓電特性較弱。

In this study, the electric polarization properties of ferroelectric nanotubes were investigated. Anodic aluminum oxide (AAO) templates with two different diameters were obtained by using H2C2O4 and H3PO4 electrolyte. The diameters of the holes are about 50~90 nm and 110~180 nm for H2C2O4 and H3PO4, respectively.。Pb(ZrTi)O3, PZT, nano-tube array were synthesized based on these templates. To systematically measure the ferroelectric properties of the nanotubes, the AAO films were specially designed to grow on Pt/Ti. The ferroelectric tubes obtained by the template method were polycrystalline, and their diameters are of 45~75 nm and 100~150 nm. By using the scanning probe microscope, the ferroelectric domain can be in-situ observed, which shows the geometrical effects on the ferroelectric properties were mainly through the crystalline phase. For nanotubes synthesized in H2C2O4-prepared AAO, the polarization increases with narrowing diameters. The electric domains distribute simply, and are mainly 90 or 180 degree domains. In comparison, the grains of nanotubes synthesized in H3PO4-prepared AAO are randomly oriented. In this case, the local electric properties are dominated by the easy axis of polarization. The c-axis oriented grains posses lower polarization, higher coercive fields, and smaller piezoelectric coefficients.

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