本文研究於Si3N4基複合材料在氮氣氛中作熱壓燒結，燒結溫度為1850℃，燒結時間1小時，以探討第二相TiN添加對微結構、機械性質、磨耗性能及放電加工的影響，並以有限元素法分析第二相強化物對複合材料之殘留應力與破壞模擬之關係。結果顯示第二相氮化鈦的顆粒大小與含量對氮化矽基複合材料的彎曲強度、破壞韌性、硬度與電阻率有很大影響。晶界相和Si3N4與TiN界面間的化學成分利用高解析電子顯微鏡分析，結果顯示氮化鈦與氮化矽晶粒或氮化矽與氮化矽晶粒間存在一層薄的非晶質膜，而晶界相與三晶粒接點的非晶質相成分相同。有限元素法模擬結果亦證實第二相添加物可以提升基材的破壞韌性，但彎曲強度會降低。

　　摩擦與磨耗行為的探討是以Si3N4基複合材料與AISI-52100軸承鋼配對成圓盤與鋼球的乾式往復滑動模式來進行，結果顯示氮化矽基陶瓷複合材料其摩擦與磨耗係數相對較低。而添加氮化鈦的氮化矽基陶瓷複合材料具有較高的破壞韌性值，滑動磨耗結果以氮化矽基複合材料對AISI-52100 鋼各組的摩擦與磨耗係數值皆小於氮化矽對AISI-52100軸承鋼組。當外加荷重為100~300N時，氮化矽陶瓷的摩擦係數值為0.6~0.7之間，磨耗係數值為1.63×10-8 ~ 1.389×10-6 ㎜3/N.m。而添加氮化鈦的氮化矽基陶瓷複合材料的摩擦係數為0.4~0.5之間，磨耗係數值為1.09×10-8 ~ 0.32×10-6 ㎜3/N.m。此結果顯示破壞韌性值對氮化矽基陶瓷複合材料的磨耗行為扮演相當重要的角色。

　　滑動磨耗前後的磨耗面和磨屑是利用SEM, EDS, XRD, AFM 及 TEM 等進行分析，而氮化矽基陶瓷複合材料的乾式滑動磨耗機構包括有黏附磨耗(adhesive wear)、磨潤化學反應磨耗(tribo-chemical reaction induced wear)、刮損磨耗(abrasive wear)和三體磨耗(three-bodies wear)。氮化矽基陶瓷複合材料的表面磨耗移除破壞是經由磨粒微犁(micro-plowing)沿著滑動面發生微破壞(micro-fracture)與微犁溝(micro-groove)破壞所致。穿透式電子顯微鏡分析結果在氮化矽與氮化鈦晶粒表面存在有雙晶變形與差排網，此顯示氮化矽基陶瓷複合材料於磨耗破壞過程可提供塑性變形機制。而次表面的破壞發現裂縫沿著晶界延伸繁殖，此結果顯示陶瓷的破壞韌性對破壞機制扮演相當重要的角色。

　　從微結構分析顯示導電相氮化鈦添加在氮化矽基材中分佈相當均勻，導電相氮化鈦晶粒相互連接成導電網路，當添加小顆粒氮化鈦含量為40vol%時氮化矽基複合材料的電阻率1.25×10-3Ω.㎝最低，此具高導電性Si3N4基複合材料可以使用放電加工切削。本氮化矽基陶瓷複合材料的放電加工使用線放電加工、雕模放電加工和微放電加工的切削製程。氮化矽基陶瓷複合材料的放電加工移除機構顯示為熔解與蒸發，而再凝固水珠狀痘瘡幾乎為鈦元素凝固，而氮化矽可能被氣化蒸發。氮化矽基陶瓷複合材料在不同放電加工條件下以材料移除率、工具電極磨損和表面粗糙度等評估切削性能。而氮化矽基複合材料的加工移除率與工作電壓、電流、脈衝時間和進給率等有關，較高的移除率加工表面顯示有較大的放電凹痕。經放電加工的陶瓷試片依據ASTM標準作四點彎曲試驗，以十六個加工試片為一組作彎曲測試，結果顯示細放電加工的韋伯模數值10.5較高。而氮化矽基複合材料作雕模放電加工所用銅與黃銅工具電極的磨耗率評估，結果顯示雕模放電氮化矽基複合材料使用黃銅電極的磨耗率皆高於銅電極。

　　本研究結果證實，經由添加具導電相TiN的氮化矽基複合材料，當添加大顆粒30vol%TiN時電阻率降為10-1Ω.㎝，此氮化矽基複合材料可使用放電加工切削，經線放電加工製成微小形狀後，其平面寬度為220 μm，平面間距為217μm。另外；經由微放電結果，顯示微孔直徑介於50~70μm之間。

　The Si3N4-based composites were manufactured by hot-pressing sintered at 1850℃ for 1h. The effects of TiN addition to Si3N4-based composites on its microstructure, mechanical properties, wear behaviors and electrical discharge machining were investigated. Residual stress analysis and failure simulation are performed based on finite element method (FEM) to explore the effects of the particle properties on the failure of particle-reinforced composite, using composite samples with various particle properties. The microstructure, strength, fracture toughness and electrical resistivity of Si3N4 containing two different sizes of TiN were investigated. The size and content of TiN particles were found having influence on the strength, toughness, hardness and electrical resistivity of Si3N4-based composites. The grain-boundary film and interface chemistry has been analysed by means of high resolution electron microscopy (HREM). The HREM observation exhibited a thin amorphous intergrangular films at both TiN- Si3N4 and Si3N4-Si3N4 grains boundary. In general, no obvious difference in composition between the grain-boundary film and the triple-grain junctions was detected. The results of the FEM simulation have been demonstrated using by the second phase particles reinforced the composites that displays an enhanced toughness but degraded strength, compared to the monolithic material.

　The friction and wear behavior of Si3N4-based composites against AISI-52100 steel were investigated in the ball -on- disc mode in a non-lubrication reciprocation motion. It has been found that under the conditions used all the ceramic components exhibited rather low friction and wear coefficients. The addition of TiN particles can increase the fracture toughness of Si3N4-based composites. The Si3N4-based composites exhibits a small friction and wear coefficient compared monolithic Si3N4. The contact load was varied from 100 to 300 N. For monolithic silicon nitride materials, high friction coefficients between 0.6 and 0.7 and wear coefficients between 1.63×10-8 and 1.389×10-6 ㎜3/N.m were measured. By adding titanium nitride, the friction coefficients was reduced to a value between 0.4 and 0.5 and wear coefficients between 1.09×10-8 and 0.32×10-6 ㎜3/N.m at room temperature. The fracture toughness of Si3N4-based composites played an important role for wear behavior.

　All materials and worn surfaces as well as wear debris were investigated by means of SEM, EDS, XRD, AFM and TEM before or after the tribological tests. The wear mechanisms of Si3N4-based composites are adhesive wear, tribo-chemical reaction induced wear, abrasive wear and three-bodies wear in non-lubrication sliding tests. Materials removal in the Si3N4-based composites occurs through a combination of micro-fracture and micro-groove deformation from micro-plowing along the sliding traces by the abrasive particles. The presence of twins and dislocation networks in Si3N4-TiN grains indicates that the wear of Si3N4-based composites is well accommodated plastic deformation. The TEM micrographs of wear track revealed plastic deformation through cracking along grain boundary propagation. This shows that the fracture toughness plays an important role in the fracture mechanism.

　The addition of TiN conductive phase is relatively uniformly distributed in silicon nitride matrix. The conductive grains are connected to each other an electric network. A low electrical resistivity of 1.25×10-3Ω.㎝ was obtained in 40vol% small TiN/Si3N4 composites. The Si3N4-based composites have high electrical conductive and can be used for electrical discharge machining (EDM). The EDM of the Si3N4-based composites was conducted using wire-EDM, sinker-EDM and micro-EDM cutting process. The model erosion mechanisms of EDM revealed melting and evaporation, the resolidified droplets almost are Ti element, as Si3N4 should be removed by evaporation.

　Machine ability was evaluated in terms of material removal rates, tool wear, and surface finish under different conditions. The removal rates of Si3N4-based composites were found to be dependent on working voltage, current, pulse duration and feed rate. High removal rate resulted in larger crater which features on the machined surface. Four point flexure testing was performed in accordance with the ASTM standard for the flexure testing of EDMed ceramics. Analysis of sixteen flexure tests indicated a Weibull modulus as high as 10.5 for fine EDM. The erosion rate is evaluated with copper and brass of tool electrode material by sinker-EDM test in Si3N4-based composites. The wear rates of brass are substantially greater than that of copper for all sinker-EDM tests.

　The results demonstrated the possibility of machining structural ceramics by the micro-EDM method through the incorporation of conductive toughening phases. This research has successful shown that EDM can be applied to Si3N4-based composites, if the electrical resistivity is below 10-1Ω.㎝. Electro-conductive ceramic miniaturized structures can be machined by wire-EDM. The vertical walls of Si3N4-base composite machined by wire-EDM, showing the pattern profile which has the minimum line width of 220μm and 217μm space width. Micropores of 800μm in depth and 50~70μm in diameter were successfully machined in Si3N4-based composites by the micro-EDM method.

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