簡易檢索 / 詳目顯示

研究生: 林叡酉
Lin, Ray-yo
論文名稱: 發展全物鏡式雷射都卜勒測速儀於微流元件之流場量測應用
Development of Whole Objective lens-based Laser Doppler Anemometry For Flow Field Measurement in Microfluidic Devices
指導教授: 呂宗行
Leu, Tzong-Shyng
學位類別: 碩士
Master
系所名稱: 工學院 - 航空太空工程學系
Department of Aeronautics & Astronautics
論文出版年: 2005
畢業學年度: 93
語文別: 中文
論文頁數: 147
中文關鍵詞: 雷射都卜勒測速儀調製技術干涉條紋間距量測體積(區)都卜勒頻率指示粒子(seeding)
外文關鍵詞: laser doppler anemometry, modulation, interference pattern spacing, measuring volume, doppler frequency, seeding
相關次數: 點閱:71下載:5
分享至:
查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報
  •   在本研究中,我們運用超長工作距離物鏡來作為取代傳統透鏡而作為光束聚焦裝置形成量測區,依此改良傳統傳統型態之雷射都卜勒測速儀而發展出全物鏡式雷射都卜勒測速儀,企圖在能達成縮小條紋間距同時,兼保有足夠的干涉條紋數,及在做微流元件流場量測時所須的彈性架設空間。
      本系統經實施校正後,可獲得干涉條紋間距在1微米以下、干涉條紋數超過10條以上之量測體積;量測體積其條紋間距,可依彈性更換更高倍率物鏡而改變,進而提昇系統的空間解析度;同時也整合一新式簡易聲光調製手段暨訊號處理流程,可測出反向流場;此外我們也藉由校正設備實證兩種不同干涉光路:參考光路及雙光束干涉光路模式之訊號噪訊強度在比較時,雙光束模式噪訊會比較低的情形。
      在本文中,我們用了電噴灑,及微管道流場作為外、內流場性能測定的對象,而全物鏡式雷射都卜勒測速儀也針對不同的量測對象,各別以架設適合之量測光路測得其速度分佈,和相對應之線性流速變化。在做電噴灑現象測速時,觀察該流場情形同時也得出發展全物鏡式雷射都卜勒測速儀於微流元件之流場量測應用在供給高流量時欲穩向電噴灑,必須同時控制表面張力及電場力的結論;而在管流量測中流速測定的結果,也顯示出因指示粒子的濃度不同,即使處於同一穩定流場速度下,粒子其反應速率也會有所差異的情形。
      對於所發展出的全物鏡式雷射都卜勒測速系統,並搭配上自製的乳化粒子,本系統可能將用於量測電動液壓幫浦微流道晶片中,其脈衝不穩流之現象作測速研究;或是介電泳晶片中,作粒速量測並測定粒子特性。

      In this study, we develop our whole objective lens-based laser Doppler anemometry by introducing the ultra long working distance objective lens instead of using conventional lens to focus beams and generate the measuring volume. This schemes to reduce the interference spacing and meantime to maintain sufficient pattern number. In addition, thus-designed instrument also provides adequate operation space for measuring flow field in micro-fluidic devices.
      After calibrating our LDA system, we can discover that probe volume has spacing less than 1μm, and that over 10 pattern numbers has in it. This system can minimize its spacing by easily introducing higher multiplication objective lens and thus improving its spatial resolution. Simultaneously, the new acoustic modulation device and data processing program enable this whole objective lens based LDA to discriminate reversed flow field. Besides, we also set up two kinds of light path mode: reference and dual beam mode. While testing and comparing both mode’s signal quality, we reconfirm that the dual beam mode has less noise in sensing signal.
      In this experiment, we generate an electro-spray and apply a micro channel flow as our testing bed. By establishing suitable light path mode for LDA, this system can find out the velocity profile of electro-spray, and it also obtains a linear changed speed condition in micro channel when fluid was driven by a syringe pump under several pumping rate, even in an over-seeded situation. Meanwhile, by observing the capillarity wetting of electro-spry which cause the sweeping of spray, we realize that it is necessary to control both surface tension and electric field at the same time to stabilize the spray direction if we apply larger flow rate to spray than usually used.   Finally, the micro channel flow measuring results tells us that the more dense seeding un flow will not accurately respond to the real flow speed in the micro channel.
      In the future work, we prepare to use this tool with self-made seeding to investigate the pulse flow field in the electro-hydro dynamic pumping driven chip, or to measure velocity of particles and then estimate the particle properties in dielectrophoretic-force driven chip.

    中文摘要 Ⅰ 英文摘要 II 誌謝 IV 目錄 VI 表目錄 IX 圖目錄 ..X 符號說明 ⅩII 第一章 緒論 .1 1.1 背景 .1 1.2 動機與目的 .4 1.3 文獻回顧 .6 第二章 雷射都卜勒測速儀(LDA)構成理論 .12 2.1 光學基本理論 .12 2.1.1 光波描述 .12 2.1.2 光干涉…….. .13 2.1.3 干涉條紋 .16 2.1.4 光偏振 .16 2.1.5 光繞射 . 17 2.1.6 光散射……………….…………………...................................... 17 2.1.6.2 指示粒子(seeding)和散射關係……………............................. 18 2.1.7 光路設計………………………………………………………... 19 2.1.8 都卜勒效應……………………………………………………... 21 2.1.9 量測區(體積)(Measuring Volume , Probe Volume)……………. 24 2.2 調製技術 (Modulation)…………………………………….......... 26 2.3 都卜勒測速儀模式………………………...................................... 28 2.3.1雙光束模式 (Dual beam mode)………..……………………...... 29 2.3.2參考光束模式 (Reference beam mode)………………………… 30 2.4 都卜勒測速儀及新型顯微鏡式測速儀………………………….. 31 2.5 全物鏡式都卜勒測速儀………………………………………...... 32 第三章 新式訊號調製技術…………………………………………………... 37 3.1 訊號處理………………………………………………………...... 37 3.1.1 聲光調製原理……………………...………………………….... 37 3.1.2 新型調變技術…………………………...……………………… 38 3.1.3 新型調製法的限制…………………………...……………….... 39 3.2 訊號數學描述……………………………………...…………....... 40 3.2.1 解調變技術 ... 42 3.2.2 各光路訊號模擬設定………………………………...……….... 47 第四章 光學設備暨校正…………………………………………………....... 56 4.1 全物鏡式雷射都卜勒測速儀的建構架設 … 56 4.1.1 量測體積生成裝置 … 56 4.1.2 散射光接收裝置 … 57 4.2 校正裝置 ... 58 4.3 校正實施………………………………………………………..… 60 4.4 校正結果………………………………………………………….. 61 第五章 流場測定實驗 … 74 5.1 內流場量測……………………………………………………….. 74 5.1.1 設備架構………………………………………………………... 74 5.1.2 指示粒子之選用………………………………………………... 75 5.1.3 操作參數設定及結果................................................................... 76 第六章 實驗結論與討論……………………………………………………... 83 6.1 結論………………………………………………………..……… 83 6.2 實驗結果討論.................................................................................. 85 第七章 未來工作…………………………………………………………....... 92 7.1 生醫晶片系統上之粒子選擇機制……………………………….. 92 7.2 介電泳力驅動流場機制………………………………………….. 93 7.3 運用LDA量測DEP驅動晶片內流場之設定……………….… 94 參考文獻 97 附錄一………………………………………………………………………... 102 附錄二………………………………………………………………………... 114

    M. Abramowitze, and I. A. Stegum, “Hand book of Mathmetical Functions,” Washington D. C. : Nat But Standards, 1963

    M. L. AlekSendriv, L. N. Gall, V. A. Shkurov, V. A. Pavlenko, N. V. Karsnov, V. I. Nikolaev, “Mechanism of ion formation during the electrohydrodynamic sputtering of a liquid into a vacuum,” J. Anal.USSR.vol 39, pp.268 , 1984

    A. M. Gañán-Calvo, J. Dávila, and A. Barrero, “Current and droplet size in the electrospraying of liquids.Scaling laws,” J. Aerosol Sci. vol 28, pp.249-275 , 1997.

    Antonio Castellanos, “ Electro-hydrodynamics.”

    Arthur H. Lefebvre, “Atomization and Sprays,” Hemisphere Publishing Cop. , pp384-390 , 1989

    R. J. Baker, “A filter bank signal processor for Laser Anemometry,” AERE R7652, 1973

    K. A. Blake, and K. I. Jesperson, “The NEL laser velocimeter,” NEL Rept.No.510, 1972

    B. M. Hoeling, A. D. Fernandez, R. C. Haskell, E. Huang, W. R. Myers, D. C. Peterson, S. E. Ungersma, R. Wang and M. E. Williams, “An optical coherence microscope for 3-dimensional imaging in developmental biology,” Optical Express 6, pp.136-146, 2000

    A. P. Bruins, T. R. Covey, J. D. Henion, “Ion-Spray Interface for Combined Liquid Chromatography/Atmospheric Pressure Ionization Mass Spectrometry,” Anal. Chem., vol 59, pp.2642., 1987

    Chales P. Wright, “Applied Measurement Engineering,” Prentice Hall P T R , pp.234 , 1995

    C. H. Teng, T. S. Leu, “Research and Development of Micro-Electrospray Chip,” master thesis of Department of Micro-Electro Mechanical System, National Cheng-Kung University, 2004

    C. H. Chung, Y. L. Lo., “Development of a New Heterodyne Laser Doppler Anemometry in Microscope,” master thesis of Department of Mechanical Engineering, National Cheng Kung University, 2001

    Clayton Crowe, Martin Sommerfeld, Yutaka Tsuji, “Multiple phase flows with Droplets and Particles,” CRC Press, pp.24 -143, 1998

    D. Huang , F. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R .Hee, T. Flotte, K. Gregory, C. A. Puliafito, and J. G. Fujimoto, “Optical Coherence Tomography,” Science, vol.254, pp.1178-1181, 1991

    M. Dole, L. L. Mack, R. L. Hines, “Molecular Beams of Macroions,” J. Chem. Phys., vol 49, pp.2240, 1968

    D. F. G. Durao, and J. H. Whitelaw, “The performance of acousto-optic cells for laser-Doppler anemometry,” J. Physics. E: Sci. Instrument.8, 776, 1975

    F. C. Ma, T. S. Leu, “Novel EHD Pump Driven Micro Mixers,” master thesis of Department of Aerospace, National Cheng Kung University, 2002

    F. Durst, A. Melling, J. H. Whitelaw, “Principle and Practice of Laser Doppler Anemometry, ” Academic Press , London , pp.25-326 , 1981

    J. D. Fridman, R. M. Huffaker, and R. F. Kinnard, “Laser Doppler system measures three dimensional velocity vector and turbulence,” Laser Focus 4, 34, 1968

    G. Fuhr, R. Hagedorn, T. Muller., W. Benecke, B. Wanger, “Microfabricated electrohydrodynamic(EHD) pumps for liquids of higher conductivity,” Journal of Micro-electromechanical Systems, vol 1, issue 3, pp.141-146, Sept. 1992

    G. I. Taylor, “Electrically driven jets,” Proc. Roy. Soc. London, A313, pp.453-475,1969

    G. I. Taylor, “Disintegration of water drops in an electric field,” Proc. Roy. Soc. London, A280, pp.383-397, 1964

    G. J. Tearney, B. E. Bouma, S. A. Boppart, B. Golubovic, E. A. Swanson, and J. G. Fujimoto, “Rapid acquisition of in vivo biological images by use of Optical coherence tomography,” Optical Letter, vol.21, pp.1408-1410, 1996

    Hiroaki Suzuki, Chih-Ming Ho, “A magnetic Force Driven Chaotic Micro-Mixer,” Processing of the IEEE fifteenth Annual Workshop of MEMS, 2002 , U.S.A , p40

    http://www.ibmm.informatics.bangor.ac.uk/papers/science/dep.htm

    I. G. Loscertales, A. Barrero, I. Guerrero, R. Cortijo, M. Marquez, A. M. Gañán-Calvo, “Micro/Nano Encapsulation via Electrified Coaxial liquid Jets,” Science, vol 295, pp.1695-1698, 2002

    R. N. James, W. R. Babcock, and H. S. Seifert, “A Laser Doppler technique for the measurement of particle velocity,” AIAA J. 6, 160, 1968

    Jin-Woo Choi, Yong-Kweon Kim, “Micro-Electro-hydrodynamic Pump driven by Traveling Electric Fields,” Industry Application Conference, vol 2, pp.1480-1484, 1995

    Joanne Deval, Patrick Tabeling and Chih-Ming Ho, “A Dielectrophoretic Chaotic Mixer,” Processing of the IEEE fifteenth Annual Workshop of MEMS, 2002, U.S.A, p36

    Matthias S. Wilm, Matthias Mann, ”Electrospray and Taylor-Cone theory, Dole’s beam of macromolecules at last ?,” International Journal of Mass Spectrometry and Ion Processes, vol 136, pp.167-180, 1994

    Y, Minagawa, E, Okada, “A laser two focus velocimeter with high spatial resolution using confocal optical system,” Industrial Electronics, Control, and Instrumentation, Processing of the IECON’93., International Conference, vol 3, pp.1527-1530, 1993
    H. Mishina, T, Ushizaka, and T, Asakura, “A laser Doppler Microscope,” Optical and Laser technology, pp.121-127, 1976

    E. J. Nijhof, W. S. J. Uijttewaal, and R. M. Heethaar, “A laser Doppler system for measuring distributions of blood in narrow flow channels,” IEEE Transactions on Instruments, vol.43, pp.430-435,1994

    E. .R. Pike, “The application of photon-correlation spectroscopy to laser Doppler measurements,” J. Phys. D.: Applied Physics. 5, L23 , 1972

    Lord Rayleigh, ”On the equilibrium of liquid conducting masses charged with electricity,” Phil. Mag., vol 14, pp.184 , 1882

    J. E. Rizzo, “A laser Doppler interferometer,” J. Phys. E.: Sci. Instrument.8, 47, 1975

    W. H. Stevenson, “Optical frequency shifting by means of a rotational diffraction grating,” Applied Optics 9, 649, 1970

    T, Suzuki, and R. Hioki, “Translation of light frequency by a moving grating,” J. Opt. Soc. Am.57, 1551, 1967

    Vibhu Vivek, Yi Zeng, and Eun Sok Kim, “Novel Acoustic-wave Micromixer,” IEEE International Micro Electo Mechanical Systems Conference, Miyazaki, Japan, January 23-27, 2000

    M. Yamashita, J. B. Fenn, “Electrospray Ion Source: Another Variation on The Free-Jet Theme,” J. Phys. Chem. 1984, 88, 4451.

    Y. Yeh, & Cummins H. Z., “Localized flow measurements with an He-Ne laser Spectrometer,” Applied Physic, Letters 4, 176, 1964

    Y. H. Zhaol, Z. P. Chen, C. S. Sxing, J. F. deBoer, and J. S. Nelson, “Phase-resolved optical coherence tomography for imaging blood flow in human skin with fast scanning speed and high velocity sensitivity,” Optical letters, vol 25, pp.114-116, 2000

    Zeleny, “Industry Application of Electrospray Technology,” J. Phys. Rev. 10, 1, 1917

    Tzong-Shyng Leu, Hung-Ying Chen and Fei-Bin Hsiao, “Studies of Particle Holding, Separating and Focusing using Convergent Electrodes in Micro Sorters,” private contact, 2004

    丁勝懋編著,”雷射工程導論”,中央圖書出版社,頁41至頁452,第三版,1993年
    李世光、陳怡君、余良彬、吳乾埼、陳世叡、潘政晟合著,”創新式繞射式雷射光學尺之開發”,光訊,行政院國科會光電小組,第105期,頁1,2003年12月
    李冠卿著,”近代光學”,聯經出版事業公司,頁1至頁134,初版,1988年
    吳錦源、Eiolf Vikhagen、李世光合著,”影像式全像干涉術於微機電元件振動量測運用”,光訊,行政院國科會光電小組,第105期,頁20至頁22,2003年12月
    苗君易著,”雷射測速儀”,科儀新知,第七卷第六期,頁39至頁49,1986年

    下載圖示 校內:立即公開
    校外:2004-10-21公開
    QR CODE