在生物分子間的作用分析研究上，拉曼光譜逐漸佔有重要的地位，除了能夠解析不同分子的結構之外，還能提供生物分子影像的相關資訊。但是對於非拉曼活性的生物分子而言，如何提升原來微弱信號是一項重要的課題。藉由金屬奈米粒子與表面結構的電場強化，就成了大家矚目的方式。表面拉曼強化散射(surface enhanced Raman scattering，SERS)結合表面電漿子(surface plasmons，SPs)的誘發機制，產生幾個數量級的電場強化效應，來放大感測器表面的生物分子檢測訊號，達到可以解析的程度。
本論文首先將自備的金與銀奈米粒子，利用單一自我聚集層(self assembly monolayer，SAM)技術，排列固定在金屬薄膜表面，以達到侷限(localized)電場強化效果。然而銀奈米粒子不如金粒子容易大面積的規則排列，因此藉由電子束顯影術(E-beam lithography)與聚焦離子束(focused ion beam，FIB)直接書寫的製程方式，來製作可控制、更多樣式的電漿子結構(plasmonic structures)。有了這些電漿子粒子與結構輔助後，我們利用衰逝全反射(attenuated total reflection，ATR)的方式來激發DNA之拉曼光譜，並得到初步的結果。

Raman spectrum is becoming an important tool for biomolecular interaction analysis.It is not only to be utilized to analyze various biomolecular structures, but also provides a possibility to grab biomolecule structural images. However, most of biomolecules are non-active Raman
molecules, and hence how to enhance their tiny Raman signals is a great challenge. With the helps of metal nanoparticles and surface structures to enhance local electric fields, the Raman signals will be detectable.
Surface-enhanced Raman scattering (SERS) with an inducement mechanism by exciting surface plasmons (SPs) could result in a several order electric field magnified effects and then enhance surface biomolecular detection
signals detectable.
In this thesis, prepared metal nanoparticles is first arranged and immobilized on metal film surface by using a self assembly monolayer (SAM) technique to enhance the localized electric fields. Silver nanoparticles are not
easy to form a larger uniform active area like gold nanoparticles, so an electron-beam lithographic process and a focused ion beam (FIB) direct writing are utilized to develop more controllable and various plasmonic structures. With the enhancement of these plasmonic particles and structures,an attenuated-total-reflection (ATR) Raman excitation is operated to detect the Raman signals of DNA molecules preliminarily.

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