在微波領域中，天線扮演的角色是將電能轉換成微波後無定向或朝著特定方向將訊號發射出去，而在奈米尺度下的天線同樣能將接收的光能量有方向性地發射出去，且由於金屬奈米天線具有區域性表面電漿共振(Localized surface plasmon resonance, LSPR)的現象，使得它若身邊帶著如量子點或分子等能夠與天線進行強耦合的量子發射體，即可將量子點的訊號增強後輸出甚至增強後以特定方向輸出。此外，金屬奈米天線還具有表面增強拉曼散射(Surface enhanced Raman scattering, SERS)與對環境折射率變化敏感的特性，因此也能夠在分子偵測的領域有所應用。
然而前述的奈米級天線都是獨立的，因此為了良好地控制天線，本研究以波導將光纖(巨觀)系統與奈米天線(微觀)整合在一起，故以絕緣層覆矽基板(Silicon on insulator, SOI)配合微影、蝕刻與薄膜沉積等製程來製作樣品，而樣品上包含單模脊型波導與設計過共振波長的奈米天線，並利用光纖將波長1530 nm ~ 1620 nm的不同線偏振光耦合進入波導中，產生特定偏振方向的光在波導傳輸，並利用此光激發天線產生不同的共振響應，最後利用近紅外光攝影機來收取天線散射強度以進行分析。
本論文中敘述了許多製程上遇到的問題與解決辦法，對於還能再優化改善的製程也有做改善的方法討論，並記錄了天線在不同的偏振與波長下的響應強度變化趨勢，可知天線會因為激發的偏振態改變而發生強度響應的變化，不過或許是基板產生了些微的感應偶極的影響，天線的共振狀態與最初預期設計的有些不同，而這些製程與量測結論對於後續研究朝應用目標前進時可能會有所幫助。

Antennas are important elements of wireless information transmission technologies. In radio engineering, antennas refer to devices converting electric currents to radio waves and, vice versa. However, nano-antenna has more advantageous characteristic, such as localized surface plasmon resonance, surface enhancement of light and high sensitivity to the changing of refractive index of surrounding. These advantages bring it to have the potential applications in optical computing and molecule sensing. We built up single-mode rib waveguides and nano-antennas on the silicon-on-insulator (SOI) substrate by using semiconductor manufacturing process. The resonance wavelength of nano-antennas was designed to be at 1550 nm based on the literature. The fabrication results, challenges and corresponding solutions were showed in this thesis. In optical measurement, nano-antenna was excited by different wavelengths and polarizations of different guiding modes of waveguide. The response of the antenna was also showed and discussed in this thesis. It could be seen that the antenna was reacting with different excitation but the resonance peak was different from our expectations. It may be due to the induced charge of substrate.

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