本文係設計一創新雙掃描光學模組以實現雙投影顯示技術，並解決
目前微型投影機僅能投影單一小畫面之問題。雙掃描光學模組是以
LIGA-like 製程完成的雙掃描鏡面結構，包含天秤型的雙掃描微鏡面、具
偏心結構的慢軸機構與薄型壓電致動器。天秤型雙微掃描結構係將兩個
微鏡面以Y 字樑連接並搭配薄型壓電致動器，使雙微鏡面做同步連動形
成近似天秤運動行為，以實現同步顯示兩個影像畫面之功能。另外，Y
字樑設計將可提高扭轉頻率與鏡面支撐強度；在慢軸的偏心結構部分，
是以不對稱的重量觀念來使微鏡面產生鐘擺動作以增加掃描角度。由實
驗結果證實，當施加電壓30Vpp 時，慢、快軸的機械半角度及共振頻率分
別為1.9°、3.75kHz 與9.6°、11.7kHz。若雙投影光學系統搭配電壓分別
為10Vpp 與30Vpp，以快軸與慢軸兩模態同時驅動，可同時投影雙矩形、
雙圓形與雙里沙育等畫面。本論文設計一研製雙微掃描光學模組實現同
步雙投影顯示功能。因此，此系統未來可廣泛的應用於行動投影裝置。

This paper presents an innovative dual scan optics module (DSOM) to solve the problem of existing micro-projectors only being able to project a single small picture. Therefore, this study designed a balanced double
micro-mirrors synchronous scanning mechanism using LIGA-like technology for dual screen projection. The DSOM was composed of balance-type dual micro-mirrors as fast axis, an eccentric slow axis mechanism, and slender piezoelectric actuators. For the balance-type dual projection structure, two micro-mirrors are connected using a Y-shape beam, so that both micro-mirrors can synchronous scanning form motion behaviors approximate to a balance. The experiments demonstrated when a voltage of 30Vpp was applied, the
scanning angle of the slow axis and the fast axis were respectively 1.9° and 9.6°, and their driving frequencies were respectively 3.7kHz and 11.45kHz.The DSOM were applied a voltage of 10Vpp matched with a 30Vppand integrated the fast axis mold and slow axis mold, so as to simultaneously
project dual rectangular and dual Lissajous pictures. The study achieves the function of a synchronous display of two images. Therefore, this DSOM is well suited for application to portable projection equipment in the future.

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