在這篇論文中，我將描述如何設計並架設一個在低溫下運作的光學顯微鏡，操作期以在低溫與真空環境下得到元件的清楚影像。
在論文的第一部分，我會對這個研究主題做一個簡單的背景介紹以及我們的實驗動機。
在論文的第二部分，我會介紹一些關於本實驗設計及所使用到的裝置，包括使用雷射光源、破壞雷射光圓同調性的佈滿隱形膠帶之CPU風扇、聚光透鏡、分光鏡、CMOS相機，隨著真空腔體內物鏡位置不同利用搭配滑軌的光學桌板，將光源導入真空腔體下方視窗內之正確地物鏡位置，以利於腔體內元件在CMOS相機裡成像；以及我設計的一個樣品轉接固定台、為了防止熱輻射散失額外設計放置台封蓋和隔熱層，可以讓其裝置在Low vibration interface上，使元件在低溫系統降溫時可以盡量維持在我們需要的溫度；再來是利用焊接式金屬波紋管、垂直升降平台、大檯面XY軸移動平台、小型雙軸移動平台、鋁擠型調整三軸，使物鏡能夠微調位置讓元件能對焦及調整到想要看到的位置；最後還有我設計的三種不同倍率的物鏡鏡架搭配步進馬達及設計的馬達架，能使我們在低溫真空腔體中切換不同倍率的物鏡；還有降溫時，為了避免跟Low vibration interface接觸而抬升Cold Heads設計的滑輪配重塊機構。
在論文的第三部分，我會介紹實驗的操作步驟，裝置的架設順序以及如何操作各裝置使其可調整焦距及我們想成像出的Device位置。
在論文的第四部分，我將會總結我們這次得到的實驗結果，討論運用我設計的實驗方法幫助我們在低溫真空系統中，能得到清楚的元件上樣品的成像及Device在降溫期間的電阻變化。

I will describe my design and installation of a cryogenic optical microscope and obtain clear images of device in operation.
In the first part of the paper, I will give a brief background on this research topic and the motivation for our experiments.
In the second part of the paper, I will introduce the experimental design and the parts of its components including the use of a laser light source, a diffuser by employing a CPU fan covered with invisible tape, a condenser lens, a beam splitter, a CMOS camera, and a vacuum chamber. Because the positions of the objective lens in the body are different, the optical table board with the slide rail is used to guide the light source into the correct position of the objective lens in the window below the vacuum chamber, so as to facilitate the imaging of the components in the chamber in the CMOS camera as well as a sample transfer fixing table I designed. In order to prevent heat radiation loss, the table cover and heat insulation layer are designed and installed on the low vibration interface, so that the components can be maintained at the desire temperature. Furthermore, the use of welded metal corrugations tubes, a vertical lifting platforms, a large table XY axis mobile platform, two small two-axis mobile platform, aluminum extrusion adjustment three-axis platforms are use so that the objective lens can be fine-tuned to the position we want to see. I design a holder to mount three different objectives. The holder can be moved by a stepping motor, which enables us to change different objective lens at low temperature. I also design a method to raise and the cold heads to avoid contact with the low vibration interface when cooling down. Finally, I show my design of the pulley counterweight mechanism.
In the third part of the paper, I will introduce the installation procedures of the components, the operation steps of the experiment, and how to adjust the cryogenic microscope to image the desired devices.
In the fourth part of the paper, I will summarize the experimental results I obtained, including a clear image of the sample and the resistance change of the devices during cooling down.
In the fifth part of the paper, talking about the conclusion and future prospect. It summarizes the research in a few paragraphs and makes suggestions for future research directions.

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