摘 要
本論文探討磁浮避震系統的設計，主要以電磁力懸浮系統的重力並隔絕外來的震動。因為磁浮系統具有非機械式接觸、零摩擦與小型化的特點，在避震器應用上可以達到低噪音、高效率及高可靠度的性能。而整個系統中，包含避震器硬體、激磁線圈、電流驅動器、位置感測器和控制器，是一個典型的機電整合系統。在本文中將敘述說明永久磁鐵與電磁線圈混合式磁浮避震器系統的設計概念與方法，包括硬體設計、磁力模式分析、控制器設計與閉迴路系統性能分析，並以電腦模擬比較其響應。在完成硬體製作後，進行包括位置感測器、控制器和驅動器的類比電路實作與基本測試。最後以實驗來驗證本設計系統的可行性，並探討強健控制器在不同條件下的承載性能。最終目的是實現一個能承載2~3 N的震動，並能精確定位在位置誤差0.5mm之主動式避震器。

Abstract
This thesis studies the design of a magnetic vibration absorber, using electromagnetic force to suspend gravity force and isolate vibration force from the system. The magnetic suspension system possesses non-mechanical contact, zero friction, and miniature characteristics, it presents vibration absorber performance of low noise, high efficiency and high reliability in operation. The overall vibration absorber, including vibration absorber hardware, excitation coil, current driver, position sensor and controller, is a typical electro-mechanical integration system. In this thesis, the design concept and method of the proposed hybrid magnetic vibration absorber using electromagnetic coil and permanent magnet is discussed, including system hardware design, force model analysis, controller design and closed-loop performance analysis. The hardware construction, including position sensing, feedback controller, current driver in analog circuits are implemented with tests. Finally, a series of experiment is carried out to verify the design system feasibility, and its performance under different load conditions. The goal of this active vibration absorber is designed for small vibrations in 2~3 N with a control error under 0.5 mm.

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