隨著微機電(MEMS)製程技術的日益發展，微型慣性感測元件擁有體積小、製造成本低以及低耗電性等優點。然而就快速且可靠的定位系統(positioning system)的需求而言，目前MEMS慣性感測元件仍存有訊號飄移的問題，以至於單獨應用於導航定位方面的準確度仍嫌不足。因此本文主要著重於MEMS慣性感測元件的前置校正，探討造成感測元件訊號飄移的成因，並藉由不同的校正方法如線性度校正、小波訊號處理等進一步降低誤差量隨著積分而逐漸放大的現象，以利於在無法有效接收外界參考訊號的情形下透過MEMS慣性感測元件也能達到定位或是導航等目標，最後由軌跡實測的結果顯示慣性感測模組經由校正後能達成較佳的定位效果，其整體平均誤差量約可縮小至5到10cm左右。

This thesis presents a calibration method for MEMS inertial sensing module to improve its noise problem. With the rapid development of MEMS technology, MEMS inertial sensing module including accelerometer and gyroscope possess some advantages such as small size, low cost and low power consumption. However, the inertial sensing elements are difficult to be implemented a precision positioning system in the presence of various errors. Based on the situation depicted above, a calibration method is investigated in this study. First of all, the sources of error are considered comprehensively. In general, those errors can be generalized into two groups, deterministic and stochastic. The former usually comprises bias error, misalignment and nonlinearity; the latter mainly contains thermal noise and mass residual motion noise. Thus, the calibration method integrated of linearity calibration and wavelet analysis is utilized to enhance the accuracy of MEMS inertial sensing module. The experimental results show that the mean error is about 5~10cm in various trajectory testing and the performance of inertial sensing module can be improved by means of proposed calibration method.

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