為降低工業量產氮化鋁基板的成本，有必要開發出低溫燒結緻密且具有高熱傳導性質之氮化鋁燒結體的製程。本研究即以此為動機，選用Li2O、Y2O3與CaO為添加助熔劑，檢討利用液相燒結的方式在1600℃的溫度下可得高緻密性且高熱傳導性質的氮化鋁之製程條件，並檢討燒結體的微觀結構、熱傳導性質與機械性質。
　　添加5wt% Y2O3-CaO添加劑 (Y2O3/CaO=13/7) 的AlN粉末，以6℃/min加熱至1650℃後隨即降溫至1550℃，並持溫4 h後，再以6℃/min降溫至室溫所得的AlN燒結體具有較多的第二相(YAG與YAM) ，且其多分佈於晶界交界處，燒結體的相對密度為94.6%。而在相同的添加劑條件下，以6℃/min加熱至1600℃並持溫2 h，燒結體具有91.4%的相對密度；若再將燒結時間延長至5 h則相對密度可達95.2%。此燒結體具有本研究中最大的熱傳導值165.8 W/mK，以及最大的晶粒尺寸3.12μm。

　　In order to reduce the cost of alumina nitride substrate, it is essential to develop a low temperature sintering process of alumina nitride with high density and high thermal conductivity.
　　According to the motivation mentioned above, Li2O,Y2O3, and CaO are used as additives in the liquid-phase sintering process which was fulfilled in 1600℃ to prepare the aluminum nitride with high density and thermal conductivity. The microstructure, thermal conductivity, and mechanical properties of the sintered alumina nitride were investigated.
　　A sintered alumina nitride with more second phases (YAG and YAM) distributed in the grain boundaries was obtained by a process, which AlN powders containing 5wt% Y2O3-CaO (Y2O3/CaO=13/7) were sintered to 1650℃ with a rate of 6 /min then cooling down the temperature from 1650℃to 1550℃, holding for 4 hours , and finally reducing the temperature to room temperature with a rate of 6℃/min. A sintered bulk with 91.4% of calculated density was obtained using the same additives and raising the temperature from room temperature to 1600℃ with a rate of 6℃/min then holding for 2 hours. In the sintering condition of 1600℃ for 5 hours, the sintered body with 95.2% of calculated density was obtained, which showed the highest thermal conductivity of 165.8 W/mK and the largest grain size of 3.12μm in this study.

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