摘要
本論文以創新的步階旋轉式黃光微影技術，製作具無接縫複雜圖形微結構之滾輪模仁，將標準黃光微影之平面微結構製程應用到曲面金屬滾輪表面上。過程中，首先研發氣環式光阻塗佈系統，成功將光阻液均勻地塗佈在直徑50~100 mm、長度150~250 mm的滾輪表面；接著建立旋轉步階紫外光曝光系統，藉由精確的對準機構與精密的旋轉控制，連續且無接縫地將光罩上之圖形轉移至金屬滾筒的外層光阻層上；此外，本文可以光罩軸向位移接續的方式，完成滾輪幅寬20 cm之大面積圖形製作。再以化學蝕刻或微電鑄的方式將圖形金屬結構轉移至滾輪表面，最後以電化學拋光來改善滾輪表面的粗糙度，完成無接縫滾輪模仁製作。本研究以製作之無縫式滾筒模仁配合PET基板的紫外光滾印，快速、連續、與大面積地製作出陣列式半球型微透鏡 (Micro-Ball-Lens Array)，且高度接近半球的微透鏡陣列；經由光學實驗量測，此一光學增亮膜的輝度增益值達1.2，霧度值達85 %。本論文同時進行光學模擬，得到與實驗接近的結果，成功證明此光學膜具有均光與聚光之效益；此效益可替代傳統多片光學膜之配向，並可有效應用於平面顯示器以及TV之背光模組。

關鍵字: 步階旋轉式黃光微影技術、氣環式塗佈系統、電化學拋光、無接縫滾輪模仁、輝度、霧度

Abstract
This thesis develops a novel technique of curved surface photolithography to fabricate roller mold with seamless and complicated patterns. Our approach is to modify standard photolithography from a planar type of micro-fabrication process into a curved surface one. First of all, an air ring photo-resist (PR) coating system is developed which can successfully coat a uniform photo-resist on roller surface. Secondly, a step-and-rotate UV-exposure system is constructed for transforming patterns defined by a photo-mask to the coated PR layer. Continuous and seamless patterning on the whole cylindrical surface of the roller is achieved through accurate mechanical alignment and precision rotation control of the roller as well as a parallel UV light source. Finally, using the patterned and developed PR structures as a mask, a variety of microstructures with complicated and seamless patterns can be directly fabricated on the metal roller surface by either chemical etching or electroforming process. To further improve the surface roughness, electro-polishing technique is adopted. For obtaining a brightness enhancing optical film, seamless ball-lens-array surface structures are fabricated on a roller mold. This patterned metal roller is then used in roll-to-roll (R2R) UV roller imprinting of large-area optical film with continuous micro-lens or ball-lens array surface structures. The optical performance of the roller-imprinted ball-lens-array optical film is experimentally measured and the luminance gain is 1.2 and the haze is 85 %. Optical simulation and analysis of the optical film are also carried out which show consistent results.

Keyword: Curved surface photolithography, Step-and-rotated UV exposure, Air ring coating system, Electro-polishing, Seamless roller molds, Luminance, Haze

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