本研究之主要目標在於研發一套建構在Pyrex 7740玻璃之上的微流道系統，其中並利用微電機機械系統(MEMS)製造技術將微陣列溫度感測器及微加熱器整合於微流道晶片。模型建立方法為將微陣列溫度感測器密集且等間距地埋設在微流道壁面，每個感測器之線寬僅有3μm、間距92μm，可詳細地量測底部具有微加熱器之微流道內部的局部壁面溫度，並進行研究不同進口雷諾數條件的局部微尺寸熱流傳輸現象。另外於微加熱器部分，經由溫度校正實驗可得一TCR趨近於零的溫度-電阻關係式，在提供一固定的直流電壓情況下，可供微流道一穩定的加熱功率。

　　在製程方面，微陣列溫度感測器與微加熱器的材質皆為金屬，並利用金屬剝離法(Lift Off)將兩者分別製作於Pyrex 7740玻璃上，其中利用電漿輔助式化學器相沉積法(PECVD)製作絕緣層於金屬層間。待製作完畢後，由於晶圓會因為感測器的存在而使得表面呈現高低起伏情形，所以在製作微流道結構之前，利用SOG將晶圓表面做平坦化處理，以減少表面粗糙度對微流道內部的熱傳影響。

　　最後在製作微流道結構體時，皆使用極低熱傳導係數的材料如：SU-8負型光阻、環氧樹脂、PMMA及玻璃基材，因此可非常有效地減少及控制熱系統的熱損失，並精確地量取微加熱管道內局部詳細的熱傳分佈資料。

　　Fabrication of a complicated micro-channel system on a Pyrex 7740 glass substrate by MEMS technique is developed. The channel is integrated with a set of micro heater and an array of temperature sensors for study of the local micro-scale heat transfer process at different Reynolds number flow conditions. The heaters are designed to be able to provide uniform heating with TCR being almost equal to zero. The micro temperature sensors have the width of only 3μm that can provide precise measurement of wall temperatures and can be used to obtain the local heat transfer coefficient.

　　Lift off method is used to pattern the metal film deposited on the Pyrex 7740 glass wafer to obtain both the micro temperature sensors and the heater. An oxide layer is deposited by PECVD between sensors and heater, and used as a insulator. The channel wall formed by the heater and sensors layer is not very smooth which may become a parameter to effect the heat transfer. To avoid the wall roughness effect, SOG planarization technique is used to reduce the wall roughness.

　　Finally, heat loss form the channel was a serious problem in heat transfer experiments. Thus, the channel structure was fabricated successfully using low thermal conductivity materials, such as negative tone photoresist (SU-8), epoxy, PMMA, and the glass substrate to reduce the heat loss problem, and therefore, accurate measurement of local heat transfer distribution inside the channel can be expected.

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