| 研究生: |
簡卉菁 Chien, Hui-Ching |
|---|---|
| 論文名稱: |
利用微加工技術製造溶氧微感測器 Using Micro-Fabrication Techniques to Manufacture the Dissolved Oxygen Sensor |
| 指導教授: |
周澤川
Chou, Tse-Chuan |
| 學位類別: |
碩士 Master |
| 系所名稱: |
工學院 - 化學工程學系 Department of Chemical Engineering |
| 論文出版年: | 2004 |
| 畢業學年度: | 92 |
| 語文別: | 中文 |
| 論文頁數: | 126 |
| 中文關鍵詞: | 溶氧感測器 、微加工技術 、網印 |
| 外文關鍵詞: | screen-printing, micro-fabrication technique, dissolved oxygen sensor |
| 相關次數: | 點閱:71 下載:1 |
| 分享至: |
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溶氧量在環境與生物體皆扮演一個重要的角色,包括生物體生化醫藥、食品工業、廢水處理以及水產養殖等。
但是,有鑑於海水中之氯離子,截至目前為止,尚無可直接浸於海水中,藉以長期偵測海水中溶氧量的感測器。因此,本研究主要利用最簡單而又便宜的厚膜網印技術,將電極圖案製備於氧化鋁板基材上,再覆蓋一層高分子薄膜於電極表面,藉以保護電極並增加其耐久性。
本實驗主要以電化學為基礎,選用厚膜網印之黃金膠,作為電極材料,並覆蓋一層聚苯乙烯(Polystyrene,PS),在3%NaCl溶液中進行水中含氧量之感測,結果顯示在1atm,25℃的情況下,當施加電位在-0.6V (vs. Ag/AgCl)時,其應答電流隨著水中溶氧濃度之增加而增加,呈良好之線性關係,而其R2 = 0.9997,靈敏度則為 -0.245μA/ppm×mm2,偵測極限為4 ppm。此外,在100小時之老化測試中,電流皆保持一穩定值。
另外,血液中之含氧量亦常被用來做為人體健康與否之重要指標,但是,有鑑於人體血液檢體之變化快速,一旦和大氣接觸,馬上會被空氣中和掉,增加氧,流失二氧化碳,pH上升等。因此,本研究希望研發出一種可植入式微感測晶片,並可同時偵測氧氣以及pH值,改善檢體一遇空氣及變質之缺點,藉以提高其準確性。
本實驗主要利用微機電系統之技術,選用生物相容性高的玻璃為基材,製作微電極,並整合微流體通道,而成微感測晶片。此晶片只需要0.525μL之微量檢體,即可即時偵測溶液中之含氧量。並比較此電極同時於75 mL以及0.525μL之檢體中進行水中溶氧量之測試,其量測電流之差異。
結果顯示當施加電位在-0.2V (vs. Ag/AgCl)時,其應答電流隨著體積流速增加而增加;當固定體積流速1.46x10-3 cm3/sec,在-0.2V (vs. Ag/AgCl)之電位下,連續通入有氧(8 ppm)及無氧(add Na2SO3)之3%NaCl溶液於感測晶片中,其應答電流值分別為-2.4μA及-0.5μA。再比較於75 mL之燒杯中進行溶氧量之測試,其應答電流值分別為-3.87μA及-0.76μA。
Dissolved oxygen plays an important role both in the environment and in the living beings, such as human medication, food industry, wastewater treatment, and aquatic cultivation.
Because of the chlorine ions in brine, there is no available sensor which can be applied directly in the sea water and give accurate sensing results over a long period of time. Consequently, we employ a simple and low-cost method, thick film screen-printing, printing the electrode pattern on an aluminum oxide sheet and covering with a thin polymer film over the electrode surface for protecting the working electrode so as to enhance the durability.
Based on electrochemical principles, gold was used as the electrode material in this study, and polystyrene as the coating material. Dissolved oxygen sensing was achieved at 1atm, 25℃, and a -0.6V (vs. Ag/AgCl) applied potential in the 3%NaCl aqueous solution. The result shows that the response current is linearly proportional to the concentration of the dissolved oxygen with 0.9997 R2 and -0.245μA/ppm×mm2 sensitivity. The minimum limit of detection of this developed sesor is 4ppm. The current is stable in the aging test which lasted 100 hours long.
Dissolved oxygen concentration in blood is usually taken as an index of physical condition. Blood samples deteriorate badly in contact with air, which brings about an increase of oxygen, a decrease in carbon dioxide, and a raise of pH. An embedding micro-sensing chip is therefore desirable to detect oxygen and pH simultaneously and also to exempt the process from air-contact deterioration. Hence the accuracy of this sensing system would have to be improved.
Glass was used as the substrate for its good biocompatibility. The micro-sensing chip, in which micro-electrodes were fabricated and micro-fluidic channels were integrated, was fabricated by Micro-Electro-Mechanical-System (MEMS). A small sample volume of mere 0.525μL was enough to immediately locate the dissolved oxygen concentration. Two samples of different volumes, 75mL and 0.525μL respectively, went through this dissolved oxygen experiment at the same electrode of 3mm×1mm dimensions.
The results show that the response current increases with volume flow rate when potential applied at-0.2V(vs. Ag/AgCl). The response currents are -2.4μA and-0.5μA, respectively, while continuously pumping oxygen-carrying 3%NaCl solution and oxygen-free 3%NaCl solution into the micro-sensing chip at 1.46x10-3 cm3/sec volume flow rate. Comparing the dissolved oxygen experiment achieved in a beaker with the response currents are -3.87μA and -0.76μA respectively.
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