本論文主要分為三個部分，第一部分為製作氧化鋅摻雜鋁（Al doped
ZnO, AZO）薄膜型乙醇氣體感測器，及氧化鋅奈米線（ZnO nanowires, ZnO NWs）與AZO 薄膜複合型元件。由於奈米線與薄膜相比，具有較高的表
面積/體積比（surface-to-volume），因此對乙醇感測之靈敏度較高。
第二部分為以矽基板製作氧化鋅奈米線氣體感測器，分別透過不同條件的熱處理，探討氧化鋅奈米線中的缺陷濃度，及其對氣體感測之影響；改變水熱法前驅物濃度，形成不同粗細之氧化鋅奈米線，並觀察其對感測特性的影響，亦製作不同維度的奈米結構，探討不同的氧化鋅表面形貌對氣體感測之影響；此外，也藉由添加銀奈米粒子(Ag nanoparticles, Ag NPs)以改善氧化鋅奈米線乙醇氣體感測器特性。
第三部分為製作全透明氧化鋅氣體感測器，以康寧玻璃為基板，採用ZnO NWs 與AZO 薄膜複合型元件作為主要架構，並結合於矽基板一系列的研究，選擇以Ag NPs 修飾ZnO NWs 的表面，製作出具有高靈敏度，且低響應時間和回復時間的透明乙醇氣體感測器。

There are three main topics in this study. In the first part, studies of aluminum-doped zinc oxide (AZO) thin film ethanol gas sensor, and zinc oxide nanowires (ZnO NWs) and AZO thin film composite device for presented. As compared nanowires with film, nanowires have higher surface-to-volume ratio, so the sense of ethanol sensitivity is higher.
In the second part, preparation of the ZnO NWs gas sensors on silicon substrate is described, including the investigation of the defect concentration of ZnO NWs after annealing and its impact on gas sensing, observation of the
effect of diameter of ZnO NWs prepared under different precursor concentration on the sensing properties. Also different nanostructures of ZnO are produced to explore the effect of geometry on the properties; and silver nanoparticles (Ag NPs) are deposited on the surface of the ZnO nanowires to improve ethanol gas sensor properties.
The third part describes the fabrication of transparent ZnO ethanol gas sensor with high sensitivity and short response time and recovery time. The same method of preparing ZnO NWs and AZO thin film as mentioned there is used but using the Corning glass as the substrate instead of silicon. And ZnO NWs surface is deposited with Ag NPs.

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