近年來，雷射在各個領域的應用不斷增加，對雷射品質的要求也越來越高。然而，雷射的穩定性和品質不僅會受到本身的因素，如輸入源、組成結構，也會受到外在環境的影響，如溫度、空氣流動與振動等因素而產生四自由度的擾動，包含兩個平移誤差與兩個偏轉誤差。為了解決雷射四自由度擾動的問題，目前市面上最常見的補償元件為FSM，由一個反射鏡與致動器所組成，致動器可產生兩自由度的偏轉運動，進而控制雷射方向，由於雷射存在四自由度的擾動，因此其雷射補償系統通常需要使用兩組FSM才能完整的補償誤差。
本論文根據補償雷射擾動的必要條件，設計一款四自由度FSM，使用有限元素模擬軟體ANSYS進行電磁模擬與結構模擬，並使用MATLAB/Simulink對其建立運動數學模型進行動態分析，評估動態性能是否符合補償雷射擾動的需求，最後，使用LabVIEW撰寫程式進行實驗控制，驗證四自由度FSM之靜態與動態性能，以滿足補償雷射擾動的條件，並建立四自由度FSM雷射補償系統之PID閉迴路演算法與人機介面，比較雷射經過四自由度FSM補償前後的差異，驗證四自由度FSM雷射補償系統之補償功能，實現即時補償雷射擾動的目的。

In recent years, the application of lasers have been increasing in various fields. However, the stability and quality of lasers are not only influenced by internal factors such as input power, structure and thermal issues, but also by external environmental factors, including temperature, air flow, and vibration, etc. These factors lead to four degrees of freedom (4-DOF) disturbances in lasers. To reduce laser disturbance problem, the most commonly used compensatory component is the fast steering mirror (FSM). The FSM comprises a reflecting mirror and an actuator that generates 2-DOF rotational motion to control the laser direction. Since lasers have 4-DOF disturbances, the traditional laser compensation system requires the use of two sets of FSM to compensate for these errors.

In this study, a 4-DOF FSM was designed to compensate for laser disturbances. The 4-DOF FSM is simulated using the finite element analysis software ANSYS to consider both electromagnetic and structural aspects. Additionally, a mathematical model for the 4-DOF FSM is established using MATLAB/Simulink to evaluate its dynamic performance in meeting the requirements for compensating laser disturbances. Finally, experiment is conducted using LabVIEW to verify the static and dynamic performance of the 4-DOF FSM. The study also presents a PID closed-loop algorithm and a human-machine interface for the 4-DOF FSM laser compensation system. By comparing the results before and after compensation by the 4-DOF FSM, the study validates the system's ability to achieve real-time compensation of laser disturbances.

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