簡易檢索 / 詳目顯示

研究生: 張詠渝
Chang, Yung-Yu
論文名稱: 以光準直方法學調校無光罩雷射微影系統並操作電極/基板表面能優化導電高分子電晶體效能
Optically Collimating a Maskless Laser Lithography System and Manipulating the Electrode/Substrate Surface Energies to Optimize Conductive Polymer Transistors
指導教授: 徐邦昱
Hsu, Bang-Yu
學位類別: 碩士
Master
系所名稱: 工學院 - 材料科學及工程學系
Department of Materials Science and Engineering
論文出版年: 2024
畢業學年度: 112
語文別: 中文
論文頁數: 86
中文關鍵詞: 導電高分子薄膜聚(3-己烷噻吩)(P3HT)自組裝單分子層有機場效電晶體雷射微影系統光路準直
外文關鍵詞: Conductive Polymer Films, Poly(3-hexylthiophene) (P3HT), Self-Assembled Monolayers, Organic Field-Effect Transistors, Laser Lithography System, Optical Alignment
相關次數: 點閱:74下載:25
分享至:
查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報
  • 導電高分子具備導電性和可撓性,其碳基主鏈特性使其在現代輕量化、小型化和低成本元件的發展趨勢中,成為非常適合應用於消費型或醫療型電子材料的選擇。然而,由於導電高分子的主鏈具可撓性且易發生扭曲,導致電子傳輸效率低下,這成為其發展的限制因素。先前研究表明,當高分子的微觀排列缺乏單一指向性時,會導致較低的載子遷移率,因此提高導電高分子材料的指向性成為首要目標。
    在本實驗室鄭亘甫學長的碩士論文中,已成功搭建了自動化雷射微影系統。本研究將進一步改良其雷射光路,不僅製造出高解析度和高品質的電極,還將控制液相製程中的複雜分子間作用力,以製備高有序性的導電高分子薄膜,從而增強其載子傳導行為。本研究以高有序性的導電高分子薄膜與低表面能電極的結合,有望大幅提升載子傳輸效率。

    Conductive polymers possess both conductivity and flexibility. The carbon-based backbone of these materials makes them particularly suitable for applications in consumer and medical electronic devices, especially in the context of modern trends toward lightweight, compact, and low-cost components. However, the flexibility of the polymer backbone also makes it prone to distortion, leading to low electron transport efficiency, which is a significant limitation for their development. Previous studies have shown that when the microstructure of the polymer lacks a single orientation, it results in lower carrier mobility. Therefore, improving the orientation of conductive polymer materials has become a primary goal.
    In the master's thesis of Senior Keng-Fuu Cheng in our laboratory, an automated laser lithography system was successfully established. This research will further improve the laser optical path, not only to fabricate high-resolution and high-quality electrodes but also to control the complex intermolecular interactions during the solution processing. This will allow the fabrication of highly ordered conductive polymer films, thereby enhancing their carrier transport behavior. The combination of highly ordered conductive polymer films with low surface energy electrodes is expected to significantly improve carrier transport efficiency.

    摘要 i 目錄 viii 表目錄 xi 圖目錄 xii 第 一 章 、緒論 1 壹、 前言及研究動機 1 第 二 章 、文獻回顧 2 壹、 自動化雷射曝光系統 2 一、 雷射曝光原理 2 二、 雷射曝光量 3 三、 準直 6 四、 雙層光阻 ( Bilayer photoresist ) 6 五、 自動化雷射曝光 7 貳、 有機場效電晶體 (Organic Field-Effect Transister, OFET) 10 一、 場效電晶體 10 二、 有機半導體薄膜 14 參、 導電高分子 15 一、 導電高分子簡介 15 二、 導電高分子有序性 16 肆、 自組裝單分子層 (Self-Assembled Monolayer, SAM) 20 伍、 四點探針量測 (Four-point probe measurement) 23 第 三 章 、實驗材料與儀器 27 壹、 實驗藥品整理 27 貳、 實驗儀器整理 29 第 四 章 、實驗架構 32 壹、 實驗流程 32 一、 簡易實驗流程圖 32 二、 實驗過程詳述 33 貳、 儀器原理 36 一、 雷射微影系統 36 二、 原子力顯微鏡 (Atomic Force Microscope, AFM) 38 三、 極化拉曼頻譜量測系統 40 四、 接觸角量測系統 41 第 五 章 、結果與討論 43 壹、 雷射微影曝光系統改良 43 一、 雷射光路 43 二、 黃光微影製程改良後之電極 47 貳、 電晶體效能提升 47 一、 表面能差異 47 二、 於不同表面能電極沉積P3HT高分子薄膜之載子遷移率 53 三、 提高P3HT高分子薄膜之有序性 - 拉曼散射異向性 56 四、 P3HT高分子薄膜之表面形貌/於二氧化矽基板沉積 57 五、 於金電極沉積P3HT高分子薄膜之載子遷移率 61 第 六 章 、結論 64 第 七 章 、參考文獻 65

    [1] Lin, Burn Jeng. "Deep UV lithography." Journal of vacuum science and technology 12.6 (1975): 1317-1320.
    [2] Wen, Zaoxia, et al. "Progress in Polyhedral Oligomeric Silsesquioxane (POSS) Photoresists: A Comprehensive Review across Lithographic Systems." Polymers 16.6 (2024): 846.
    [3] https://yehnan.blogspot.com/2012/02/arduino_16.html
    [4] McKean, D. R., N. J. Clecak, and A. F. Renaldo. "Development of bilayer resists for deep‐ultraviolet and i‐line application." Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 9.6 (1991): 3413-3417.
    [5] Suh, Yeonjoon, and George Patrick Watson. "Optimization of Bilayer Lift-Off Process to Enable the Gap Size of 1μm Using LOR 3A and S1813." (2021).
    [6] 鄭亘甫(2021)。架設自動化雷射微影系統以提高有機電晶體製程之產率及穩定度
    引用自:https://thesis.lib.ncku.edu.tw/thesis/detail/0fc5227c66dcfa3ad4e7dfb4decf0aaf/
    [7] Neamen, Donald A. Semiconductor physics and devices: basic principles. McGraw-hill, (2003).
    [8] 賴彥瑋(2022)。以異向性電脈衝飛行時間系統關聯介觀電子結構之有序性與其載子散射生命期
    引用自:https://thesis.lib.ncku.edu.tw/thesis/detail/8851bf7fd774683a9576af608e85e0a2/
    [9] Sathiyan, Govindasamy, et al. "Synthesis and studies of carbazole-based donor polymer for organic solar cell applications." Colloid and Polymer Science 296 (2018): 1193-1203.
    [10] Lee, Seung Joo, et al. "Understanding the role of organic polar solvent induced nanoscale morphology and electrical evolutions of P3HT: PCBM composite film." Organic Electronics 25 (2015): 50-56.
    [11] Irwin, Michael D., et al. "Structural and electrical functionality of NiO interfacial films in bulk heterojunction organic solar cells." Chemistry of Materials 23.8 (2011): 2218-2226.
    [12] Kumar, Brijesh, Brajesh Kumar Kaushik, and Yuvraj Singh Negi. "Organic thin film transistors: structures, models, materials, fabrication, and applications: a review." Polymer Reviews 54.1 (2014): 33-111.
    [13] Pisula, Wojciech, et al. "Solid-state organization and ambipolar field-effect transistors of benzothiadiazole-cyclopentadithiophene copolymer with long branched alkyl side chains." Polymers 5.2 (2013): 833-846.
    [14] Heeger, Alan J., Niyazi Serdar Sariciftci, and Ebinazar B. Namdas. "Semiconducting and metallic polymers." (2010). Oxford University Press
    [15] Bombile, Joel H., Michael J. Janik, and Scott T. Milner. "Tight binding model of conformational disorder effects on the optical absorption spectrum of polythiophenes." Physical Chemistry Chemical Physics 18.18 (2016): 12521-12533.
    [16] Yamashita, Yu, et al. "Transition between band and hopping transport in polymer field‐effect transistors." Advanced materials 26.48 (2014) : 8169-8173.
    [17] Kim, Youngkwon, et al. "Regioregularity-control of conjugated polymers: from synthesis and properties, to photovoltaic device applications." Journal of Materials Chemistry A 10.6 (2022): 2672-2696.
    [18] MIRJI, S. A. "Octadecyltrichlorosilane adsorption kinetics on Si (100)/SiO2 surface: contact angle, AFM, FTIR and XPS analysis. Surface and Interface Analysis: An International Journal devoted to the development and application of techniques for the analysis of surfaces, interfaces and thin films" (2006), 38.3: 158-165.
    [19] Ahn, Kwang Seok, et al. "Structural transition and interdigitation of alkyl side chains in the conjugated polymer poly (3-hexylthiophene) and their effects on the device performance of the associated organic field-effect transistor." ACS applied materials & interfaces 12.1 (2019): 1142-1150.
    [20] Waldrip, Matthew, et al. "Contact resistance in organic field‐effect transistors: conquering the barrier." Advanced Functional Materials 30.20 (2020) : 1904576.
    [21] DE TOURNADRE, Grégoire, et al. "High voltage surface potential measurements in ambient conditions: Application to organic thin-film transistor injection and transport characterization. " Journal of Applied Physics, (2016), 119.12.
    [22] VAN OSS, Carel J. "The properties of water and their role in colloidal and biological systems. " Academic Press, (2008).

    下載圖示 校內:立即公開
    校外:立即公開
    QR CODE