氧化釩本身對於溫度是一個非常靈敏的材料，在文獻研究當中得知其具有許多相異的氧化態，例如VO、VO2、V2O5、V6O13等等…，各自具有著相異的物理特性，在文獻中有著許多的研究發表。
在我們實驗室先前的研究中發現氧化釩薄膜經過退火處理後具有鐵磁性的現象，這在文獻當中是較少有人討論的。因此，我們好奇氧化釩的磁性來源機制，為了要探討此一問題，我們希望成長出良好晶相的氧化釩薄膜，首先控制成長環境中溫度與通氧量的變因得出良好V2O5晶相，再以高真空退火處理樣品與變氧量成長樣品兩種探討方式去研究氧化釩薄膜的特性變化。
經過了XRD與XAS的量測分析我們發現高真空退火處理讓樣品產生相轉變現象，由原本V2O5五價態轉變為偏四價的混相結構（V6O13、VO2）。退火處理改變了樣品的晶相結構，在磁性討論上是較為複雜的，因此我們進一步去探討相同V2O5結構不同通氧量成長的樣品，在XAS中發現到變氧成長改變了鍵結原子的束縛能，同時磁性量測中發現通氧量減少鐵磁性增強，我們以高頻量測分析的結果支持了樣品內部氧空缺引致了鐵磁性的解釋。

The vanadium oxides, like VO, VO2, and V2O5, have been extensively studied and demonstrated to be various physical properties. The previous research of our laboratory has found that the annealed vanadium oxide thin films show ferromagnetism, which is rarely discussed in the vanadium oxides. In our experiment, we change the temperature and oxygen partial pressure in deposition process and control the crystal structures of the vanadium oxide films to further explore the possible origin of the room-temperature (RT) ferromagnetism. From x-ray diffraction (XRD) and x-ray absorption spectra (XAS) analyzing results , we find that the annealed samples change structure phase from V2O5 phase to mix phase. The phase transition process complicates the discussion of the origin of RT ferromagnetism, thus we focus on the samples with similar crystal structures while different oxygen flowing rates. From the XAS analysis, we observe the variation of the binding energy and the RT ferromagnetism decreases with the increasing of oxygen flowing rate. High frequency results, furthermore, indicate that the sample with low oxygen flowing rate shows higher defect density and suggests the origin of RT ferromagnetism could be associated to the oxygen vacancy variation.

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