本文探討微流體晶片的微管道製程，採用CO2雷射雕刻鈉鈣玻璃(Soda-lime)基材的可行性。嘗試以不同的加工參數；包括：雷射功率、燒蝕速度、雕刻次數、加熱板溫度等；並針對製程所產生的缺陷，如：燒焦、裂痕、熱影響區、及碎屑堆積，進行一系列的試驗與探討，以期找出適合加工微管道的最佳化參數。並且為了減少這些缺陷，嘗試以加熱板來輔助加工，或是施行製後退火處理。再利用此製程製作之十字形狀微管道(電泳晶片典型樣式)成品，以電壓驅動的控制方式完成樣本注入(loading)及計量分配(dispensing)等階段，以測試連續注射模式的效果，並完成檢測分析。
此外，本文也測試以不同的加工參數，針對長方形管道，以改變管道轉角曲率半徑(R=20、40、60 mm)的規格要求，比較管道成品的表面品質差異性，並以BOE蝕刻方式解決非直線形管道，易在加工邊緣處造成的碎屑堆積問題，成功證實了以CO2雷射加工鈉鈣玻璃基材的品質可靠性。

This study investigates the control parameters for fabrication of the micro-channel on Soda-lime glasses using the CO2 laser scriber. It is well known that, when the micro-channel is carved directly by CO2 laser with air surrounded, the channel defects, including micro-cracks, scorches, and bulges, could be detected. Thus, a heating plate can be considered in order to overcome these defect problems caused by the laser fabrication. In this work, control parameters, including the laser power, scribing speed, scribing passes, and operating temperature of the heating plate are tested to optimize the fabricating quality for carving micro-channels on Soda-lime glasses by the CO2 laser scriber.
Furthermore, micro-channels with different curvature for channel corners are fabricated by various control parameters, and the fabricating quality of the channel surfaces are discussed. According to the present results, the problems of non-linear forms for channel rims, caused by the laser beam, could be improved when proper control parameters are utilized.

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