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研究生: 張郁敏
Chang, Yu-Min
論文名稱: 空氣電漿處理於黃原膠電子元件之應用
Application of air plasma treatment in Xanthan gum electronic devices
指導教授: 張御琦
Chang, Yu-Chi
學位類別: 碩士
Master
系所名稱: 工學院 - 工程科學系
Department of Engineering Science
論文出版年: 2024
畢業學年度: 112
語文別: 英文
論文頁數: 64
中文關鍵詞: 黃原膠非揮發性電阻式記憶體氣體感測器空氣電漿
外文關鍵詞: Xanthan gum, resistive switching memory, Gas sensor, Air plasma
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  • 隨著AI和物聯網時帶來臨,人們追求更新、更快速的電子產品,無法分解的電子廢棄物越來越多。為了減少這些電子垃圾,近年來,生物材料應用於電子元件的研究已經出現,然而非常具有潛力的黃原膠尚未受到矚目,因此本研究致力於黃原膠非揮發性隨機存儲電阻式記憶體(黃原膠RRAM),和黃原膠氧化鋅複合材料之氣體感測器的開發。並且以乾淨簡便的空氣電漿,對其進行優化,以期提升元件性能,同時兼顧環境友善。
    在第三章,經電漿處理之黃原膠RRAM,不僅電流分布更加均勻、開關電壓下降,ON/OFF ratio也保持在~10^3。這些特性可由阿瑞尼士方程式擬合曲線和陷阱跳躍傳導模型來解釋,也說明了電漿處理能夠抑制RRAM傳導的不穩定性,降低耗能,並且提升開關均勻性。
    在第四章,使用黃原膠當作生物模板,輔助氧化鋅於水熱法中成長。除了改變氧化鋅的表面形貌,使用電漿表面處理感測層後,響應大幅提升並且工作溫度下降。這些現象可以歸因於電漿引入缺陷,提供了更多氣體反應位點。本研究亦從反應動力學角度切入探討,利用阿瑞尼士方程式擬合曲線和朗繆爾等溫吸附擬合曲線進行更深入的解說。
    本研究已實踐綠能電子元件的開發,並且展現出電漿優化電子元件之特性,期待這些新興材料與方法,能夠為地球永續發展做出貢獻。

    As AI and the Internet of Things (IoT) become prevalent, people pursue electronic products that are more advanced and faster, leading to an increasing amount of non-decomposable electronic waste. In recent years, research on applying bio-materials to electronic devices has emerged to reduce electronic waste. However, the highly promising xanthan gum has not received much attention. Therefore, this study focuses on the development of resistive random-access memory (xanthan gum RRAM) and a gas sensor using xanthan gum-zinc oxide composite material. Additionally, the study optimizes these devices with clean and simple air plasma to enhance performance while being environmentally friendly.
    In Chapter 3, the xanthan gum RRAM treated with plasma not only exhibits a more uniform current distribution and reduced switching voltage but also maintains an ON/OFF ratio of ~10^3. These characteristics are explained by fitting curves to the Arrhenius equation and the trap-assisted conduction model. This illustrates that plasma treatment can suppress the instability of RRAM conduction, reduce energy consumption, and improve switching uniformity.
    In Chapter 4, xanthan gum is used as a biological template to assist the growth of zinc oxide in a hydrothermal process. Besides altering the surface morphology of zinc oxide, significant improvement in response and a decrease in operating temperature are achieved by plasma surface-treated sensing layers. These phenomena can be attributed to the introduction of defects by plasma, providing more gas reaction sites. The study also delves deeper into the reaction kinetics using the Arrhenius equation fitting curve and Langmuir isotherm adsorption fitting curve for further explanation.
    This study has realized the development of green electronic devices and demonstrated the characteristics of plasma-optimized electronic devices. It is anticipated that these emerging materials and methods will contribute to the sustainable development of the Earth.

    摘要 I Abstract II 誌謝 IV Contents V Figure Captions VII Chapter 1 Introduction 1 1.1 Non-volatile memory 1 1.1.1 Ferroelectric Random-Access Memory (FeRAM) 2 1.1.2 Magnetoresistive Random-Access Memory (MRAM) 3 1.1.3 Phase-change Random-Access Memory (PCRAM) 4 1.1.4 Resistive Random-Access Memory (RRAM) 4 1.2 Sensors 6 1.2.1 Photodetector 6 1.2.2 Humidity sensor 7 1.2.3 Gas sensor 8 1.3 Xanthan gum 9 1.4 Zinc Oxide (ZnO) 11 1.5 Paper Review 11 1.6 Motivation 12 1.7 Thesis organization 12 Chapter 2 Experiment Details 13 2.1 Fabrication equipment 13 2.1.1 Magnetic Stirrer 13 2.1.2 Radio Frequency Sputter (RF Sputter) 13 2.1.3 Ultrasonic Oscillator 14 2.1.4 Spin Coater 14 2.1.5 Oven 15 2.1.6 Air Plasma system 15 2.2 Analysis equipment 16 2.2.1 Keithley2636B Source Meter 16 2.2.2 Direct current (DC) Gas measurement system 16 2.2.3 X-ray Photoelectron Spectroscopy (XPS) 17 2.2.4 Atomic Force Microscope (AFM) 18 2.2.5 X-ray diffractometer (XRD) 19 2.2.6 Scanning Electron Microscope (SEM) 20 2.2.7 Focused Ion Beam (FIB) 21 2.2.8 Transmission Electron Microscope (TEM) 22 Chapter 3 Improved uniformity of xanthan gum resistive memory device by lowering activation energy 23 3.1 Introduction 23 3.2 Experiment 23 3.3 Results and discussions 25 3.4 Conclusion 32 Chapter 4 Biotemplate NO2 Gas Sensor with Low Activation Energy and High Response 33 4.1 Introduction 33 4.2 Experiment 34 4.3 Results and discussions 35 4.4 Conclusion 44 Chapter 5 Future Prospects 46 References 47

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