近年來，石墨烯相關的開發及研究是炙手可熱，絕佳的材料特性為主要原因，包含其在微觀的尺度下，高強度及高導電特性的表現。因此，我們打算利用石墨烯此特性，來做為介電彈性制動器之電極材料，並測量制動器在通電之下的形變量。

在驗證納入石墨烯的介電彈性制動器之設計結構及有了初步測量結果後，為了要製作有更多層結構、性能更好的介電彈性制動器，我們縮小制動器的尺寸，使其未來有納入微機電系統的可能性，並設計了一個可以製做微觀尺寸制動器的製程，同時也設計了一造價相對便宜卻可以擁有覆晶技術概念之儀器來輔佐製程。此製程目前可製做出兩層微觀的介電彈性制動器之結構。

These days, research related to graphene has expand wildly, due to its perfect material properties, including high strength and high electronic conductivity under Nano-scale. Therefore, we would like to utilize this properties, to incorporate graphene into dielectric elastomer actuator (DEA) then measure its performance.

After confirming designed structure and having preliminary result, in order to make better performance of DEA with more layer structure, we scale down the size of DEA to micro size, making it possible to integrate into MEMS in the future. Besides designing its scaling down process, we also make a relative cheap flip chip aligner to help us make device. Now the process can make two layers of DEA structure in micro scale.

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