聰穎材料氧化釩薄膜對溫度變化非常靈敏，具有特別電性與磁性的特性最近引起高度的討論。在塊材的形式，許多穩定的釩氧化物，例如，VOX 、V2O3、VO2、V2O5已經被廣泛的討論在熱、電的特性。

　　然而，在文獻上釩氧化物薄膜具有鐵磁性的性質幾乎未被討論，在此我們首位利用離子束濺鍍成長氧化釩薄膜發現具有鐵磁性的性質。接而我們詳細的討論在此製成成長出的氧化釩薄膜，在高真空中不同退火溫度時，各別的結構、價數、磁性、電性變化與關連性。最後以V的吸收前緣(XANES)與延伸吸收光譜(EXAFS)確認此氧化釩的能態、價數與電子耀遷等行為。

　　結果顯示此製成在剛沉積時 、高真空退火200℃及300℃為室溫鐵磁性，而再退火到400℃具有反磁的行為。在這一系列的系統中200℃退火有最大的飽和磁化量。另外在XANES、EXAFS與電性顯示此釩氧化物的價數介於三價到五價之間隨著高真空退火而價數漸漸降低，此結果推測磁性來源是V2O5結構因退火氧空缺所致。

　The thin film material with ”smart” properties sensitive to temperature variations, electrical, magnetic field, has recently attracted great attention. In bulk form, various vanadium oxides with unusual thermal ,optical and electrical properties, such as VOx, V2O3, VO2, V2O5 , have been widely studied.

　However, the ferromagnetic properties of vanadium oxide thin films are rarely discussed in public domain. In this presentation, we first compose ferromagnetic thin films of vanadium oxides by ion beam sputter. Then, we discuss the property changes of structural, valence, magnetic and electric characteristics by annealing treatment. Finally, we apply XANES and EXAFS to identify the variation of vanadium oxidation state and present our approach to the vanadium oxide films.

　The result indicated RT ferromagnetism has been observed for the as deposited , 200℃ and 300℃ annealed films, while diamagnetic behavior appears for 400℃ annealed film. The 200℃ annealed VOx films possess the highest magnetic moment in this system. Its XANES,EXAFS and electric properties could show the possible valence distribute among pentad to trivalence with annealing process which implied origin of magnetism maybe cause from oxygen vacancy.

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