藉由掃描式探針顯微鏡(SPM)觀察PET/AgNP薄膜的表面形貌可以探討利用掃描式熱微影系統所合成的銀奈米粒子和其分布狀況。高穿透度的PET薄膜內添加不同濃度的三氟醋酸銀(銀前驅物)，此薄膜分別經過整體等溫加熱以及局部加熱的熱微影兩種方式還原出奈米銀粒子，並將所得的PET/AgNP薄膜施加不同時間的電漿處理。PET/AgNP的薄膜可以利用暗場顯微鏡的散射光譜和紫外,可見光分析儀的吸收光譜證明奈米銀粒子的存在，利用原子力顯微鏡(AFM)的Tapping模式可以觀察其表面形貌。表面電漿子共振的觀察可透過改變氬電漿處理的方式下PET/AgNP薄膜所得的吸收光譜來探討。由於電漿的轟擊，PET/AgNP薄膜的表面形貌會隨著電漿處理時間的增長有明顯的變化，透過表面形貌的呈現我們觀察到高濃度的銀前驅物將導致高密度的銀粒子還原。這項研究將大量還原和局部還原的銀奈米粒子嵌入在高分子薄膜內然後透過其光學性質和掃描式探針顯微鏡所得的表面形貌來展現電漿轟擊處理的效果。

To investigate the distribution of silver nanoparticles (AgNPs) synthesized by scanning thermal lithography (SThL), the morphology of PET/AgNP film was observed through scanning probe microscopy (SPM). Optically-transparent poly(ethylene terephthalate) or PET was preloaded with various loadings of silver precursor, silver trifluoroacetate (CF3COOAg). The films were isothermally heated and SThL-fabricated for bulk and localized fabrication of AgNPs, respectively. Obtained PET/AgNP films were subjected to plasma treatment of different durations. The presence of AgNPs were confirmed by obtaining the scattering and absorption spectra of the PET/AgNP films using UV-visible spectroscopy and dark-field optical microscopy (DFOM). Morphologies of PET/AgNP films were characterized by scanning probe microscopy through AFM tapping mode. Surface plasmon resonance (SPR) characteristics were altered by argon plasma treatment as investigated by the absorption spectra of the PET/AgNP films plasma-treated at different durations. The morphologies of the PET/AgNP films changed significantly with increasing plasma treatment duration due to etching. Higher silver precursor loading led to denser particles, as presented on the morphologies. This work demonstrated the effect of plasma etching treatment on the SPM-obtained morphologies and optical properties of both bulk and localized-fabricated AgNPs embedded on polymer film.

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