本論文分析電漿負載系統之功率變動，並藉由適當的設計控制，以使電漿負載持續保持穩定輸出，其中本文並輔以功因校正升壓式變換器之設計，不僅提高電源輸入品質，且提供全橋相移逆變器穩定的直流輸入電壓，以減低切換損失，提高整體供電效能。而為驗證所提方法，本文並經由模擬測試與線路測試，以佐證該方法之可行性，茲由硬體實現與波形實測，應可協助說明本方法於電漿負載供電穩定及電漿系統研發上，應具有其參考價值。

In view of plasma load applications, this thesis has proposed a design of electric power supply such that the supplying-power for the plasma load need can be well maintained. In the mean time, a boost converter with power factor correction capability was also aided in anticipation of improving the input power quality and offering a stable voltage for the full-bridge phase-shift inverter. In this way, the switching loss can be reduced, while the overall performance can be better ensured. To validate the feasibility of this method, both simulation analysis and circuit experiments have been prudently performed. From the hardware realization and waveform measurements, they have supported the value of the method in plasma system applications.

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