本論文主要研究鈣鈦礦奈米薄膜面射型雷射之共振腔，反射鏡採用高反射率的介質型分佈式布拉格反射鏡(DBR)作為上下層結構，其較無缺陷及裂痕且成本較低，並以旋轉塗佈法製備增益介質鈣鈦礦薄膜，在室溫下具有強大激子束縛能及高耦合強度，且透過改善鈣鈦礦的表面粗糙度及薄膜晶體品質以減少表面輻射復合及散射損失，而在元件製作過程中，為了避免增益介質受到破壞，利用光學膠黏合上下層DBR，製作出雷射共振腔之元件結構。
首先經由電腦軟體CST模擬DBR結構，再使用共濺鍍機(Sputter)實做DBR，達到布拉格反射鏡之中心波長750nm的高反射率DBR，另外我們在旋塗前有無對DBR照射uvo，還是使用金屬遮罩或真空膠帶黏貼DBR定義鈣鈦礦的工作區域後拆除並清潔表面，皆不影響DBR的結構。
接著以旋轉塗佈法製作不同鈣鈦礦MAPbI3與FAMACsPb(BrI)3於下層DBR上，使用真空膠帶定義鈣鈦礦的工作區域比金屬遮罩佳，因真空膠帶較薄，不容易在試片中間停留堆積影響鈣鈦礦成長，再來進入電子束蒸鍍機(E-gun)的高溫製程時，溫度並不影響鈣鈦礦的表面形貌及厚度，而FAMACsPb(BrI)3的晶粒尺寸較一致，厚度較厚，不易產生散射且能量增益多，發光強度較高，因此採用FAMACsPb(BrI)3作為共振腔中的增益介質。
最後以不施加壓力、輕壓、重壓和長尾夾對壓方式使光學膠黏合上下層DBR製作共振腔，所施加的壓力越大，共振腔長度越小，其中固定壓力的長尾夾對壓方式有較合適的共振腔長度，可以形成一個品質較好的雷射共振腔。

This thesis mainly discusses on perovskite nano-film surface-emitting laser’s cavity. We adopt a dielectric distributed Bragg reflector (DBR) with high-reflectivity as the top and bottom mirror, which is relatively no defects and cracks and has a relatively low cost. The gain medium, perovskite film, is manufactured by the spin-coating method, which has high exciton binding energy and high oscillation strength at room temperature and improving perovskite surface roughness and crystal quality reduces surface radiation recombination and scattering loss. To avoid the destruction of the gain medium during device fabrication, optical glue is used to bond the top and bottom DBRs to make the laser cavity's device structure.

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